• 제목/요약/키워드: comb actuator

검색결과 24건 처리시간 0.039초

대면적 플랫폼을 갖는 정전형 2 축 MEMS 스테이지의 설계 (Design of an electrostatic 2-axis MEMS stage with large area platform)

  • 정일진;전종업;백경록;박규열
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.373-378
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    • 2004
  • Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55%, that is very large compared with conventional ones having a few percentage.

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정전력 구동 및 전자력 검출형 평면 진송 각속도계 (Planar Vibratory Gyroscope using Electrostatic Actuation and Electromagnetic Detection)

  • 이상훈;임형택;이승기
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.1089-1092
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    • 1995
  • A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

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대면적 플랫폼을 갖는 Probe-based Storage Device(PSD)용 정전형 2축 MEMS 스테이지의 설계 (Design of an Electrostatic 2-axis MEMS Stage having Large Area Platform for Probe-based Storage Devices)

  • 정일진;전종업
    • 한국공작기계학회논문집
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    • 제15권3호
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    • pp.82-90
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    • 2006
  • Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

3차원 LIGA 미세구조물 제작을 위한 마이크로 액추에이터 내장형 X-선 마스크 (Deep X-ray Mask with Integrated Micro-Actuator for 3D Microfabrication via LIGA Process)

  • 이광철;이승섭
    • 대한기계학회논문집A
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    • 제26권10호
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    • pp.2187-2193
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    • 2002
  • We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

대면적 플랫폼을 갖는 Probe-based Storage Device(PSD)용 정전형 2축 MEMS 스테이지 (Electrostatic 2-axis MEMS Stage with a Large Area Platform for Probe-based Storage Devices)

  • 정일진;전종업
    • 한국정밀공학회지
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    • 제23권9호
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    • pp.179-189
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    • 2006
  • Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

웨이퍼 레벨 공정이 가능한 2축 수직 콤 구동 방식 마이크로미러 (Wafer-Level Fabrication of a Two-Axis Micromirror Driven by the Vertical Comb Drive)

  • 김민수;유병욱;진주영;전진아;;박재형;김용권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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    • pp.148-149
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    • 2007
  • We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a $8{\times}8$ array of micromirrors with high fill-factor of 70 % is fabricated by the same fabrication process.

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슬라이딩 모드 제어기법(SMC)을 이용한 마이크로 액추에이터 (Micro Actuator)의 능동 제어기 설계 (The Design of Active Controller using SMC:An application to a Micro Actuator in MEMS)

  • 지태영;오용설;조병선;허훈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 C
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    • pp.2083-2086
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    • 2004
  • Variable Structure Controller with effective tracking performance is propose to control micro actuator system. Propsed VSC(Variable Structure Control) technique is implemented to tracking control of comb driving system having high non-linearity. The tracking performance due to VSC technique is compared to conventional PD(Proportional Derivative) control technique, reveals improved results.

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주파수와 대역폭 조정이 가능한 bandstop 공진기 (Frequency and bandwidth tuneable bandstop resonator)

  • ;김정무;김용권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2392-2394
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    • 2005
  • This paper presents a tuneable bandstop resonator with two possible configurations, it can be used to tune its center frequency, or it can be used to tune its bandwidth. The tuneable bandstop resonator has potential application in microwave communications receivers, where it can be used to tune out interfering signals. The proposed resonator is comb actuated, where the resonator's displacement produces different values of frequency or bandwidth, this is achieved by decoupling electromagnetic energy from a main transmission line. The proposed fabrication process for the resonator is by anodic bonding pyrex glass and tow resistivity silicon, where the comb resonator structure is patterned by deep reactive ion etching (DRIE). This paper presents the resonator and actuator design in both configurations, as well as the fabrication process intended for its development.

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초정밀 스캐닝 스테이지를 위한 고분해능, 대변위의 MEMS 용량형 변위센서

  • 김일환;김현철;전국진
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2006년도 하계종합학술대회
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    • pp.585-586
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    • 2006
  • 본 논문에서는 MEMS 용량형 변위 센서의 제작과 함께, 미세 변위 측정을 위한 테스트 샘플을 제작하였다. 아래의 그림 1, 2는 각각 스테이지에 장착할 MEMS 용량형 변위 센서 및 미세 변위 측정을 위한 테스트 샘플의 개념도를 보여주고 있다. 테스트 샘플의 감지 부분은 스테이지에 장착할 센서와 정확히 일치를 시켰으며, 미세 변위를 주기 위해서 comb-drive actuator 형태의 운동부를 두었다. 운동부에서는 DC 및 AC 전압을 인가함으로써 미세 변위를 얻을 수 있었으며, 사용된 DC 전압은 20V였으며, 1.4kHz의 AC 전압을 크기를 변화시키며 인가하였다.

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경사 전극 배열을 이용한 각도방향 마이크로 구동부 제작 (Skewed Electrode Array(SEA) and Its Application as an Angular Microactuator)

  • 최석문;박성준
    • 융복합기술연구소 논문집
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    • 제1권2호
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    • pp.16-24
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    • 2011
  • The angular electrostatic microactuator using skewed electrode array (SEA) scheme was proposed. The moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, electrostatic FE analysis were carried out and the empirical force model was established for SEA. Simulation was performed to make the comparison between conventional actuators and SEA. The proposed SEA generates actuating torque 2 times greater than a comb-drive and stable actuator displacement 40% greater than a parallel plate type actuator. The angular electrostatic microactuator using skewed SEA scheme was designed and fabricated using SoG process.

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