• 제목/요약/키워드: chemical states

검색결과 850건 처리시간 0.026초

Cl2/Ar 플라즈마를 이용한 Al2O3 박막의 식각 (Dry Etching of Al2O3 Thin Film by Cl2/Ar Plasma)

  • 양설;엄두승;김관하;송상헌;김창일
    • 한국전기전자재료학회논문지
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    • 제22권12호
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    • pp.1005-1008
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    • 2009
  • In this study, adaptively coupled plasma (ACP) source was used for dry etching of $Al_2O_3$ thin film. During the etching process, the wafer surface temperature is an important parameter to influent the etching characteristics. Therefore, the experiments were carried out in ACP to measuring the etch rate, the selectivities of $Al_2O_3$ thin film to mask materials and the etch profile as functions of $Cl_2$/Ar gas ratio and substrate temperature. The highest etch rate of $Al_2O_3$ was 65.4 nm/min at 75% of $Cl_2/(Cl_2+Ar)$ gas mixing ratio. The etched profile was characterized using field effect scanning electron microscopy (FE-SEM). The chemical states of $Al_2O_3$ thin film surfaces were investigated with x-ray photoelectron spectroscopy (XPS).

$BCl_3/Ar$ 유도 결합 플라즈마를 이용한 ZnO 박막의 식각 특성 (The Etching Characteristics of ZnO thin Films using $BCl_3/Ar$ Inductively Coupled Plasma)

  • 우종창;김관하;김경태;김종규;강찬민;김창일
    • 전기학회논문지
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    • 제56권3호
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    • pp.566-570
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    • 2007
  • The specific electrical, optical and acoustic properties of Zinc Oxide (ZnO) are important for semiconductor process which has many various applications. Piezoelectric ZnO films has been widely used for such as transducers, bulk and surface acoustic-wave resonators, and acousto-optic devices. In this study, we investigated etch characteristics of ZnO thin films in inductively coupled plasma etch system with $BCl_3/Ar$ gas mixture. The etching characteristics of ZnO thin films were investigated in terms of etch rates and selectivities to $SiO_2$ as a function of $BCl_3/Ar$ gas mixing ratio, RF power, DC bias voltage and process pressure. The maximum ZnO etch rate of 172 nm/min was obtained for $BCl_3$ (80%)/Ar(20%) gas mixture. The chemical states on the etched surface were investigated with X-ray photoelectron spectroscopy (XPS).

안양천에서의 생태학적 수질오염도 평가 (Assessment of Water Quality Based on Ecological Factors in Anyang River)

  • 이양규;조원철
    • 한국환경복원기술학회지
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    • 제9권3호
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    • pp.39-50
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    • 2006
  • In this study, the water quality investigated during 2002s to 2004s for Anyang river and its affluent that was based on biological and chemical methods as well as ecological index of each streams. The improving of water quality and the multiplicity of specious in the most streams except for Anyang, which was due to the improving of water quality and water resource. The seasonal dry states are completely disappeared, but water quality of Anyang main stream was classified as fifth grades water with BIP 8.51~10.00 and BOD 8.16~14.4mg/l in Anyang stream overall. And alpha-mesosaprobic in upper, mid parts and polysaprobic in down parts of Anyang main stream are appeared according to Saprobien system, respectively. The water supply of treated sewage is appeared that upgrading effects of water quality in Anyang main stream and affluents of Anyang city area, but the practical effects of "Saving Anyang River" could not gained because the water quality of other branches in upstream parts than upstream measuring point of Anyang main stream, Wanggok stream Sanbon stream in Gunpo and Eeiwang cities, was not improved.

전자빔에 의한 배연가스 정화기술의 화학반응 메카니즘에 대하여 (Chemical Mechanisms and Process Parameters of Flue Gas Cleaning by Electron beam)

  • 최갑석;최연석;김한석
    • 연구논문집
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    • 통권23호
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    • pp.93-107
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    • 1993
  • The chemistry and performance characteristics of the EBDS process have been introduced, in which experimental results from laboratory, test plant, and pilot plant studies agree very well and can be understood from detailed kinetic models. The parametric dependencies of the NOx and $SO_2$, removal yields on the input conditions have been discussed and formulated quantitatively. The process is best suited for flue gas with high $SO_2$, loadings. The operation conditions, such as dose, ammonia, and water additions, can be adjusted fast upon load changes. The process works waste water free and the major product is a mixture of ammonium nitrate and sulfate that can be used as fertilizer. The up-date results show that the EBDS technology is safe and competitive with other already well-established technologies. Due to these interesting features, the electron beam process has gained much international recognition. Demonstration units of 100MW have been proposed in the United States and Japan. Further pilot plants are under construction in Poland and China, countries that make abundant use of highsulfur coal. Additional research activities are under way to further improve the energy efficiency of process, and accelerator prices have been decreasing during the past 10 years. So the EBDS process has a good chance to start a new generation of emission-control technology.

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A study on water quality change by land use change using HSPF

  • Kim, Tae Geun;Choi, Kyoung-sik
    • Environmental Engineering Research
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    • 제25권1호
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    • pp.123-128
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    • 2020
  • Non-point source pollutant load reductions were calculated using the Hydrologic Simulation Program-Fortran (HSPF) model under the assumption that landuse pattern was changed according to land purchases. Upon the simulation of non-point pollutant and areas with high land purchase ratios to select a buffer zone, the Namgang dam Reach 11, Imha dam Reach 10, and the Reach 136 watershed of the main river were found to rank high for the construction of buffer zones. Assuming that the forms of the purchased lands were changed to wetlands, biological oxygen demand (BOD) loads were changed through the HSPF model. No changes of BOD were present in the Namgang dam and the Imha dam watersheds. BOD loads in Reach 136 according to landuse change were analyzed through a flow duration analysis based on the total maximum daily loads of the United States. The flow duration analyses undertaken to examine changes in BOD of main river Reach 136 watershed indicated a shift of 0.64 kg/d from 3.16 to 2.52 during high flow. The change of BOD under the conditions of moist, mid-range and dry were 11.9%, 9% and 4.5%. At the low flow condition, the variation range in the BOD load was from 0.58 kg/d to 0.41 kg/d.

전기 이중층 커패시터용 메조 다공성 탄소 나노섬유의 제조 (Fabrication of Mesoporous Carbon Nanofibers for Electrical Double-Layer Capacitors)

  • 이도영;안건형;안효진
    • 한국재료학회지
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    • 제27권11호
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    • pp.617-623
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    • 2017
  • Mesoporous carbon nanofibers as electrode material for electrical double-layer capacitors(EDLCs) are fabricated using the electrospinning method and carbonization. Their morphologies, structures, chemical bonding states, porous structure, and electrochemical performance are investigated. The optimized mesoporous carbon nanofiber has a high sepecific surface area of $667m^2\;g^{-1}$, high average pore size of 6.3 nm, and high mesopore volume fraction of 80 %, as well as a unifom network structure consiting of a 1-D nanofiber stucture. The optimized mesoporous carbon nanofiber shows outstanding electrochemical performance with high specific capacitance of $87F\;g^{-1}$ at a current density of $0.1A\;g^{-1}$, high-rate performance ($72F\;g^{-1}$ at a current density of $20.0A\;g^{-1}$), and good cycling stability ($92F\;g^{-1}$ after 100 cycles). The improvement of the electrochemical performance via the combined effects of high specific surface area are due to the high mesopore volume fraction of the carbon nanofibers.

Effect of a polyherbal formulation (Diarun plus) on the glycemic status modified by physiological means in non-diabetic mice and rats

  • G, Senthilvel;M, Jegadeesan;P, Thirugnanasambantham;E, Mayisvren;M, Balasubramanian;N, Narayanan;S, Viswanathan;Austin, Anoop
    • Advances in Traditional Medicine
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    • 제7권2호
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    • pp.128-132
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    • 2007
  • Diarun plus, a polyherbal formulation containing herbal ingredients of folkloric Antidiabetic effect, was investigated for its effect on glycemic status in rats and mice. In contrast to conventional chemical induced diabetic animal models, changes in glycemic states were induced by physiological maneuvers. Results revealed that in euglycemic animals Diarun plus elicited little change (-10 to +10%), which was insignificant. In food deprivation/swim exercise induced hypoglycemia, Diarun plus reduced the degree of hypoglycemia in both rats and mice (from 38% to 27% in rats and 45% to 32% in mice). Similarly, the marked hyperglycemia induced by dextrose (70% in rats and 95% in mice) was reduced markedly to 8% and 25% respectively. The findings of the present study suggests that the ingredients of Diarun plus have the unique property of maintaining near euglycemic state irrespective of the altered glycemic state, and that have no significant effect in euglycemic condition.

광주지역 저수지수 수질특성에 관한 연구 (A Study on the Water Quality Characteristics of the Reservoirs in Gwangju City)

  • 김동수;박종환;김연희;송형명;박종태
    • 한국환경과학회지
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    • 제18권12호
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    • pp.1383-1390
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    • 2009
  • This study was performed to investigate the physico-chemical properties and phytoplankton concentration from February to December, 2007 in Gwangju area reservoirs. Water samples from 20 reservoirs were analyze d. As results of the water quality analysis, the average pH was 7.6 and annual pH were 6.3~9.6. The higher pH of 8.6~9.6 were showed from March to August due to eutrophication. Chlorophyll-a concentration ranged from 0.4 to $164.3\;mg/m^3$. The highest chlorophyll-a concentration was observed in August. BOD was correlated with SS, T-N, and Chlorophyll-a(R=0.82, 0.90 and 0.84) respectively. COD was correlated with BOD, SS and Chlorophyll-a(R= 0.89, 0.77 and 0.76) respectively. The T-N/T-P ratios were 4~281, so phosph orus was considered to be the limiting factor in most of points. The trophic state showed eutrophicate states in Gwangju reservoirs. Therefore it was necessary to monitor continuously. In order to monitor the reservoirs, an algae prediction system must be used.

산업용 교반기의 고체-액체 혼합에 대한 Eulerian Two-Phase 유동해석 (Eulerian Two-Phase Flow Analysis for Solid-Liquid Mixing in a Industrial Mixer)

  • 송애경;허남건;원찬식;안익진
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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    • pp.471-474
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    • 2006
  • The Mixer is apparatus that help precipitation or an inhomogeneous distribution of various phases to be mixed and that user makes necessary material mixing one or the other. Mainly the mixer which is used from chemical and food industry is very important system in engineering that mixes the material. The inside flow of the mixer under the actual states which put a basis in flow of the fluid is formed rotation of the impeller. The inside flow of impeller will be caused by various reasons change with shape of impeller, number of rotation, mixing material and flow pattern of free surface etc. Also mixer study depended in single-phase flow and experimental research. So the numerical analysis of flow mixing solid-fluid particle is simulated. It is become known, that the case where agitator inside working fluid includes the solid particle the sinkage reverse which the solid particle has decreases an agitation efficiency. From the research which it sees the hazard solid which examines the effect where the change of the sinkage territory which it follows agitation number of revolution and diameter of the particle goes mad to an agitator inside flow distribution - numerical analysis the inside flow distribution of liquid state with Eulerian Two-Phase Method.

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Lessons from Korean Innovation Model for ASEAN Countries Towards a Knowledge Economy

  • Ocon, Joey D.;Phihusut, Doungkamon;del Rosario, Julie Anne D.;Tuan, Trinh Ngoc;Lee, Jaeyoung
    • STI Policy Review
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    • 제4권2호
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    • pp.19-40
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    • 2013
  • The Association of Southeast Asian Nations (ASEAN) achieved relatively rapid economic growth over the past decade. Sustainable growth among member states, however, is put into question due to macroeconomic challenges, political risk, and vulnerability to external shocks. Developed countries, in contrast, have turned into less labor-intensive technologies to further expand their economies. In this paper, we review the science, technology, and innovation (STI) policies and statuses of the scientific and technological capabilities of the ASEAN member countries. Empirical results based on STI indicators (R&D spending, publications, patents, and knowledge economy indices) reveal considerable variation between the science and technology (S&T) competence and effectiveness of STI policies of ASEAN members. We have categorized nations into clusters according their situations in their S&T productivity. Under the Korean Innovation Model, Cambodia, Laos, Myanmar, and Brunei are classified as being in the institutional-building stage, while Malaysia, Thailand, Indonesia, the Philippines, and Vietnam in the catch up stage, and Singapore in the post-catch up stage. Finally, policy prescriptions on how to enhance the S&T capabilities of the developing ASEAN countries, based on the South Korea development experience, are presented.