• 한국재료학회지
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• 제17권11호
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• pp.593-600
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• 2007

Aluminum was anodized in a $H_2SO_4$ solution, and titanium (IV) oxide ($TiO_2$) was electrodeposited into nanopores of anodic porous alumina in a mixed solution of $TiOSO_4$ and $(COOH)_2$. The photocatalytic activity of the prepared film was analyzed for photodegradation of methylene blue aqueous solution. Consequently, we found it was possible to electrodeposit $TiO_2$ onto anodic porous alumina, and synthesized it into the nanopores by hydrolysis of a titanium complex ion under AC 8-9 V when film thickness was about $15-20{\mu}m$. The photocatalytic activity of $TiO_2$-loaded anodic porous alumina ($TiO_2/Al_2O_3$) at an impressed voltage of 9 V was the highest in every condition, being about 12 times as high as sol-gel $TiO_2$ on anodic porous alumina. The results revealed that anodic porous alumina is effective as a substrate for photocatalytic film and that high-activity $TiO_2$ film can be prepared at low cost.

• 한국재료학회지
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• 제12권6호
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• pp.482-487
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• 2002

A $TiO_2$ film for photocatalyst was prepared by anodic oxidation at 180V in acidic electrolyte and film formation mechanism was studied. The major part of anodic $TiO_2$ film consisted of anatase type structure and surface morphology exhibited a porous cell structure. The thickness growth rate of the oxide film with anodization time revealed two-stage slope corresponds to the surface morphology between anodic films. The growth of pores on cell structure and the growth rate of film with two-stage slope are related to the constant formation rate of the $TiO_2$ layer.

• Transactions on Electrical and Electronic Materials
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• 제11권3호
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• pp.112-115
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• 2010

This paper provides the properties of $TiO_2$ nanotube arrays which are fabricated by anodic oxidation of Ti metal. Highly ordered $TiO_2$ nanotube arrays could be obtained by anodic oxidation of Ti foil in $0.3\;wt{\cdot}%$ $NH_4F$ contained ethylene glycol solution at $30^{\circ}C$. The length, pore size, wall thickness, tube diameter etc. of $TiO_2$ nanotube arrays were analyzed by field emission scanning electron microscopy. Their crystal properties were studied by field emission transmission electron microscopy and X-ray photoelectron spectroscopy.

• 공업화학
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• 제28권6호
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• pp.601-606
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• 2017

금속 표면처리의 대표적인 기술인 양극산화를 통하여 일차원 나노구조 금속 산화물을 형성할 수 있다. 여러 가지 금속 산화물 중에 기능성이 뛰어난 $TiO_2$에 대한 관심의 증대로 $TiO_2$ 나노 튜브를 이용한 연구가 많이 이루어지고 있다. 본 총설논문에서는 지금까지 연구되어 밝혀진 $TiO_2$ 나노 튜브가 형성원리에 대한 해설논문으로 전기화학적 측면에서의 양극 산화 공정에 대한 이해를 통하여 나노 튜브 형성을 위한 전기적 조건, 화학적 조건, 물리적 조건에 대하여 다루었다. 특히 $TiO_2$ 나노 튜브 성장의 핵심 요소인 산화물의 형성과 에칭의 평형관계, 다공성 구조의 형성 원인을 다루었다. 나아가 전해질 조건에 따른 $TiO_2$ 나노 튜브의 형태학적 고찰을 함으로써 향후 양극 산화를 통한 $TiO_2$ 나노 튜브 응용에 관한 연구를 하는 연구자에게 이해하기 쉽게 설명하고자 하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.66-66
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• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• 한국재료학회지
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• 제12권5호
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• pp.353-358
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• 2002

The microstructure and growth behaviors of anodic oxide layers on titanium were investigated. $TiO_2$ oxide films were prepared by anodizing at constant voltages of 180 and 200V in sulfuric acid electrolyte. The anodic $TiO_2$ layer formed at 200V showed a cell structure with more irregular pore shapes around the interface between the anodic oxide layer and the substrate titanium compared with that formed at 180V. Irregular shape of pores at the initial stage of anodization seemed to be attributed to spark discharge phenomena which heavily occurred during increasing voltages. The thickness of the anodic oxide film increased linearly at a rate of $1.9{\times}10^{ -1}\mu\textrm{m}$/min. The oxide layers formed at 180 and 200V were composed mainly of anatase structure, and the anodizing process could be suggested as one of fabrication methods of photocatalytic $TiO_2$.

• 한국전기전자재료학회논문지
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• 제23권8호
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• pp.655-659
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• 2010

Nanoporous titanium dioxide ($TiO_2$) is very attractive material for various applications due to the high surface to volume ratio. In this study, we have fabricated nanoporous $TiO_2$ thin films on Si by anodic oxidation. 500-nm-thick titanium (Ti) films were deposited on Si by using electron beam evaporation. Nanoporous structures in the Ti films were obtained by anodic oxidization using ethylene glycol electrolytes containing 0.3 wt% $NH_4F$ and 2 vol% $H_2O$ under an applied bias of 5 V. The diameter of nanopores in the Ti films linearly increased with anodization time and the whole Ti layer could become nanoporous after anodizing for 3 hours, resulting in vertically aligned nanotubes with the length of 200~300 nm and the diameter of 50~80 nm. Upon annealing at $600^{\circ}C$ in air, the anodized Ti films were fully crystallized to $TiO_2$ of rutile and anatase phases. We believe that our method to fabricate nanoporous $TiO_2$ films on Si is promising for applications to thin-film gas sensors and thin-film photovoltaics.

• 한국분말재료학회지
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• 제18권1호
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• pp.56-63
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• 2011

Recently, $TiO_2$ nanotubes have considerably researched because of their novel application about photocatalysis, dye-sensitized solar cells (DSSCs), lithium ion battery, etc. In this work, self-standing $TiO_2$ nanotube arrays were fabricated by anodic oxidation method using pure Ti foil as a working electrode in ethylene glycole with 0.3M $NH_4F$ + $2%H_2O$. Growth behavior of $TiO_2$ nanotube arrays was compared according to temperature, voltage and time. The morphology, structure and crystalline of anodized $TiO_2$ nanotube arrays were observed by FE-SEM (field emission scanning electron microscope) and XRD (X-ray diffraction).

• 조명전기설비학회논문지
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• 제24권3호
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• pp.14-19
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• 2010

Partial anodic oxidation of Ti-mesh with a wire diameter of ~200[${\mu}m$] produces self-aligned $TiO_2$ nanotube arrays (~50[${\mu}m$] in length) on Ti-mesh substrate. The electrolyte used for anodic oxidation was an ethylene glycol solution with an addition of 1.5 vol. % $H_2O$ and 0.2 wt. % $NH_4F$. A dye-sensitized solar cell utilizing the photoanode structure of $TiO_2$-nanotube/Ti-mesh was fabricated without a transparent conducting oxide (TCO) layer, in which Ti-mesh replaced the role of TCO. The 1.93[%] photoconversion efficiency was low, which can be attributed to both insufficient dye molecules attachment and limited electrolyte flow to dye molecules. The optimized nanotube diameter and length as well as the $TiCl_4$ treatment can improve cell performance.

• 한국표면공학회지
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• 제35권6호
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• pp.383-390
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• 2002

To investigate behaviors of Ti and O elements and microstructures of anodic titanium oxide films, the films were prepared by anodizing pure titanium in $H_2$S $O_4$, $H_3$P $O_4$, and $H_2O$$_2$ mixed solution at 180V. The microstructures and chemical states of the elements were analyzed using SEM, X-ray mapping, AFM, XRD, XPS (depth profile). The films formed on a titanium substrate showed porous layers which were composed of pore and wall, And with increasing anodizing time a hexagonal shape of cell structures were dominant and solace roughness increased. From the XRD result the structure of the Ti $O_2$ layer was anatase type of crystal on the whole. In the XPS spectra it was found that Ti and O were chemically binded in forms of Ti $O_2$, TiOH, $Ti_2$ $O_3$ at Ti 2p, and Ti $O_2$, $Ti_2$ $O_3$, $P_2$ $O_{5}$, S $O_4^{2-}$ at O ls respectively. Concentration of Ti $O_2$ decreased as the depth increased from the surface of the oxide film towards the substrate, but to the contrary concentrations of TiOH and $Ti_2$ $O_3$ increased.d.