1 |
Kim, C. H., Jeong, H. M., Jeon, J. U. and Kim, Y. K., 2003, 'Silicon Micro XY-Stage with a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage,' J. Microelectromechanical systems, Vol. 12, No. 4, pp. 470-478
DOI
ScienceOn
|
2 |
Cho, J. W., Byun, M. H., Lee, K. I., Kim, S. H. and Choi, Y. J., 2004, 'Development of a Low Voltage Type Electromagnetic Actuator for Probe-based Data Storage,' Proc. 6th Korean MEMS Conf., KAL Hotel, Korea, pp. 411-416
|
3 |
Grade, J. D. and Jerman, H., 2000, 'ALarge-deflection Electrostatic Actuation for Optical Switching Applications,' http://www.iolon.com/images/01.pdf
|
4 |
Vettiger, P., Cross, G., Despont, M., Drechsler, U., Durig, U., Gotsmann, B., Haberle, W., Lantz, M. A., Rothuizen, H. E., Stutz, R. and Binnig, G. K., 2002, 'The 'Millipede'-Nanotechnology Entering Data Storage,' IEEE Trans. on Nanotechnology, Vol. 1, No. 1, pp. 39-55
DOI
|
5 |
Rothuizen, H., Despont, M., Drechsler, U., Genolet, G., Haberle, W., Lutwyche, M., Stutz, R. and Vettiger, P., 2002, 'Compact Copper/epoxy-Based Electromagnetic Scanner for Scanning Probe Applications,' Proc. 15th IEEE Int. Conf. MEMS, Las Vegas, USA, pp. 582-585
|
6 |
Carley, L. R., Bain, J. A., Fedder, G. K., Greve, D. W., Guillou, D. F., Lu, M., Mukherjee, T. and Santhanam, S., 2000, 'Single-chip Computers with Microelectromechanical Systems-based Magnetic Memory,' J. Applied Physics, Vol. 87, No. 9, pp. 6680-6685
DOI
ScienceOn
|