• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.32-32
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• 2011

Plasma etching is used in microelectronic processing for patterning of micro- and nano-scale devices. Commonly, optical emission spectroscopy (OES) is widely used for real-time endpoint detection for plasma etching. However, if the viewport for optical-emission monitoring becomes blurred by polymer film due to prolonged use of the etching system, optical-emission monitoring becomes impossible. In addition, when the exposed area ratio on the wafer is small, changes in the optical emission are so slight that it is almost impossible to detect the endpoint of etching. For this reason, as a simple method of detecting variations in plasma without contamination of the reaction chamber at low cost, a method of measuring plasma impedance is being examined. The object in this research is to investigate the suitability of using plasma impedance monitoring (PIM) with statistical approach for real-time endpoint detection of $SiO_2$ etching. The endpoint was determined by impedance signal variation from I-V monitor (VI probe). However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ film on Si wafer is etched by fluorocarbon plasma on inductive coupled plasma (ICP) etcher. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance analysis is compared with optical emission spectroscopy (OES). From impedance data, we tried to analyze physical properties of plasma, and real-time endpoint detection can be achieved.

• 한국전기전자재료학회논문지
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• 제21권4호
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• pp.354-361
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• 2008

The dielectric characteristics of low-k interlayer dielectric materials was fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was evaporated and introduced with the flow rates from 16 sccm to 25 sccm by 1sccm step in the constant flow rate of 60 sccm $O_2$ in process chamber. Manufactured samples are analyzed components by measuring FT/IR absorption lines. Decomposition each Microscopic structures through two-dimensional correlation analysis about mechanisms for the formation of SiOCH in $SiOCH_3$, Si-O-Si and Si-$CH_3$ bonding group and analyzed correlation between the micro-structure of each group. It is a tendency that seems to be growing of Si-O-Ci(C) bonding group and narrowing of Si-O-$CH_3$ bonding group relative to the increasing flow-rate BTMSM. The order of changing sensitivity about changes of flow-rate in Si-O-Si(C) bonding group is cross link mode$(1050cm^{-1})$ $\rightarrow$ open link mode$(1100cm^{-1})\rightarrow$ cage link mode $(1140cm^{-1})$.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2008년도 추계 학술발표회
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• pp.117-125
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• 2008

The detection of thin-layered soil is important in soft soils to evaluate the soil behavior. The smaller diameter cone penetrometer have been commonly used to detect the layer with increasing sensitivity. The objective of this study is to detect the thin-layered soil using cone resistance and electrical resistance. The cone resistivity penetration test (CRPT) is developed to evaluate the cone tip resistance and electrical resistance at the tip. The CRPT is a micro-cone which has a $0.78cm^2$ in projected area. The application test is conducted in a laboratory large-scale consolidometer (calibration chamber). The kaolinite, sand and water are mixed to make the specimen at the liquid limit of 46% using a slurry mixer. It takes two months for the consolidation of the specimen. After consolidation, the CRPT test is carried out. Furthermore the standard CPT results are compared with the electrical resistance measured at the tip in the field. This study suggests that the CRPT may be a useful tool for detecting thin-layers in soft soils.

• 전기학회논문지
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• 제59권2호
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• pp.369-373
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• 2010

Modem electronic circuits are of importance for the function of communication, traffic systems and security systems. An intentional threat to these systems could be of big casualties and economic disasters. This paper has shown damage effect of microcontroller device with coupling caused by UWB-HPEM(Ultra Wideband-High Power Electromagnetics). The UWB measurements were done at an Anechoic Chamber using a RADAN UWB voltage source, which can generate a transient impulse of about 180 kV. The susceptibility level for microcontroller has been assessed by effect of various operation line lengths. The results of susceptibility analysis has showed that the effect of the reset line length on the MT(Ma1function Threshold) is larger than the effect of the different line length(Data, Power, Clock). With the knowledge of these parameters electronic system can be designed exactly suitable concerning the system requirements. Based on the results, susceptibility of microcontroller can be applied to protection plan to elucidate the effects of microwaves on electronic equipment.

• Bulletin of the Korean Chemical Society
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• 제26권6호
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• pp.939-942
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• 2005

For the detection of cyanobacterial toxin, an Enzyme-linked immunosorbent assay (ELISA) was integrated into a PDMS microchip. The conjugates of microcystin-LR (MCLR) and keyhole limpet hemocyanin (KLH) were adsorbed on the surface of polystyrene beads and these MCLR-KLH polystyrene beads were introduced into a microchamber. MCLR on the surface of polystyrene beads reacted with horseradish peroxides (HRP) conjugated anti-MCLR monoclonal antibody (mAb) which had a competitive reaction with MCLR in water sample. After the enzyme substrate 3,3,5,5-tetramethyl benzidine (TMB) was injected into the chamber and catalyzed by HRP, the color change was detected with a liquid-cord waveguide. This integration shortened the conventional ELISA analysis time from several hours to about 30 min with only 4.2 $\mu$L MCLR sample consuming which was useful for the environmental analysis. More over, troublesome operations required for ELISA could be replaced by simple operations. The microchip based detection system showed a good sensitivity of 0.05 $\mu$g/L and maintained good reliability through its quantitative range with low coefficients of variation (2.5-10.5%).

• 대한화학회지
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• 제40권12호
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• pp.719-723
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• 1996

고체표면의 비점유 전자에너지 상태를 연구하고자 역광전자분광기를 제작하고 시험하였다. 이 분광기는 초고진공 챔버속에 전자총과 광검출기로 구성되어 있다. 전자총은 궤도 시뮬레이션과 전류 측정을 통해 좋은 집속도와 높은 전류밀도를 가지고 있음을 알 수 있었다. 이 분광기의 전체적인 분해능은 0.74 eV이고, 광검출기의 감도는 약 10 counts/$sec{\cdot}{\mu}A$이다. 하나의 결과로서 Ge(111) 시료의 역광전자분광 스펙트럼은 이론적인 계산결과와 잘 일치하였다.

• International Journal of Air-Conditioning and Refrigeration
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• 제8권1호
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• pp.73-83
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• 2000

The purpose of this study is to analyze and characterize the correlation of the thermal comfort sensation with physiological responses for men in winter indoor environment. A number of experiments were conducted under twenty different environmental conditions with college male students. Clinical information on each participant was reported in terms of electrocardiogram (ECG), electroencephalogram (EEG) and self-centered evaluation. The comfort zone in winter is found, throughout the study, at Standard New Effective Temperature (SET$T^+$) of 25.2$^{\circ}C$, Predicted Mean Vote (PMV) between 0.27 and 0.62, and Thermal Sensation Vote (TSV) in the range of -0.76 and 0.36. The largest difference in skin temperature is measured at the calf area with respect to air temperature changes. Skin sensitivity to environment temperature is explained as calf, head, chest and abdomen in descending order. Change in heat rate is analyzed to be in parallel with that of SET$T^+$.

• Nuclear Engineering and Technology
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• 제45권7호
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• pp.921-928
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• 2013

A future nuclear energy system is being developed at Korea Atomic Energy Research Institute (KAERI), the system involves a Sodium Fast Reactor (SFR) linked with the pyro-process. The pyro-process produces a source material to fabricate a SFR fuel rod. Therefore, an isotopic fissile content assay is very important for fuel rod safety and SFR economics. A new technology for an analysis of isotopic fissile content has been proposed using a lead slowing down spectrometer (LSDS). The new technology has several features for a fissile analysis from spent fuel: direct isotopic fissile assay, no background interference, and no requirement from burnup history information. Several calculations were done on the designed spectrometer geometry: detection sensitivity, neutron energy spectrum analysis, neutron fission characteristics, self shielding analysis, and neutron production mechanism. The spectrum was well organized even at low neutron energy and the threshold fission chamber was a proper choice to get prompt fast fission neutrons. The characteristic fission signature was obtained in slowing down neutron energy from each fissile isotope. Another application of LSDS is for an optimum design of the spent fuel storage, maximization of the burnup credit and provision of the burnup code correction factor. Additionally, an isotopic fissile content assay will contribute to an increase in transparency and credibility for the utilization of spent fuel nuclear material, as internationally demanded.

• Journal of Biosystems Engineering
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• 제30권5호
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• pp.306-311
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• 2005

In this study, a biosensor was developed to rapidly diagnose the swine sarcoptic mange (Sarcoptes scabies var. suis). The ELISA was modified to reduce the processing time for rapid diagnosis. The biosensor consists of a biological reaction part, and a measurement and control part. The biological reaction part was designed for using micro-pumps and valves for fluid transportation, and the measurement control part composed of a photodiode, a light-emitting diode fur light measurement, and a microcomputer to implement assay A polystyrene covet was used as a reaction chamber. Signal output was read as the rate of change in optical density at 645nm. Eighteen pigs diagnosed with sacroptic mange and 19 control pigs were tested. Fifteen sacbies-infested pigs showed positive results ($83.3\%$ sensitivity). Sixteen control pigs showed negative results ($84.2\%$ specificity). The system could execute a diagnosis cycle in about 45 min. The results suggest that this biosensor is useful for the rapid diagnosis of swine sacroptic mange.

• International Journal of Automotive Technology
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• 제8권2호
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• pp.149-154
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• 2007

The engine behavior in a transient condition is important to not only emission regulations but also fuel economy. A fast response gas analyzer can be a useful tool to investigate exhaust gas in a transient operation. It should be designed to analyze gas concentration with a short time constant by a fast sampling module and an appropriate measuring method for each emission element. In this study, a new fast sampling module is introduced and flow analysis is performed by numerical simulation. The analysis has shown the proper operating condition and the sensitivity of the module for practical application. Calculated flow to the sampling module has $0.5{\sim}4%$ error, while backflow toward the expansion tube is expected when pressure in CP (Constant Pressure) chamber is over 0.6 bar. For a stable supply of flow to the optical cell, sample gas pressure should be in the range, $0.35{\sim}1.90$ bar, when the pressure in the CP camber and the optical cell are 0.2 bar and 0.158 bar, respectively.