• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.16-22
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• 2005

• Proceedings of the Korean Society of Rheology Conference
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• 2002.05a
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• pp.13-16
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• 2002

• Journal of IKEEE
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• v.13 no.2
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• pp.126-131
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• 2009

To overcome short channel effects, wrap-around field effect transistors have drawn a great deal of attention for their superior electrostatic coupling between the channel and the surrounding gate electrode. In this paper, we introduce a bottom-up technique to fabricate a wrap-around field effect transistor using silicon nanowires as the conduction channel. Device fabrication was consisted mainly of electron-beam lithography, dielectrophoresis to accurately align the nanowires, and the formation of gate electrode using electrochemical deposition. The electrolyte for electrochemical deposition was made up of non-toxic organic-based solution and liquid nitrogen was used as a method of maintaining the shape of polymethyl methacrylate(PMMA) during the process of electrochemical deposition. Patterned PMMA can be used as a nano-template to produce wrap-around gate nano-structures.

• Journal of Biosystems Engineering
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• v.41 no.1
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• pp.60-65
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• 2016

Purpose: The necessity for precise manipulation of bioparticles has greatly increased in the fields of bioscience, biomedical, and environmental monitoring. Dielectrophoresis (DEP) is considered to be an ideal technique to manipulate bioparticles. The objective of this study is to develop a DEP microfluidic device that can trap fluorescent beads, which mimic bioparticles, at the low voltage and frequency of the sinusoidal signal supplied to the microfluidic device. Methods: A DEP microfluidic device, which is composed of polydimethylsiloxane (PDMS) channels and interdigitated electrode networks, is fabricated to trap fluorescent beads. The geometry of the interdigitated electrodes is determined through computational simulation. To determine the optimum voltage and frequency of the sinusoidal signal supplied to the device, the experiments of trapping beads are conducted at various combinations of voltage and frequency. The performance of the DEP microfluidic device is evaluated by investigating the correlation between fluorescent intensities and bead concentrations. Results: The optimum ratio of the widths between the negative and positive electrodes was 1:4 ($20:80{\mu}m$) at a gap of $20{\mu}m$ between the two electrodes. The DEP electrode networks were fabricated based on this geometry and used for the bead trapping experiments. The optimum voltage and frequency of the supplied signal for trapping fluorescent beads were 15 V and 5 kHz, respectively. The fluorescent intensity of the trapped beads increased linearly as the bead concentration increased. The coefficient of determination ($R^2$) between the fluorescent intensity and the bead concentration was 0.989. Conclusions: It is concluded that the microfluidic device developed in this study is promising for trapping bioparticles, such as a cell or virus, if they are conjugated to beads, and their concentration is quantified.

• Korean Chemical Engineering Research
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• v.55 no.2
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• pp.253-257
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• 2017

Graphene is a monolayer carbon material which consists of $sp^2$ bonding between carbon atoms. Its excellent intrinsic properties allow graphene to be used in various research fields. Many researchers believe that graphene is suitable for electronic device materials due to its high electrical conductivity and carrier mobility. Through chemical doping, n- or p-type graphene can be obtained, and consequently graphene-based devices which have more comparable structure to common semiconductor-based devices can be fabricated. In our research, we introduced the dielectrophoresis process to the chemical doping step in order to improve the effect of chemical doping of graphene selectively. Under 10 kHz and $5V_{pp}$ (peak-to-peak voltage), doping was conducted and the Au nanoparticles were effectively formed, as well as aligned along the edges of graphene. Effects of the selective chemical doping on graphene were investigated through Raman spectroscopy and the change of its electrical properties were explored. We proposed the method to enhance the doping effect in local region of a graphene layer.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.4
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• pp.223-231
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• 2019

A continuum-based design sensitivity analysis(DSA) method is developed for electrostatic problems. To consider high order objective functions, we use 9-node finite element basis functions for analysis and DSA methods. As the design variables are parameterized with B-spline functions, smooth boundary variations are naturally obtained. To solve mesh entanglement problems during the optimization process, a mesh regularization scheme is employed. By minimizing the Dirichlet energy functional, mesh uniformity can be automatically achieved. In numerical examples for maximizing dielectrophoresis forces, the numerical results are compared with well-known electrode geometries and the obtained characteristics are discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.515-516
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.99-100
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.395-396
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1228-1231
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• 2005

This paper reports about the development of scanning probe microscopy (SPM) tip with multi-walled carbon nanotube (MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which causes the dielectrophoresis was used for alignment and deposition of CNTs to the metal coated SPM tip. By dropping the MWNT solution and applying an electric field between an SPM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the SPM tips due to the attraction by the dielectrophoretic force. In this paper, we investigate experimental conditions about the alignment of the CNT to tip axis according to the change of the angle between a tip and an electrode. Experimental results are presented, and then fabricated CNT tips are showed and measurement results for 15nm gold particles are compared with that of the conventional silicon tip.