• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.6
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• pp.515-520
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• 2005

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

• Bulletin of the Korean Chemical Society
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• v.35 no.10
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• pp.2969-2973
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• 2014

A new process to fabricate a composite LSCF-Ag cathode material for SOFCs by electron beam (e-beam) irradiation process has been suggested for operation under intermediate temperature range of $600-700^{\circ}C$. A composite LSCF-Ag cathode with uniformly coated Ag nanoparticles on the surface of the LSCF material was prepared by a facile e-beam irradiation method at room temperature. The morphology of the composite LSCF-Ag material was analyzed using a TEM, FE-SEM, and EDS. The prepared composite LSCF-Ag material can play a significant role in increasing the electro-catalytic activities and reducing the operating temperature of SOFCs. The performance of a tubular single cell prepared using the composite LSCF-Ag cathode, YSZ electrolyte and a Ni/YSZ anode was evaluated at reduced operating temperature of $600-700^{\circ}C$. The micro-structure and chemical composition of the single cell were investigated using a FE-SEM and EDS.

• Bulletin of the Korean Chemical Society
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• v.25 no.8
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• pp.1182-1188
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• 2004

Polydisperse oligo(PO-b-EO) allyl ether siloxane surfactants were synthesized by the hydrosilylation reaction of OMTS with Allyl-oligo(PO-b-EO) series. The surface tension of siloxane surfactants increased with increasing the EO chain length while it decreased with increasing the PO ratio. However, the sedimentation time of the aqueous solution showed opposite trend to the surface tension data. Both the surface tension and sedimentation time of the aqueous solution containing inorganic electrolyte gradually decreased as the content of inorganic electrolyte increased because of the surface arrangement of surfactant molecules. However, they increased with an increase of pH values due to the hydrolysis of the siloxane backbone. The $C_p$ values tended to increase with the increase in the EO chain length and decrease of the PO ratio. It seems that intermolecular interaction between PO/EO block copolymer and water affects the variation of transition temperature.

• Journal of the Korean Electrochemical Society
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• v.1 no.1
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• pp.24-27
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• 1998

Electroluminescence (EL) comes from the light emission obtained by the electrical excitation energy passing through a phosphor layer undo. an applied high electrical field $(10^6 V/cm)$. The preparation of white and blue phosphors and characterizations of light emitting alternating current powder electroluminescent devices (ACPELDs) were investigated. In this work, we fabricated two kinds of ELDs, that is, yellow electroluminescent device (B-ELD), blue electroluminescent device (B-ELD). The basic st.uctures of Y-ELD and B-ELD are ITO (Indium Tin Oxide)/phosphor layer/Insulator layer/Carbon electrode and ITO/Phosphor layer/Insulating layer/carbon electrode, respectively. Another structures of ITO/Phosphor and Insulator mixture layer/Backelectrode are introduced. EL spectra and luminance of two types of ELDs were measured by changing voltage at fixed frequency 0.4kHz, 1.5kHz. Blue and yellow phosphors prepared in this work show $50cd/m^2\;and\;30cd/m^2$ of luminance at 400Hz, 150V.

• Bulletin of the Korean Chemical Society
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• v.33 no.6
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• pp.1989-1992
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• 2012

We present a low temperature (${\approx}70^{\circ}C$) method to prepare anatase, vertically aligned feather-like $TiO_2$ (VAFT) nanowire arrays $via$ reactive pulsed DC magnetron sputtering. The synthesis method is general, offering a promising strategy for preparing crystalline nanowire metal oxide films for applications including gas sensing, photocatalysis, and 3rd generation photovoltaics. As an example application, anatase nanowire films are grown on fluorine doped tin oxide coated glass substrates and used as the photoanode in dye sensitized solar cells (DSSCs). AM1.5G power conversion efficiencies for the solar cells made of 1 ${\mu}m$ thick VAFT have reached 0.42%, which compares favorably to solar cells made of the same thickness P25 $TiO_2$ (0.35%).

• Bulletin of the Korean Chemical Society
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• v.31 no.12
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• pp.3679-3683
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• 2010

Niobium oxide ($Nb_2O_5$) and phosphated $Nb_2O_5$ were synthesized and used as catalysts for sorbitol dehydration to isosorbide. The characterization results of $N_2$ adsorption, XRD and $NH_3$-TPD revealed that the phosphoric acid modification could well prevent the crystallization of $Nb_2O_5$. And the amorphous phosphated $Nb_2O_5$ catalysts kept the relatively large surface area and stable acidity at high calcination temperature. The catalytic results showed that the selectivity to isosorbide could be dramatically enhanced over phosphated $Nb_2O_5$. The excellent catalytic performance with 100.0% sorbitol conversion and 62.5% isosorbide selectivity were obtained over the 0.8P/NBO-400 catalyst. Comparing with $Nb_2O_5$ catalysts, phosphated $Nb_2O_5$ catalysts regenerated through a simple calcination process showed no significant activity loss after recycling three runs.

• Carbon letters
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• v.9 no.3
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• pp.195-199
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• 2008

A nanocomposite consisting of $Fe_3O_4$ and MWCNT was produced via sol-gel technique using $FeCl_3$ along with MWCNT by calcination at $300^{\circ}C$. The degradation effect of rhodamine B dye has been investigated under UV illumination in a darkroom. The degradation reaction was studied by monitoring the discoloration of dye as a function of irradiation time using UV-visible spectrophotometeric technique. The $Fe_3O_4$-MWCNT samples have continuous degradation ability under the UV illumination with the first order kinetics and the dye removal was better than in the pristine $Fe_3O_4$. The resultant composite catalyst was found to be efficient for the photo-Fenton reaction of the dye.

• Journal of the Korean Ceramic Society
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• v.43 no.11 s.294
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• pp.724-727
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• 2006

It has long been known that the oxidation kinetics of Zr-based alloys undergoes a crossover from parabolic to cubic in the pretransition period (before breakaway of the oxide scale). This kinetic crossover, however, is not fully understood yet. We have earlier proposed a model for the Zr-oxidation kinetics, in a closed form for the first time, by taking into account a compressive strain energy gradient as a diffusional driving force in addition to a chemical potential gradient of component oxygen across the ZrO$_2$ scale upon Zr [J. Nucl. Mater., 299 (2001) 235]. In this paper, we experimentally reconfirm the validity of the proposed model by using the thermogravimetric data on mass gain of Zr in a plate and wire form, respectively, in air atmosphere at different temperatures in the range of 500$^{\circ}$ to 800$^{\circ}C$, and subsequently report on the numerical values for oxygen chemical diffusivity and strain energy gradient across the oxide scale.

• Journal of the Korean Applied Science and Technology
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• v.16 no.4
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• pp.307-311
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• 1999

Interfacial properties of electrode and organic thin layer is one of the most important factor in performing a Light Emitting Diodes(LED). Phthalocyanine copper was used as a buffer layer to improve interface characteristic, so that device efficiency was improved. In this study, LEDs were fabricated as like structures of Indium-Tin-Oxide (ITO) / N,N' -Diphenyl-N,N'-di(m-tolyl)-benzidine (TPD) / 8-Hydroxyquinoline aluminum(Alq) / Aluminum(Al) and Indium-Tin-Oxide(ITO) / N,N'-Diphenyl-N,N' -di(m-tolyl)-benzidine(TPD) / 2-(4-Biphenylyl)-5(4-tert-butyl-phenyl)-1,3,4-oxadiazole(PBD) / Aluminum(Al). In these devices, CuPC was layered at electrode/organic layer interface. As position is changing and thickness is changing, devices showed characteristic luminescence efficiency and luminescence inensity respectively. We showed in this study that luminescence efficiency was improved with CuPC layer in LEDs. The efficiency of device with layer CuPC is higher than that of 2 layer CuPC. However, the luminescence of 2 layer CuPC device got higher value.

• Journal of Sensor Science and Technology
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• v.28 no.3
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• pp.139-145
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• 2019

Precautionary detection of chemical warfare agents (CWAs) has been an important global issue mainly owing to their toxicity. To achieve proper detection, many studies have been conducted to develop sensitive gas sensors for CWAs. In particular, metal-oxide semi-conductors (MOS) have been investigated as promising sensing materials owing to their abundance in nature and excellent sensitivity. In this review, we mainly focus on various MOS-based gas sensors that have been fabricated for the detection of two specific CWA simulants, 2-chloroethyl ethyl sulfide (2-CEES) and dimethyl methyl phosphonate (DMMP), which are simulants of sulfur mustard and sarin, respectively. In the case of 2-CEES, we mainly discuss $CdSnO_3-$ and ZnO-based sensors and their reaction mechanisms. In addition, a method to improve the selectivity of ZnO-based sensors is mentioned. Various sensors and their sensing mechanisms have been introduced for the detection of DMMP. As the reaction with DMMP may directly affect the sensing properties of MOS, this paper includes previous studies on its poisoning effect. Finally, promising sensing materials for both gases are proposed.