Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.11a
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- Pages.148-149
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- 2007
Wafer-Level Fabrication of a Two-Axis Micromirror Driven by the Vertical Comb Drive
웨이퍼 레벨 공정이 가능한 2축 수직 콤 구동 방식 마이크로미러
- Kim, Min-Soo (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Yoo, Byung-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Jin, Joo-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Jeon, Jin-A (Research Center of MEMS Space Telescope, Ewha Womans University) ;
- Park, Il-Heung (Research Center of MEMS Space Telescope, Ewha Womans University) ;
- Park, Jae-Hyoung (Research Center of MEMS Space Telescope, Ewha Womans University) ;
- Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
- 김민수 (서울대학교 전기공학부) ;
- 유병욱 (서울대학교 전기공학부) ;
- 진주영 (서울대학교 전기공학부) ;
- 전진아 (이화여자대학교 물리학과) ;
- ;
- 박재형 (이화여자대학교 물리학과) ;
- 김용권 (서울대학교 전기공학부)
- Published : 2007.11.02
Abstract
We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a
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