• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.220-220
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• 2011

The Ne-Xe plasmas in dense plasma-focus device with coaxial electrodes were generated for extreme ultraviolet (EUV) lithography. The influence of gas mixture ratio, Ne-Xe (1, 10, 15, 20, 25, 30, 50%) mixture gas, on EUV emission measurement, EUV intensity and electron temperature in the coaxially focused plasma were investigated. An input voltage of 4.5 kV was applied to the capacitor bank of 1.53mF and the diode chamber was filled with Ne-Xe mixture gas at a prescribed pressure. The inner surface of the cylindrical cathode was lined by an acetal insulator. The anode was made of tin metal. The EUV emission signal of the wavelength in the range of 6~16 nm has been detected by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission line was also detected by the composite-grating spectrometer of the working wavelength range of 200~1100 nm (HR 4000CG). The electron temperature is obtained by the optical emission spectroscopy (OES) and measured by the Boltzmann plot with the assumption of local thermodynamic equilibrium (LTE).

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.332-332
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• 2011

The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

• The Journal of the Acoustical Society of Korea
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• v.31 no.5
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• pp.280-287
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• 2012

This paper presents a study on the experimental analysis of the impedance characteristics according to the rotational direction of the transmission beam of a cylindrical sensor array. Besides, this suggests a real time control technique of the transmitter output for the effective maximum power transmission, in order to drive efficiently the rotational transmission beam of the active sonar transmitter. The output characteristics of the transmitter and the real-time impedance variations of the sensor array are analyzed under the overload conditions. They are caused by electric and acoustic boundary conditions when the rotational transmission beam is operated. From these results, a new output control method of the transmitter is proposed to protect the transmitter and its loads. It can maximize the output power without the transmission pause even if the transient phenomena occur. The proposed technique is verified from the experiment.

• Journal of Powder Materials
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• v.15 no.1
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• pp.46-52
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• 2008

The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actuator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSSL) and femtosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictor is presented. The model includes bubble formation and growth, droplet ejection through nozzle, and dynamics of fluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important for a high frequency actuator, some special beam delivery setups and post processing techniques have been researched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are simulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity and volume are compared with the experimental results of a cylindrical-shaped actuator. It is found that the micro actuators having tapered restrictors show better high frequency characteristics than those having a cylindrical shape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial feasibility for the laser direct ablation technique although more development is required.

• Journal of Korean Society of Steel Construction
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• v.12 no.6
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• pp.737-748
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• 2000

This paper presents a numerical analysis procedure and a characteristics for dynamic of cylindrical panels. The panels with simply-simply or simply-clamped edge supports are subjectes to circumferential compressive or flexural stresses. The differential equations governing vibration and dynamic for these panels are derived by using the fundamental differential equation of the Love-Timoshenko and are solved numerically by the Galerkin method. The panel with simply-clamped edge supports is used a trigonometric function or an eigen function of a beam as a trial function and the effects of trial functions on numerical solutions are displayed. Numerical results are presented to demonstrate the effects of the flexural parameters in natural frequencies and coefficients of critical buckling, and some typical mode shapes of vibration and buckling are also presented.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.17 no.2
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• pp.193-201
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• 2004

The aim of this study is focused on getting an almost exact solution which is the simplicity and exactness of an axisymmetrically loaded cylindrical shell. This method replaces the finite element method which is a very powerful tool for analysis of any kind of structure which has an arbitrary shape, but is still a numerical analysis. Instead, this study uses the method of distribution of end actions which is a kind of iteration technique to implement the leading matrix method. The distribution and carry-over factors of a cylinder are calculated by the theory of a differential equation of a beam on an elastic foundation. The results are satisfactory when this method is applied to a cylinder that is subjected to a concentrated load and hydrostatic pressure when compared with the BEF analogy separately.

• Nuclear Engineering and Technology
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• v.25 no.1
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• pp.80-90
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• 1993

Radiation streaming through penetrations has been of great concern in radiation shielding design and analysis. This study developed a Monte Carlo method and constructed a data library of results calculated by the Monte Carlo method for radiation streaming through a straight cylindrical duct in concrete walls of a broad, mono-directional, mono-energetic gamma-ray beam of unit intensity. It was demonstrated that average dose rate due to an isotropic point source at arbitrary positions can be well approximated using the library with acceptable error. Thus, the library can be used for efficient analysis of radiation streaming due to arbitrary distributions of gamma-ray sources.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.11
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• pp.1218-1223
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• 2004

Porous silicon materials have been shown to have bright prospects for applications in light emitting, solar cell, as well as light- and chemical-sensing devices. In this report, structures of porous silicon prepared by anodic etching in HF-based solution with various etching times were studied in detail by Atomic Force Microscopy and Small Angle X -ray Scattering technique using the high energy beam line at Pohang Light Source in Korea. The results showed the coexistence of the various pores with nanometer and submicrometer scales. For nanameter size pores, the mixed ones with two different shapes were identified: the larger ones in cylindrical shape and the smaller ones in spherical shape. Volume fractions of the cylindrical and the spherical pores were about equal and remained unchanged at all etching times investigated. On the whole uniform values of the specific surface area and of the size parameters of the pores were observed except for the larger specific surface area for the sample with the short etching time. The results implies that etching process causes the inner surfaces to become smoother while new pores are being generated. In all SAXS data at large Q vectors, Porod slope of -4 was observed, which supports the fact that the pores have smooth surfaces.

• Proceedings of the Korean Society of Medical Physics Conference
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• 2002.09a
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• pp.407-410
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• 2002

Monochromatic x-ray CT has several advantages over conventional CT, which utilizes bremsstrahlung white x-rays from an x-ray tube. There are several methods to produce such monochromatic x-rays. The most popular one is crystal diffraction monochromatization, which has been commonly used because of the fact that the energy spread is very narrow and the energy can be changed continuously. The alternative method is the use of fluorescent x-ray, which has several advantages such as large beam size and fast energy change. We have developed a parallel-beam and a fan-beam monochromatic x-ray CT, and compared some characteristics such as accuracy of CT numbers between those systems. The fan beam monochromatic x-rays were generated by irradiating target materials by incident white x-rays from a bending magnet beam line NE5 in 6.5 GeV Accumulation Ring at Tukuba. The parallel beam monochromatic x-rays were generated by using a silicon double crystal monochromator at the bending magnet beam line BL-20BM in Spring-8. A Cadmium telluride (CdTe) 256 channel array detector with 512mm sensitive width capable of operating at room temperature was used in the photon counting mode. A cylindrical phantom containing eight concentrations of gadolinium was used for the fan beam monochromatic x-ray CT system, while a phantom containing acetone, ethanol, acrylic and water was used for the parallel monochromatic x-ray CT system. The linear attenuation coefficients obtained from CT numbers of those monochromatic x-ray CT images were compared with theoretical values. They showed a good agreement within 3%. It was found that the quantitative measurement can be possible by using the fan beam monochromatic x-ray CT system as well as a parallel beam monochromatic X-ray CT system.

• Journal of the Korea Furniture Society
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• v.21 no.4
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• pp.273-283
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• 2010

Structural larger timber have some weak points as like much longer drying time at lower MC(15%), a considerable check developing and the difficulty for the chemicals injection, so it is necessary to develop lighter structural size member for using the new Hanok, heavy timber construction, living necessaries, furniture and industrial goods. The developed skin timber can be a good raw material for those uses. Skin timber is a hollowed timber which be bored out of its considerable cross-sectional area. The intention of this study was the evaluation of compressive capacity of skin timber. Specially, skin timbers which have more than 200mm in sizes were used to analyze the compressive capacity. From the results of this study, the following conclusions have been made: 1. Though considerable inner parts were bored out, both pine skin timber and larch skin timber showed a good compressive capacity to that of non-bored solid timber. 2. According to ASTM, pine skin timber showed various failure types, but Splitting type, Brooming and end rolling type were main failure types for the larch skin timber. 3. Pine skin timber didn't show the significance between cylindrical shape and rectangular shape, but larch skin timber showed the significance between two shapes. Therefore, for the larch skin timber, cylindrical shape and rectangular shape should be used as a column uses and beam uses respectively. 4. Pine skin timber and larch skin timber didn't show the significance on the compressive capacity. There is not much difference of compressive capacity between them, so it can be possible to select on the user convenience.