• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.117-118
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• 2006

In this work, we investigated etching characteristics of $HfO_2$ thin film and Si using inductive coupled plasma (ICP) system. The ion energy distribution functions in an inductively coupled plasma was analyzed by quadrupole mass spectrometer with an electrostatic ion energy analyzer. The maximum etch rate of $HfO_2$ is 85.5 nm/min at a $BCl_3/(BCl_3+Ar)$ of 20% and decreased with further addition of $BCl_3$ gas. From the QMS measurements, the most dominant positive ion energy distributions (IEDs) showed a maximum at 20 % of $BCl_3$. These tendency was very similar to the etch characteristics. This result agreed with the universal energy dependency of ion enhanced chemical etching yields. And the maximum selectivity of $HfO_2$ over Si is 3.05 at a O2 addition of 2 sccm into the $BCl_3/(BCl_3+ Ar)$ of 20% plasma.

• Ocean Systems Engineering
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• v.5 no.2
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• pp.109-123
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• 2015

In the present study, the coupled dynamic response of a Submerged Floating Tunnel (SFT) and mooring lines under regular waves is solved by using two independent numerical simulation methods, OrcaFlex and CHARM3D, in time domain. Variations of Buoyancy to Weight Ratio (BWR), wave steepness/period, and water/submergence depth are considered as design and environmental parameters in the study. Two different mooring-line configurations, vertical and inclined, are studied to find an optimum design in terms of limiting tunnel motions and minimizing mooring-line tension. The numerical results are successfully validated by direct comparison against published experimental data. The results show that tunnel motions and tether tensions grow with wave height and period and decrease with submergence depth. The inclined mooring system is more effective in restricting tunnel motions compared to the vertical mooring system. Overall, the present study demonstrates the feasibility of this type of structure as an alternative to traditional bridges or under-seabed tunnels.

• Steel and Composite Structures
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• v.20 no.1
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• pp.107-125
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• 2016

Steel shear wall system has been used in recent years in tall buildings due to its appropriate behavior advantages such as stiffness, high strength, economic feasibility and high energy absorption capability. Coupled steel plate shear walls consist of two steel shear walls that are connected to each other by steel link beam at each floor level. In this article the frames of 3, 10, and 15 of (C-SPSW) floor with rigid connection were considered in three different lengths of 1.25, 2.5 and 3.75 meters and link beams with plastic section modulus of 100% to the panel beam at each floor level and analyzed using three pairs of accelerograms based on nonlinear dynamic analysis through ABAQUS software and then the performance of walls and link beams at base shear, drift, the period of structure, degree of coupling (DC) and dissipated energy evaluated. The results show that the (C-SPSW) system base shear increases with a decrease in the link beam length, and the drift, main period and dissipated energy of structure decreases. Also the link beam length has different effects on parameters of coupling degrees.

• Structural Engineering and Mechanics
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• v.74 no.2
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• pp.283-296
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• 2020

The coupled hydro-mechanical loading conditions commonly occur in the geothermal and petroleum engineering projects, which is significantly important influence on the stability of rock masses. In this article, the influence of flaw inclination angle of fracture behaviors in rock-like materials subjected to both mechanical loads and internal hydraulic pressures is experimentally studied using the 3-D X-ray computed tomography combined with 3-D reconstruction techniques. Triaxial compression experiments under confining pressure of 8.0 MPa are first conducted for intact rock-like specimens using a rock mechanics testing system. Four pre-flawed rock-like specimens containing a single open flaw with different inclination angle under the coupled hydro-mechanical loading conditions are carried out. Then, the broken pre-flawed rock-like specimens are analyzed using a 3-D X-ray computed tomography (CT) scanning system. Subsequently, the internal damage behaviors of failed pre-flawed rock-like specimens are evaluated by the 3-D reconstruction techniques, according to the horizontal and vertical cross-sectional CT images. The present experimental does not only focus on the mechanical responses, but also pays attentions to the internal fracture characteristics of rock-like materials under the coupled hydro-mechanical loading conditions. The conclusion remarks are significant for predicting the rock instability in geothermal and unconventional petroleum engineering.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.13 no.4
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• pp.102-108
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• 1999

The sliding rmde controller(SMC) is known as having the robust variable structures for the nonlinear control systems such as coupled tank system with the pararretric perturbations and with the rapid disturbances. But the adaptive tuning algorit1uns for their pararreters are not satisfactory. Therefore, in this paper, a Real Variable Elitist Genetic Algorithm based Sliding Mode Controller (RVEGA SMC) for the precise control of the coupled tank level was tried. The SMC's switching pararreters were optimized easily and rapidly by RVEGA The simulation results showed that the tank level could be satisfactorily controlled without any overshoot and any steady-state error by the proposed RVEGA SMC.GA SMC.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.348-356
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• 2021

In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plasma-induced and defect-suppressed nitrogen doping. In order to derive the optimum condition for the doping, plasma power, working pressure, and treatment time were changed. Optical emission spectroscopy (OES) was used as plasma diagnosis method. The Boltzmann plot method was adopted to estimate the electron excitation temperature using obtained OES spectra. Ar ion peaks were interpreted as a reference peak. As a result, the change in the concentration of nitrogen active species and electron excitation temperature depending on process parameters were confirmed. Doping characteristics of graphene were quantitatively evaluated by comparison of intensity ratio of graphite (G)-band to 2-D band, peak position, and shape of G-band in Raman profiles. X-ray photoelectron spectroscopy also revealed the nitrogen doping in graphene.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2016.10a
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• pp.215-218
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• 2016

The robot performs with combined various functional equipments organically. OPRoS (Open Platform for Robotic Services) is a framework to provide integrated development environment to develop an equipment in the form of the component parts to various institutions and developers and to combine them. To ensure the reliable operation of the robot, the developer should test the component can be coupled reliably with other components developed by other developers. First of all, that the search to find components to be coupled with the component meaningfully is necessary. In this paper, we propose the interoperability evaluation system which can find components to be meaningfully coupled with the component to be evaluated.

• Journal of Power Electronics
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• v.19 no.3
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• pp.827-834
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• 2019

Wireless power transfer via coupled magnetic resonances has been a hot research topic in recent years. In addition, the number of related devices has also been increasing. However, reverse signals transfer is often required in addition to wireless power transfer. The structure of the circuit for a wireless power transfer system via coupled magnetic resonances is analyzed. The advantages and disadvantages of both parallel compensation and series compensation are listed. Then the compensation characteristics of the inductor, capacitor and resistor were studied and an appropriate compensation method was selected. The reverse signals can be transferred by controlling the compensation of the resistor. In addition, it can be demodulated by extracting the change of the primary current. A 3.3 MHz resonant frequency with a 100 kHz reverse signals transfer system platform was established in the laboratory. Experimental results demonstrate that wireless power and reverse signals can be transferred synchronously.

• International Journal of Naval Architecture and Ocean Engineering
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• v.12 no.1
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• pp.367-375
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• 2020

This paper presents an integrated analysis about dynamic performance of a Floating Offshore Wind Turbine (FOWT) OC4 DeepCwind with semi-submersible platform under real sea environment. The emphasis of this paper is to investigate how the wave mean drift force and slow-drift wave excitation load (Quadratic transfer function, namely QTF) influence the platform motions, mooring line tension and tower base bending moments. Second order potential theory is being used for computing linear and nonlinear wave effects, including first order wave force, mean drift force and slow-drift excitation loads. Morison model is utilized to account the viscous effect from fluid. This approach considers floating wind turbine as an integrated coupled system. Two time-domain solvers, SIMA (SIMO/RIFLEX/AERODYN) and FAST are being chosen to analyze the global response of the integrated coupled system under small, moderate and severe sea condition. Results show that second order mean drift force and slow-drift force will drift the floater away along wave propagation direction. At the same time, slow-drift force has larger effect than mean drift force. Also tension of the mooring line at fairlead and tower base loads are increased accordingly in all sea conditions under investigation.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.9 s.351
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• pp.64-68
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• 2006

Novel system-on-package (SOP) - D technology to improve the mechanical and thermal properties of a MCM-D substrate was suggested. Based on this investigation, the two types of band pass filters for the V-band application with unique structure were designed and implemented using 2-metals, 3-BCB layers. The first type using distributed resonator had the insertion loss below 2.6 dB at 55 GHz and group delay was below 0.06 ns. For the second type with edge coupled structure, the insertion loss and group delay were 3 dB and 0.1 ns, respectively. Suggested MCM-D substrate with band pass filter can be used to evaluate mm-Wave system including flip-chip bonded MMIC.