Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Laser Microfabrication for Silicon Restrictor

  • Kim, Kwang-Ryul (National Core Research Center for Hybrid Materials Solution, Pusan National University) ;
  • Jeong, Young-Keun (National Core Research Center for Hybrid Materials Solution, Pusan National University)
  • Published : 2008.02.28
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Abstract

The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actuator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSSL) and femtosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictor is presented. The model includes bubble formation and growth, droplet ejection through nozzle, and dynamics of fluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important for a high frequency actuator, some special beam delivery setups and post processing techniques have been researched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are simulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity and volume are compared with the experimental results of a cylindrical-shaped actuator. It is found that the micro actuators having tapered restrictors show better high frequency characteristics than those having a cylindrical shape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial feasibility for the laser direct ablation technique although more development is required.

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References

  1. C. T. Pan, Y. M. Kwang and C.W. Heieh: Sens. Actuators A: Phys., 122 (2005) 45 https://doi.org/10.1016/j.sna.2005.04.015
  2. M. Müllenborn, H. Dirac, J. W. Petersen and S. Bouwstra: Sens. Actuators A: Phys., 52 (1996) 121 https://doi.org/10.1016/0924-4247(96)80136-1
  3. S. M. Klimentov, S. V. Garnov, T. V. Kononenko, V. I. Konov, P. A. Pivorarov and F. Dausinger: Appl. Phys. A, 69[suppl.] (1999) S633 https://doi.org/10.1007/s003390051493
  4. J. Bonse, S. Baudach, J. Krüger, W. Kautek and M. Lenzner: Appl. Phys. A, 74 (2002) 19 https://doi.org/10.1007/s003390100893
  5. S.G. Uyehata and E. S. Kolesar: Jr, J. Micromech. Microeng. 1 (1991) 171 https://doi.org/10.1088/0960-1317/1/3/008
  6. M. Fiebig, M. Kauf, J. Fair, H. Endert, M. Rahe and D. Basting: Appl. Phys. A, 69 [suppl.] (1999) S305 https://doi.org/10.1007/s003390051005
  7. M. Nantel, Y. Yashkir, S. Lee and B. Hockley: ICALEO 2001 Laser Microfabrications Conference (2001)
  8. B. Richerzhagen: ICALEO 2001 Laser Microfabrications Conference (2001)
  9. S. A. McAuley, H. Ashraf, L. Atabo, A. Chambers, S. Hall, J. Hopkins and G. Nicholls: J. Phys. D: Apl. Phys. 34 (2001) 2769 https://doi.org/10.1088/0022-3727/34/18/309
  10. J. Li and G. K. Ananthasuresh: J. Micromech. Microeng. 11 (2001) 38 https://doi.org/10.1088/0960-1317/11/1/307
  11. B. Burghardt, S. Scheede, R. Senczuk and H.-J. Kahlert: Appl. Phys. A, 69 [suppl.] (1999) S137 https://doi.org/10.1007/s003390051369
  12. K. R. Kim, S. C. Ko and S. J. Shin: ICALEO 2001 Laser Microfabrications Conferences (2001)
  13. H. Yang, C.-T. Pan and M.-C. Chou: J. Micromech. Microeng. 11 (2001) 94 https://doi.org/10.1088/0960-1317/11/2/302
  14. P. M. Burke and T. L. Weber: IS&T's NIP 16 International Conference on Digital Printing Technology (2000)
  15. S. F. Pond, Micro actuator Technology and Product Development Strategies, Carlsbad: Torrey Pines Research, (2000) 115
  16. N. Maluf, An introduction to Micro-electro-mechanical Systems Engineering, Norwood: Artech House, (2000) 97
  17. A. Asai: J. of Heat Transfer, 113 (1991) 973 https://doi.org/10.1115/1.2911230
  18. C. D. Meinhart and H. Zhang: J. of Microelectromechanical systems, 9 (2000) 67 https://doi.org/10.1109/84.825779
  19. P. Chen, W. Chen, P. Ding and S. H. Chang: Inter. J. of heat and fluid flow, 19 (1998) 382 https://doi.org/10.1016/S0142-727X(98)10007-3
  20. K. R. Kim and D. F. Farson: J. of Appl. Phy. 89 (2001) 681 https://doi.org/10.1063/1.1329668