Performance evaluation of CNT tips that is deformed by FIB

집속이온빔에 의해 변형된 CNT 팁의 성능평가

  • Shin, Y.H. (Dept. of intelligent Precision Machine, KIMM) ;
  • Han, C.S. (Dept. of intelligent Precision Machine, KIMM)
  • Published : 2006.10.18