• The Journal of the Petrological Society of Korea
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• v.10 no.3
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• pp.212-221
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• 2001

This paper introduces the characteristics and generation of the synchrotron radiation (SR). SR has the very high spectral brilliance, broad spectral range, X-ray wavelength tunability, high degree of polarization and collimation, and pulsed time structure. Also describes the technologies to apply in the fields of geology and environmental sciences. These include X-ray tomography, XRF, EXAFS, XANES, DAC, IVP experiments. Further, nuclear power generation and nuclear waste disposal methods are mentioned relating to energy. Using these, analyses of the chemistry, crystal structure and chemical combining states of minerals and rocks can be carried out. Applications in the fields of the economic geology, paleontology and environmental sciences are open too. Informations of the Earth interior materials' behavior under high pressure-temperature can be acquired.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.1-6
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• 2003

SiC-C films were deposited with r. f. magnetron sputtering on substrates followed by argon ion bombardment. These films were then permeated by hydrogen gas under the pressure of $3.23\times10^{7}$ Pa for 3 hours at temperature of 500K or bombarded with hydrogen ion beam at 5 keV and a dose of $1\times10^{18}$ ions/$\textrm{cm}^2$. SIMS, AES and XPS were used to analyze hydrogen related species, chemical bonding states of C, Si as well as contamination oxygen due to hydrogen participation in the SiC-C films in order to study the different behaviors of hydrogen in carbon-carbide films due to different hydrogen introduction. Related mechanism about the effects of hydrogen on the element of the SiC-C films was discussed in this paper.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.1
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• pp.31-43
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• 1993

Thermal behavior and $O_{2}$ plasma effects on residue and penetrated impurities formed by reactive ion etching (RIE) in CHF$_{3}$/C$_{2}$F$_{6}$ have been investigated using X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) techniques. Decomposition of polymer residue film begins between 200-300.deg. C, and above 400.deg. C carbon compound as graphite mainly forms by in-situ resistive heating. It reveals that thermal decomposition of residue can be completed by rapid thermal anneal above 800.deg. C under nitrogen atmosphere and out-diffusion of penetrated impurities is observed. The residue layer has been removed with $O_{2}$ plasma exposure of etched silicon and its chemical bonding states have been changed into F-O, C-O etc.. And $O_{2}$ plasma exposure results in the decrease of penetrated impurities.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.3
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• pp.1-8
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• 1997

The surface properties after plasma etching of TiW alloy using the chemistries of BCl$_{3}$ and SF$_{6}$ gases with varying mixing ratio have been investigated using XPS(X-ray photoelectron spectrocopy). The elements existed on the etched sampled have been extracted with BCL$_{3}$/SF$_{6}$ ratio and their chemical binding states have also been analysed. It was confirmed that the thickness of native oxide formed on the TiW films is thinner than 10nm by using Ar sputtering. At the same time, the roughness of etched surface has been esamnied using AFM (atomic force microscopy). on the basis of the basis of this results, the relations between the caanges of oxygen contents detected by XPS and the rouhness of etched surface have been discussed. And the etch rate and etched profile of Tiw films have been examined and the changes of the etch rate and etched prfile have been discussed with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound has been proposed. Ti-S compound seems to make a role of passivation layer that surpresses Ti-O formation.ion.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.6
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• pp.409-413
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• 2012

In this study, a substrate-bias assisted 2-step pulse programming method is proposed for realizing 4-bit/1-cell operation of the SONOS memory. The programming voltage and time are considerably reduced by this programming method than a gate-bias assisted 2-step pulse programming method and CHEI method. It is confirmed that the difference of 4-states in the threshold voltage is maintained to more than 0.5 V at least for 10-year for the multi-level characteristics.

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.164-169
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• 2014

We investigated the etching characteristics of $HfAlO_3$ thin films in $O_2/Cl_2/Ar$ and $O_2/BCl_3/Ar$ gas, using a high-density plasma (HDP) system. The etch rates of the $HfAlO_3$ thin film obtained were 30.1 nm/min and 36 nm/min in the $O_2/Cl_2/Ar$ (3:4:16 sccm) and $O_2/BCl_3/Ar$ (3:4:16 sccm) gas mixtures, respectively. At the same time, the etch rate was measured as a function of the etching parameter, namely as the process pressure. The chemical states on the surface of the etched $HfAlO_3$ thin films were investigated by X-ray photoelectron spectroscopy. Auger electron spectroscopy was used for elemental analysis on the surface of the etched $HfAlO_3$ thin films. These surface analyses confirm that the surface of the etched $HfAlO_3$ thin film is formed with nonvolatile by-product. Also, Cl-O can protect the sidewall due to additional $O_2$.

• Journal of the Korean Society of Safety
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• v.15 no.2
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• pp.126-135
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• 2000

Probabilistic Safety Assessment (PSA) is an engineering analysis method to identify possible contributors to the risk from a nuclear power plant and now it has become a standard tool in safety evaluation of nuclear power plants. PSA consists of three phases named as Level 1, 2 and 3. Level 2 PSA, mainly focused in this paper, uses a step-wise approach. At first, plant damage states (PDSs) are defined from the Level 1 PSA results and they are quantified. Containment event tree (CET) is then constructed considering the physico-chemical phenomena in the containment. The quantification of CET can be assisted by a decomposition event tree (DET). Finally, source terms are quantitatively characterized by the containment failure mode. As the main benefit of PSA is to provide insights into plant design, performance and environmental impacts, including the identification of the dominant risk contributors and the comparison of options for reducing risk, this technique is expected to be applied to the industrial safety area.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.1
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• pp.56-62
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• 2015

Using an optical 3D scanning device to collect data from a diffused reflection surface is very difficult. To solve this problem, there are many applications including a spray-type developer and silicon molds. However, using a developer can cause chemical reactions between objects and particles of the developer and uneven surfaces on the object. To overcome these problems, we suggest an electrostatic powder coating method for even coating of particles onto surfaces for collecting 3D shape data. We have developed an automatic, electrostatic powder-coating machine and performed three different experiments to compare this system with a laser interferometer and a T-scan 3D scanner. As a result, we could ascertain the various characteristics of this new method, including good sensitivity for the various surface states of the bare surface, developer, and electrostatic powder coating. Finally, we verified the outstanding scanning performance and were able to demonstrate that this method achieves quality than traditional methods.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.6 s.249
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• pp.560-567
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• 2006

Although various conjectures have been proposed to explain abnormal increase in thermal conductivity of nanofluids, the detailed mechanism could not be understood and explained yet. The main reason is primarily due to the lack of knowledge on the most fundamental factor governing the mechanisms such as Brownian motion, liquid layering, phonon transport, surface chemical effects and agglomeration. By applying surface complexation model for the measurement data of hydrodynamic size, zeta potential, and thermal conductivity, we have shown that sulfate charge state is mainly responsible for the increase in the present condition and may be the factor incorporating all the mechanisms as well. Moreover, we propose a new model including concepts of fractal and interfacial layer. The properties such as thickness and thermal conductivity of the layer are estimated from the surface charge states and the concept of electrical double layer. With this, we could demonstrate the pH dependences of the layer properties and eventually of the effective thermal conductivity of the nanofluid.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.428-433
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• 2000

The consolidation behavior of multicomponent particles prepared by the flame hydrolysis deposition process is examined to identify the effects of Si substrate temperature. To fabricate multi-component particles, a vapor-phase ternary mixture of $SiCl_4(100 cc/min),\;BCl_3(30cc/min)\;and\;POCl_3,(5cc/min)$ was fed into a coflow diffusion oxy-hydrogen flame burner. The doped silica soot bodies were deposited on silicon substrates under various deposition conditions. The surface temperature of the substrate was measured by an infrared thermometer. Changes in the chemical states of the doped silica soot bodies were examined by FT-IR(Fourier-transformed infrared spectroscopy). The deposited particles on the substrate were heated at $1300^{\circ}C$ for 3h in a furnace at a heating rate of 10K/min. Si-O-B bending peak has been found when surface temperature exceeds $720^{\circ}C$. Correspondingly, the case with substrate temperatures above loot produced good consolidation result.