• 한국표면공학회지
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• 제50권6호
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• pp.516-522
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• 2017

We report the growth of carbon nanotubes (CNT) on Invar-42 plates using coal tar pitch (CTP) by chemical vapor deposition (CVD) method. The solid phase CTP is used as an inexpensive carbon source since it produces a bunch of hydrocarbon gases such as $CH_4$ and other $C_xH_v$ by thermal decomposition over $450^{\circ}C$. The Invar-42 is a representative Ni-based ferrous alloy and can be used repetitively as a substrate for CNT growth because Ni and Fe are used as very active catalytic elements. We changed mixing ratio of carrier gases, argon and hydrogen, and temperature of growth region. It was found that the optimum gas ratio and temperature for high quality CNT growth are $Ar:H_2=400:400$ sccm and $1000^{\circ}C$, respectively. In addition, the carbon nanoball (CNB) was also obtained by just changing the mixing ratio to $Ar:H_2=100:600$ sccm. Finally, CTP can be employed as a versatile carbon source to produce various carbon-based nanomaterials, such as CNT and CNB.

• 한국재료학회지
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• 제32권1호
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• pp.30-35
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• 2022

The development of advanced materials to improve the efficiency of photoelectrochemical (PEC) water splitting paves the way for widespread renewable energy technologies. Efficient photoanodes with strong absorbance in visible light increases the effectiveness of solar energy conversion systems. MoS₂ in a two-dimensional semiconductor that has excellent absorption performance in visible light and high catalytic activity, showing considerable potential as an agent of PEC water splitting. In this study, we successfully modulated the MoS₂ morphology on indium tin oxide substrate by using the metalorganic chemical vapor deposition method, and applied the PEC application. The PEC photocurrent of the vertically grown MoS₂ nanosheet structure significantly increased relative to that of MoS₂ nanoparticles because of the efficient transfer of charge carriers and high-density active sites. The enhanced photocurrent was attributed to the efficient charge separation and improved light absorption of the MoS₂ nanosheet structure. Meanwhile, the photocurrent property of thick nanosheets decreased because of the limit imposed by the diffusion lengths of carriers. This study proposes a valuable photoelectrode design with suitable nanosheet morphology for efficient PEC water splitting.

• 한국분말재료학회지
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• 제23권3호
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• pp.235-239
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• 2016

This study is performed to fabricate a Ti porous body by freeze drying process using titanium hydride ($TiH_2$) powder and camphene. Then, the Ti porous body is employed to synthesize carbon nanotubes (CNTs) using thermal catalytic chemical vapor deposition (CCVD) with Fe catalyst and methane ($CH_4$) gas to increase the specific surface area. The synthesized Ti porous body has $100{\mu}M$-sized macropores and $10-30{\mu}m$-sized micropores. The synthesized CNTs have random directions and are entangled with adjacent CNTs. The CNTs have a bamboo-like structure, and their average diameter is about 50 nm. The Fe nano-particles observed at the tip of the CNTs indicate that the tip growth model is applicable. The specific surface area of the CNT-coated Ti porous body is about 20 times larger than that of the raw Ti porous body. These CNT-coated Ti porous bodies are expected to be used as filters or catalyst supports.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.44-44
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• 2003

Growth mechanism of carbon nanotubes(CNTs) synthesized by chemical vapor deposition is abided by two growth modes. These growth modes are classified by the position of activated catalytic metal particle in the CNTs. Growth mode can be also affected by interaction between substrate and catalytic metal and induced energy such as thermal and plasma. We studied the reaction of catalytic metal to the substrate and growth mode of CNTs. Various substrates such as Si(100), graphite plate, coming glass, sapphire and AAO membrane are used to study the relation between catalytic metal and substrate in the synthesis of CNTs. For catalytic metal, thin film was deposited on various substrate via sputtering technique with a thickness of ∼20nm and magnetic fluids with none-sized particles were dispersed on AAO membrane. After laying process on AAO membrane, it was dried at 80$^{\circ}C$ for 8 hour. Synthesizing of CNTs was carried out at 900$^{\circ}C$ in NH3/C2H2 mixture gases flow for 10minutes.

• 반도체디스플레이기술학회지
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• 제3권1호
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• pp.9-13
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• 2004

Carbon nanofibers (CNFs) with uniform diameter and controlled size were prepared from catalytic decomposition of $\textrm{C}_{2}\textrm{H}_{2}$ with Ni-MgO catalyst treated by mechanochemical (MC) process. The properties of Ni catalyst, such as size, distribution and morphology, can be governed by tuning grinding time in MC process. As a result, size and structure of CNFs can be tailored. The effect of grinding time to the as-grown CNFs was studied. CNFs with diameter from 10-70 nm were synthesized. CNFs with bundle formation sharing one tip and twisted CNFs were also synthesized with catalyst treated by MC process.

• 한국전기전자재료학회논문지
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• 제21권5호
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• pp.411-414
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• 2008

The germanium films were deposited by metal organic chemical vapor deposition using $Ge(allyl)_4$ precursors on TiAlN substrates. Deposition of germanium films was only possible with a presence of $Sb(iPr)_3$, which means that $Sb(iPr)_3$ takes a catalytic role by a thermal decomposition of $Sb(iPr)_3$ for Ge film deposition. Also, as Sb bubbler temperature increases, deposition rate of the Ge films increases at a substrate temperature of $370^{\circ}C$. The GeTe thin films were fabricated by MOCVD with $Te(tBu)_2$ on Ge thin film. The GeTe films were grown by the tellurium deposition at $230-250^{\circ}C$ on Ge films deposited on TiAlN electrode in the presence of Sb at $370^{\circ}C$. The GeTe film growth on Ge films depends on the both the tellurium deposition temperature and deposition time. Also, using $Sb(iPr)_3$ precursor, GeSbTe films with hexagonal structures were fabricated on GeTe thin films. GeSbTe films were deposited in trench structure with 200 nm*120 nm small size.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1402-1404
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• 2009

The silicon nitride films for gate dielectric were deposited by catalytic chemical vapor deposition at low temperature (${\leq}200^{\circ}C$). The mixture of $SiH_4$, $NH_3$ and $H_2$ was used as source gases. The current-voltage (I-V) and the capacitance-voltage (C-V) characteristics of the films were measured. The breakdown voltage and the flat band voltage shift of samples were improved by increase of the $NH_3$ contents and $H_2$ dilution ratio. The defect states were analyzed by photoluminescence (PL) spectra. As the defect states decreased, the breakdown voltage and the flat band voltage shift increased.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1378-1379
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• 2006

Carbon nanotubes (CNTs) with few defects and very small amount of amorphous carbon coating have been synthesized by catalytic decomposition of acetylene in $H_2$ over well-dispersed metal particles supported on MgO. The yield, quality and diameters of CNTs were obtained by control of catalyst metal compositions to be used. The optimization condition of carbon nanotubes with high yield is when Co and Mo are in a 1:1 ratio and Fe metal contents to Co is increased on magnesium oxide support. It is also found that the diameter of the as-prepared CNTs can be controlled mainly by adjusting the molar ratio of Fe-Mo, Co-Fe, and Co-Mo versus the MgO support. Our results indicated that desired diameter distribution of CNTs is obtained by choosing or combining the catalyst to be employed.

• 공업화학
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• 제2권1호
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• pp.38-46
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• 1991

탄소 침적과 황피독된 수소 첨가용 Ni 촉매의 재생에 관하여 연구하였다. 탄소 침적된 촉매를 수소로 재생할 경우, 재생율은 높았으나 재생 시간이 길었으며 침적된 탄소가 완전히 제거되지 않았다. 산소로 재생할 경우에는 재생시간이 단축되었고 대부분의 침적된 탄소를 제거시킬 수 있었으나 반드시 환원과정이 뒤따라야 한다는 문제점이 있었다. 황에 완전히 피독된 촉매를 수소와 수증기만으로 재생 처리할 경우 활성의 회복을 기대할 수 없었으나, 산소가 포함된 재생처리에는 $650^{\circ}C$에서 활성이 60 %까지 회복되었으며, HCl이 첨가된 경우에는 특히 저온에서 활성이 45 %정도까지 회복되었다. 수증기는 촉매의 소결현상을 촉진시키나, 산소 또는 염소는 소결억제 효과가 있는 것으로 나타났다.

• Bulletin of the Korean Chemical Society
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• 제24권1호
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• pp.49-54
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• 2003

TiO₂nanoparticles were synthesized using the metallorganic chemical vapor deposition process. Particles with and without metal ion dopants were obtained. X-ray photoelectron and energy dispersive X-ray spectroscopic measurements confirmed the stoichiometry of the TiO₂nanoparticles. X-ray diffraction patterns showed a polycrystalline anatase structure of TiO₂. Transmission electron microscopy revealed that these particles are of nanoscale dimensions. Exact particle size and size distribution analyses were carried out by dynamic light scattering. The average particle size was determined to be 22 nm. The nanosize particles provided large surface area for photocatalysis and a large number of free surface-charge carriers, which are crucial for the enhancement of photocatalytic activity. To improve the photocatalytic activity, metal ions, including transition metal ions $(Pd^{2+},\;Pt^{4+},\;Fe^{3+})$ and lanthanide ion $(Nd^{3+})$ were added to pure TiO₂nanoparticles. The effects of dopants on photocatalytic kinetics were investigated by the degradation of 2-chlorophenol under an ultraviolet light source. The results showed that the TiO₂nanoparticles with the metal ion dopants have higher photocatalytic activity than undoped TiO₂. The $Nd^{3+}$ ion of these dopant metal ions showed the highest catalytic activity. The difference in the photocatalytic activity with different dopants is related to the different ionic radii of the dopants.