• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.416-417
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• 2005

In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

• Journal of the Institute of Convergence Signal Processing
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• v.12 no.1
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• pp.67-75
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• 2011

This paper presents the systematic optimal design of an overlapped ultrasonic sensor ring for high performance obstacle detection using effective beam overlap. Basically, a set of low directivity ultrasonic sensors of the same type are arranged in a circle at regular intervals with their beams overlapped. First, both real and simplified beam patterns of an ultrasonic sensor and several sensor models for obstacle position estimation within its beam pattern are introduced. Second, the obstacle detection range of an overlapped ultrasonic sensor ring and its simple sensor model for obstacle position estimation are described. Third, for both conic and non-conic shaped beam pattern, the design indices of an overlapped ultrasonic sensor ring for minimal positional uncertainty in obstacle detection are defined. Fourth, the constraints imposed on the structural parameters of an overlapped ultrasonic sensor ring to guarantee non empty beam overlap and to avoid excessive beam overlap are derived. Fifth, the optimal number of ultrasonic sensors for a given radius of an overlapped ultrasonic sensor ring and the optimal radius of an overlapped ultrasonic sensor ring are determined. Throughout this paper, the MA40B8 from Murata Inc. is taken as a representative commercial low directivity ultrasonic sensor.

• Journal of Sensor Science and Technology
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• v.25 no.2
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• pp.86-90
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• 2016

A 3D ultrasonic anemometer measures the direction and velocity of wind in a 3D space. The 2D ultrasonic anemometers developed by different manufacturers do not differ significantly in terms of their form or structure. The 3D ultrasonic anemometers, on the other hand, have more diverse forms than their 2D counterparts depending on the measurement algorithms and methods. Designing and reviewing the structure at the initial stage and defining its performance objectives are time-consuming processes. The process can be made cost-effective and time-saving if the validity is tested by model design and structural interpretation, and the structure is designed to withstand high wind velocities. This study presents the results of a 3D ultrasonic anemometer on real sample data by using a 3D modeling program, CATIA, for ultrasonic anemometer modeling.

• Journal of Sensor Science and Technology
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• v.12 no.2
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• pp.95-101
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• 2003

Ultrasonic transmitter used for scale prevention in boiler or heat exchanger is composed of the magnetostrictive material which transforms electric energy into ultrasonic wave and the horn which amplifies generated ultrasonic wave and transfers it into medium loaded. In this paper, we have performed the shape design for magnetostrictive material and analyzed a few type of horns which amplify generated ultrasonic wave and found each solution theoretically. Final length of the horn has been determined by measuring the sound pressure in medium between theoretical value and experience data. At last we have given the results of our study for the effects of ultrasonic wave irradiated by manufactured ultrasonic transmitter on preventing scale deposition on test pipe under the similar condition to boiler.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.418-420
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• 2005

This paper proposed ultrasonic distance measurement module development for correct distance detection with collision escaping or obstacle of mobile robot is traveling self-regulation. Representative ultrasonic module applied in existing was Polaroid company's 6500 series and Devantech company's SRF04/SRF08 series. This ultrasonic sensors are corrupted by systematic errors due mainly to the dependency of sound speed upon surrounding conditions and random errors of uncertain origin. Therefore Ultrasonic distance detecting means of error compensation method and high definition, narrow beam angle, board area distance detecting means to apply to ultrasonic mobile robot control urgently need. In this paper use internal type temperature compensation method to improve problem of ultrasonic distance measurement method instead of that volume that have shortcoming of used correct temperature compensation methods applied big addition device. Compensate error by environment change of temperature. Humidity density etc. and is applicable to mobile robot offering various interface and real-time processing developed possible distance measurement module.

• The Journal of the Acoustical Society of Korea
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• v.27 no.6
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• pp.263-270
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• 2008

The performance of an ultrasonic array sensor is determined by the properties of constituent materials and the effects of many structural parameters. In this study, with the finite element method, variation of the performances of an ultrasonic array sensor was analyzed in relation to its structural variables. Based on the analysis result, the structure of the ultrasonic array sensor was optimized to provide the highest sensitivity while satisfying such requirements as fractional bandwidth, center frequency and -20 dB pulse length. The optimization was carried out with the SQP-PD method for a target function composed of the ultrasonic array sensor performance. The optimized ultrasonic array sensor satisfied all the required specifications to be applicable to medical imaging diagnosis. The design technology in this paper can be utilized for other ultrasonic array sensors of a similar structure.

• Journal of Biomedical Engineering Research
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• v.29 no.5
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• pp.384-391
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• 2008

For use in the guide system for the people who are visually impaired, an obstacle searching device using synchronous ultrasonic wave emission was proposed and developed. Generally, the conventional obstacle detection methods use the ultrasonic distance measuring device with successive scan method. However, the scan method causes a theoretical error and it couldn't estimate accurate obstacle distances. The proposed synchronous firing method use the plural number of ultrasonic sensors which emit ultrasonic wave simultaneously and estimate the distance to the closest obstacle relatively accurately. We analytically analyzed the errors of the conventional and proposed methods and compared the quantitative differences of the errors. The differences verified by obstacle search experiments. Using the proposed ultrasonic wave synchronous firing method, 3 dimensional obstacle location estimating device was designed and implemented. The results of the 3 dimensional obstacle detecting experiments showed the proposed method had good performances and it would be sufficiently use in the guide system for the people who are visually impaired.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.1
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• pp.145-155
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• 2010

This paper presents a new approach to obstacle avoidance for mobile robot in unknown or partially unknown environments. The method combines two navigation subsystems: low level and high level. The low level subsystem takes part in the control of linear, angular velocities using a multivariable PI controller, and the nonlinear position control. The high level subsystem uses ultrasonic and IR sensors to detect the unknown obstacle include static and dynamic obstacle. This approach provides both obstacle avoidance and target-following behaviors and uses only the local information for decision making for the next action. Also, we propose a new algorithm for the identification and solution of the local minima situation during the robot's traversal using the set of fuzzy rules. The system has been successfully demonstrated by simulations and experiments.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.6
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• pp.1125-1132
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• 2012

The researches on driver assistance systems that can prevent an accident have been actively performed due to social issues of traffic accidents with development of vehicle industry in recent. It is required for researchers to develope systems which assist driver's perception and judgment when considering that over 70% of traffic accidents occur by drivers' carelessness and 75% of the total accidents occur at the speed of less 29km per hour. In this paper, we implemented a front and rear vehicle monitoring system that monitors distance from a vehicle to obstacles in real-time at the low-speed or back-ward driving. The proposed system consists of ultrasonic sensors of high angle and wide angle of beam spread, ATmega128, and DSP processor.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.5
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• pp.434-443
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• 2007

Presently, the exploration of an unknown environment is an important task for thee new generation of mobile service robots and mobile robots are navigated by means of a number of methods, using navigating systems such as the sonar-sensing system or the visual-sensing system. To fully utilize the strengths of both the sonar and visual sensing systems. This paper presents a technique for localization of a mobile robot using fusion data of multi-ultrasonic sensors and vision system. The mobile robot is designed for operating in a well-structured environment that can be represented by planes, edges, comers and cylinders in the view of structural features. In the case of ultrasonic sensors, these features have the range information in the form of the arc of a circle that is generally named as RCD(Region of Constant Depth). Localization is the continual provision of a knowledge of position which is deduced from it's a priori position estimation. The environment of a robot is modeled into a two dimensional grid map. we defines a vision-based environment recognition, phisically-based sonar sensor model and employs an extended Kalman filter to estimate position of the robot. The performance and simplicity of the approach is demonstrated with the results produced by sets of experiments using a mobile robot.