Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2000.04b
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- Pages.428-433
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- 2000
Effect of Substrate Temperature on Multi-component Particle Deposition and Consolidation in Flame Hydrolysis Deposition
화염가수분해 증착 공정에서 기판온도의 변화에 따른 다성분 입자의 부착 및 소결특성에 관한 연구
- Published : 2000.04.20
Abstract
The consolidation behavior of multicomponent particles prepared by the flame hydrolysis deposition process is examined to identify the effects of Si substrate temperature. To fabricate multi-component particles, a vapor-phase ternary mixture of