• Title/Summary/Keyword: chemical oxide

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Annealing Effects of Gate-insulator on the Properties of Zinc Tin Oxide Transparent Thin Film Transistors (게이트절연막의 열처리가 Zinc Tin Oxide 투명 박막트랜지스터의 특성에 미치는 영향)

  • Ma, Tae Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.6
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    • pp.365-370
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    • 2015
  • Zinc tin oxide transparent thin film transistors (ZTO TTFTs) were fabricated on oxidized $n^+$ Si wafers. The thickness of ~30 nm $Al_2O_3$ films were deposited on the oxidized Si wafers by atomic layer deposition, which acted as the gate insulators of ZTO TTFTs. The $Al_2O_3$ films were rapid-annealed at $400^{\circ}C$, $600^{\circ}C$, $800^{\circ}C$, and $1,000^{\circ}C$, respectively. Active layers of ZTO films were deposited on the $Al_2O_3/SiO_2$ coated $n^+$ Si wafers by rf magnetron sputtering. Mobility and threshold voltage were measured as a function of the rapid-annealing temperature. X-ray photoelectron spectroscopy (XPS) were carried out to observe the chemical bindings of $Al_2O_3$ films. The annealing effects of gate-insulator on the properties of TTFTs were analyzed based on the results of XPS.

A study on the nature of needle-like inclusions in corundum crystals (커런덤의 침상내포물 본질에 관한 연구)

  • 배상덕;김상기;최종건;김판채
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.3
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    • pp.101-104
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    • 2004
  • It was realized that MC-XRD is useful for phase analyzing of inclusions in crystals because it can focus the X-Ray beam to the small particles sized dozens of $\mu\textrm{m}$ with high S/N ratio. By using this MC-XRD, needle-like inclusions which are seen generally in corundum crystals known as rutile was found to be the iron titanium oxide and iron oxide which has the chemical composition of $Fe_2TiO_4,\; Fe_2TiO_5,\; Fe_2O_3$respectively

Optical and Magnetic Properties of Copper Doped Zinc Oxide Nanofilms

  • Zhao, Shifeng;Bai, Yulong;Chen, Jieyu;Bai, Alima;Gao, Wei
    • Journal of Magnetics
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    • v.19 no.1
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    • pp.68-71
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    • 2014
  • Copper doped Zinc Oxide nanofilms were prepared using a simple and low cost wet chemical method. The microstructures, phase structure, Raman shift and optical absorption spectrum as well as magnetization were investigated for the nanofilms. Room temperature ferromagnetism has been observed for the nanofilms. Structural analyses indicated that the films possess wurtzite structure and there are no segregated clusters of impurity phase appreciating. The results show that the ferromagnetism in Copper doped Zinc Oxide nanofilms is driven either by a carrier or defect-mediated mechanism. The present work provides an evidence for the origin of ferromagnetism on Copper doped Zinc Oxide nanofilms.

Electrical Characteristics of Solution Processed In-Ga-ZnO Thin Film Transistors (IGZO TFTs) with Various Ratio of Materials

  • Lee, Na-Yeong;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.293.2-293.2
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    • 2016
  • The In this paper, we have fabricated the solution processed In-Ga-ZnO thin film transistors (IGZO TFTs) by varying indium and gallium ratio. The indium ratio of IGZO TFTs was changed from 1 to 5 at fixed gallium and zinc oxide atomic percent of 1:1 and gallium ratio was varied from 1 to 5 at fixed indium and zinc oxide atomic percent of 1:1. When the indium ratio was increased at fixed gallium and zinc oxide ratio of 1:1, threshold voltage was negatively shifted from 1.03 to -6.18 V and also mobility was increased from 0.018 to $0.076cm2/V{\cdot}sec$. It means that the number of carriers in IGZO TFTs were increased due to great formation of the oxygen vacancies which generate electrons. In contrast, when the gallium ratio was increased in IGZO TFTs with indium and zinc oxide ration of 1:1, the on/off current ratio was increased from $1.88{\times}104$ to $2.22{\times}105$. It is because gallium have stronger chemical bonds with oxygen than that with the zinc and indium ions that lead to the decreased in electron concentration.

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Characteristics of Indium Tin Zinc Oxide Thin Film Transistors with Plastic Substrates (고분자 기판과 PECVD 절연막에 따른 ITZO 박막 트랜지스터의 특성 분석)

  • Yang, Dae-Gyu;Kim, Hyoung-Do;Kim, Jong-Heon;Kim, Hyun-Suk
    • Korean Journal of Materials Research
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    • v.28 no.4
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    • pp.247-253
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    • 2018
  • We examined the characteristics of indium tin zinc oxide (ITZO) thin film transistors (TFTs) on polyimide (PI) substrates for next-generation flexible display application. In this study, the ITZO TFT was fabricated and analyzed with a SiOx/SiNx gate insulator deposited using plasma enhanced chemical vapor deposition (PECVD) below $350^{\circ}C$. X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectroscopy (SIMS) results revealed that the oxygen vacancies and impurities such as H, OH and $H_2O$ increased at ITZO/gate insulator interface. Our study suggests that the hydrogen related impurities existing in the PI and gate insulator were diffused into the channel during the fabrication process. We demonstrate that these impurities and oxygen vacancies in the ITZO channel/gate insulator may cause degradation of the electrical characteristics and bias stability. Therefore, in order to realize high performance oxide TFTs for flexible displays, it is necessary to develop a buffer layer (e.g., $Al_2O_3$) that can sufficiently prevent the diffusion of impurities into the channel.

Synthesis of Multi-walled Carbon Nanotube/Poly(ethylene oxide) Hybrids (다중벽 탄소나노튜브/폴리(에틸렌 옥사이드) 복합체 합성)

  • Hong, Chae-Hwan;Han, Do-Suk;Nam, Byeong-Uk
    • Polymer(Korea)
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    • v.34 no.3
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    • pp.198-201
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    • 2010
  • We have worked a surface modification to release a strong agglomeration of multi-walled carbon nanotube(MWCNT) and a incorporation of hydrophilic polymer to improve compatibility between MWCNT and polymers. Carboxylated MWCNT was easily obtained by acid treatment and the carboxylate was converted to acylchloride by thionyl chloride. Then, we tried one more synthesizing routes to achieve covalent bonds with poly(ethylene oxide) having amine end groups of low molecular weight. We measured the polymer content on the surface of MWCNT by TGA and observed increased diameter of MWCNT by SEM and TEM analysis.

Some properties on Conversion Efficiency of Flexible Film-Typed DSCs with ZnO:AI / ITO TCO layers (ZnO:Al 과 ITO 투명전도막을 이용한 플랙시블 타입 DSCs변환효율 특성)

  • Kim, Ji-Hoon;Kwak, Dong-Joo;Sung, Youl-Moon;Kim, Tae-Woo
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2009.10a
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    • pp.177-179
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    • 2009
  • In order to investigate the possible application of ZnO films as a transparent conducting oxide (TCO) electrode, ZnO:Al films were prepared by RF magnetron sputtering method. The effects of surface treatment and doping concentration on the structural and electrical properties of ZnO films were mainly studied experimentally. Five-inch PDP cells using either a ZnO:Al or indium tin oxide (ITO) electrode were also fabricated separately under the same manufacturing conditions. The luminous properties of both the transparent conducting oxide electrode were measured and compared with each other. By doping the ZnO target with 2 wt% of Al2O3, the film deposited at a chemical surface treatment resulted in the minimum resistivity of 8.5 _ 10_4 U-cm and a transmittance of 91.7%. And DBD surface treatment resulted in the minimum resistivity of 8.5 _ 10_4 U-cm and a transmittance of 91.7%. Although the luminance and luminous efficiency of the transparent conducting oxide electrode using ZnO:AI are lower than those of the cell with the ITO electrode by about 10%, these values are sufficient enough to be considered for the normal operation of TCO.

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Feasibility of Indium Tin Oxide (ITO) Swarf Particles to Transparent Conductive Oxide (TCO)

  • Hong, Sung-Jei;Yang, DuckJoo;Cha, Seung Jae;Lee, Jae-Yong;Han, Jeong-In
    • Current Photovoltaic Research
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    • v.3 no.2
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    • pp.50-53
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    • 2015
  • Indium (In) is widely used for transparent electrodes of photovoltaics as a form of indium tin oxide (ITO) due to its superior characteristics of environmental stability, relatively low electrical resistivity and high transparency to visible light. However, In has been worn off in proportion to growth the In related market, and it leads to raise of price. Although In is obtained from ITO target scarps, much harmful elements are used for the recycling process. To decrease of harmful elements, ITO swarf particles obtained from target scraps was characterized whether it is feasible to transparent conductive oxide (TCO). The ITO swarf was crushed with milling process, and it was mixed with new ITO nanoparticles. The mixed particles were well dispersed into ink solvent to make-up an ink, and it was well coated onto glass substrate. After heat-treatment at $400^{\circ}C$ under $N_2$ rich environments, optical transmittance at 550 nm and sheet resistance of the ITO ink coated layer was 71.6% and $524.67{\Omega}/{\square}$, respectively. Therefore, it was concluded that the ITO swarf was feasible to TCO of touch screen panel.

Fabrication of Ordered or Disordered Macroporous Structures with Various Ceramic Materials from Metal Oxide Nanoparticles or Precursors

  • Cho, Young-Sang;Moon, Jun-Hyuk;Kim, Young-Kuk;Choi, Chul-Jin
    • Journal of Powder Materials
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    • v.18 no.4
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    • pp.347-358
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    • 2011
  • Two different schemes were adopted to fabricate ordered macroporous structures with face centered cubic lattice of air spheres. Monodisperse polymeric latex suspension, which was synthesized by emulsifier-free emulsion polymerization, was mixed with metal oxide ceramic nanoparticles, followed by evaporation-induced self-assembly of the mixed hetero-colloidal particles. After calcination, inverse opal was generated during burning out the organic nanospheres. Inverse opals made of silica or iron oxide were fabricated according to this procedure. Other approach, which utilizes ceramic precursors instead of nanoparticles was adopted successfully to prepare ordered macroporous structure of titania with skeleton structures as well as lithium niobate inverted structures. Similarly, two different schemes were utilized to obtain disordered macroporous structures with random arrays of macropores. Disordered macroporous structure made of indium tin oxide (ITO) was obtained by fabricating colloidal glass of polystyrene microspheres with low monodispersity and subsequent infiltration of the ITO nanoparticles followed by heat treatment at high temperature for burning out the organic microspheres. Similar random structure of titania was also fabricated by mixing polystyrene building block particles with titania nanoparticles having large particle size followed by the calcinations of the samples.

Dyeing of Cotton Knitted Fabrics with Volcanic Ash(I) -The Compositions of Volcanic ash Deposited on the Cotton Knitted Fabrics- (화산재를 이용한 면 편성물의 염색(I) - 면 편성물에 부착된 화산재의 성분분석을 중심으로 -)

  • 유복선;신인수
    • Journal of the Korean Home Economics Association
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    • v.41 no.8
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    • pp.55-62
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    • 2003
  • Natural dyes generally fan into two categories; organic dyes coming from animals and plants and inorganic dyes obtained from various minerals such as bengala, loess, ultramarine, prussian blue and etc. The main components of volcanic ash is clay mineral such as kaolinite, illite, quartz. Clay minerals Composing volcanic ash are kaolinite[$Al_4Si_4O_{10}{(OH)_{8}}$], illite[$K_{X}Al_2(Si,\;Al)_4O_{10}{(OH)}_2$], quartz[$SiO_2$], homblende[$Na_{0-1}\;Ca_2{(Mg,\;Fe,\;Al)}_5{(Si,\;Al)}_{8}O_{22}{(OH)}_2$]and etc. And the redish color mainly comes from iron oxide. In this paper, two different classes of dyeing process were tested; dyeing with volcanic ash only and cationic agent pre-treatment followed by dyeing with volcanic ash. The compositions of the volcanic ash powder and the volcanic ash deposited on the cotton knitted fabrics identified by energy dispersive spectrometer and XRD analysis. The major chemical components of volcanic ash deposited on the cotton knitted fabrics were confirmed to be the saicon oxide, iron oxide, and aluminum oxide and etc. According to the analysis by XRD and EDS-SEM, kaolinite, illite and quartz were also identified.