[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2013.14.6.334

Analysis of High Vacuum System Based on the Applications of Vacuum Materials

Kim, Hyung-Taek (Department of Advanced Materials Engineering, College of Engineering, Incheon National University)

Publication Information

Transactions on Electrical and Electronic Materials / v.14, no.6, 2013 , pp. 334-338 More about this Journal

Abstract

In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

Keywords

High vacuum system; Vacuum characteristics; Vacuum materials; Simulation;

Citations & Related Records

Reference

1	Jousten Karl, Nakhosteen C. Benjamin. Handbook of vacuum technology, Wiley-VCH Verlag GmbH; 2008.
2	Hata David. Introduction of vacuum technology. Prentice Hall; 2007.
3	J. M. Lafferty. Foundations of vacuum science and technology. John Wiley and Sons; 1998.
4	Yoshimura Nagamitsu. Vacuum technology practice for scientific instruments. Springer; 2008.
5	Hucknall, D. J., Mois A., Vacuum technology calculations in chemistry. Royal society of chemistry; 2003.
6	Chamber A., Basic vacuum technology (2nd Ed.). Taylor & Francis Group; 1998.
7	John F. O'Hanlon. A user's guide to vacuum technology. John Wiley and Sons; 1989.
8	E. D. Erikson, T. G. Beat, D. D. Berger, B. A. Frazier. Vacuum 1987; 37: 379.
9	Y. Hirohata, A. Mutoh, T. Yamashina, T. Kikuchi, N. Ohsako. Vacuum 1996; 47: 727-731. DOI ScienceOn
10	Redhead Paul A., Vacuum science & technology pioneers of the 20th century. American Institute of Physics; 1997.
11	F. Grangeon, C. Monnin, M. Mangeard, D. Paulin. Vacuum 2004; 73: 243-248. DOI ScienceOn
12	Technology Sources Ltd., User's Guide of $VacSim^{Multi}$ Simulator (manual), 2001.