• Title/Summary/Keyword: amorphous Si

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The improvement of characteristics for hydrogenated amorphous silicon thin films by photo-induced CVD (광 CVD에 의한 비정질 실리콘 박막 특성 향상)

  • 김용상;이성규;전명철;박진석;한민구
    • Electrical & Electronic Materials
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    • v.7 no.2
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    • pp.94-99
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    • 1994
  • The purpose of this work is to investigate the interface characteristics of hydrogenated amorphous silicon thin films prepared by PECVD and photo-induced CVD and to examine the annealing effects of ultraviolet irradiation on hydrogenated amorphous silicon thin films which were degraded by visible light illumination. The interface layer thickness of films deposited by photo-induced CVD was about 600-900.angs. while that by PECVD was about 1000-1300.angs.. These results can show that the quality of interface layer in photo induced CVD film is better than that in PECVD sample. The electrical properties are improved by ultraviolet irradiation on visible light soaked a-Si:H films using photo-CVD light sources, probably due to the fact that UV generates phonons in a-Si:H films and anneal the meta stable defects.

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Magnetic Properties and Crystallization of Co-pt Amorphous Metallic Alloys

  • Yoo, Chung-Sik;Lim, Sung-K.;Yoon, C.S.;Kim, C.K.
    • Journal of Magnetics
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    • v.8 no.3
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    • pp.113-117
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    • 2003
  • $Co_{78-x}Pt_xB_{10}Si_{12}$ alloys were produced using the melt-spin process in order to study the crystallization behavior and ensuing magnetic properties of the $Co_{78-x}Pt_xB_{10}Si_{12}$ (Co-Pt) amorphous alloys as a function of the Pt content. We showed that when $\chi$ $>$ 15 well below its stoichiometric composition, CoPt crystallized in the amorphous alloy, thus greatly altering the crystallized microstructure and magnetic properties during annealing. Below this composition, the main crystallization product was Co with Pt dissolved in its lattice. In spite of the nucleation of CoPt with high magnetic anisotropy, the highest coercivity was obtained when x was 15. It was also concluded that the Pt addition deteriorated the glass stability, triggering the devitrification at a progressively lower temperature.

Effect of SiO2 Buffer Layer Thickness on the Device Reliability of the Amorphous InGaZnO Pseudo-MOS Field Effect Transistor (SiO2 완충층 두께에 따른 비정질 InGaZnO Pseudo-MOS Field Effect Transistor의 신뢰성 평가)

  • Lee, Se-Won;Hwang, Yeong-Hyeon;Cho, Won-Ju
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.1
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    • pp.24-28
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    • 2012
  • In this study, we fabricated an amorphous InGaZnO pseudo-MOS transistor (a-IGZO ${\Psi}$-MOSFET) with a stacked $Si_3N_4/SiO_2$ (NO) gate dielectric and evaluated reliability of the devices with various thicknesses of a $SiO_2$ buffer layer. The roles of a $SiO_2$ buffer layer are improving the interface states and preventing degradation caused by the injection of photo-created holes because of a small valance band offset of amorphous IGZO and $Si_3N_4$. Meanwhile, excellent electrical properties were obtained for a device with 10-nm-thick $SiO_2$ buffer layer of a NO stacked dielectric. The threshold voltage shift of a device, however, was drastically increased because of its thin $SiO_2$ buffer layer which highlighted bias and light-induced hole trapping into the $Si_3N_4$ layer. As a results, the pseudo-MOS transistor with a 20-nm-thick $SiO_2$ buffer layer exhibited improved electrical characteristics and device reliability; field effective mobility(${\mu}_{FE}$) of 12.3 $cm^2/V{\cdot}s$, subthreshold slope (SS) of 148 mV/dec, trap density ($N_t$) of $4.52{\times}1011\;cm^{-2}$, negative bias illumination stress (NBIS) ${\Delta}V_{th}$ of 1.23 V, and negative bias temperature illumination stress (NBTIS) ${\Delta}V_{th}$ of 2.06 V.

Selective Surface Oxidation of 590MPa TRIP Steel and Its Effect on Hot-Dip Galvanizability (590 MPa TRIP강의 선택적 표면산화 거동과 표면 산화막이 도금특성에 미치는 영향)

  • Kim, Seong-Hwan;Im, Jun-Mo;Huh, Joo-Youl;Lee, Suk-Kyu;Park, Rho-Bum;Kim, Jong-Sang
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.281-290
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    • 2011
  • In order to gain better understanding of the selective surface oxidation and its influence on the galvanizability of a transformation-induced plasticity (TRIP) assisted steel containing 1.5 wt.% Si and 1.6 wt.% Mn, a model experiment has been carried out by depositing Si and Mn (each with a nominal thickness of 10 nm) in either monolayers or bilayers on a low-alloy interstitial-free (IF) steel sheet. After intercritical annealing at $800^{\circ}C$ in a $N_2$ ambient with a dew point of $-40^{\circ}C$, the surface scale formed on 590 MPa TRIP steel exhibited a microstructure similar to that of the scale formed on the Mn/Si bilayer-coated IF steel, consisting of $Mn_{2}SiO_{4}$ particles embedded in an amorphous $SiO_{2}$ film. The present study results indicated that, during the intercritical annealing process of 590 MPa TRIP steel, surface segregation of Si occurs first to form an amorphous $SiO_{2}$ film, which in turn accelerates the out-diffusion of Mn to form more stable Mn-Si oxide particles on the steel surface. During hot-dip galvanizing, particulate $Fe_{3}O_{4}$, MnO, and Si-Mn oxides were reduced more readily by Al in a Zn bath than the amorphous $SiO_{2}$ film. Therefore, in order to improve the galvanizability of 590 TRIP steel, it is most desirable to minimize the surface segregation of Si during the intercritical annealing process.

Effect of Annealing Temperature on the Permeability and Magneto-Impedance Behaviors of Fe68.5Mn5Si13.5B9Nb3Cu1 Amorphous Alloy

  • Le Anh-Than;Ha, Nguyen Duy;Kim, Chong-Oh;Rhee, Jang-Roh;Chau Nguyen;Hoa Nguyen Quang;Tho Nguyen Due;Lee, Hee-Bok
    • Journal of Magnetics
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    • v.11 no.1
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    • pp.55-59
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    • 2006
  • The effect of annealing temperature on the permeability and giant magneto-impedance (GMI) behaviors of $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ amorphous alloy has been systematically investigated. The nanocrystalline $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ alloys consisting of ultra-fine $(Fe,Mn)_3Si$ grains embedded in an amorphous matrix were obtained by annealing their precursor alloy at the temperature range from $500^{\circ}C\;to\;600^{\circ}C$ for 1 hour in vacuum. The permeability and GMI profiles were measured as a function of external magnetic field. It was found that the increase of both the permeability and the GMI effect with increasing annealing temperature up to $535^{\circ}C$ was observed and ascribed to the ultrasoft magnetic properties in the sample, whereas an opposite tendency was found when annealed at $600^{\circ}C$ which is due to the microstructural changes caused by high-temperature annealing. The study of temperature dependence on the permeability and GMI effect showed some insights into the nature of the magnetic exchange coupling between nanocrystallized grains through the amorphous boundaries in nanocrystalline magnetic materials.

Magnetic Bias Effects in Field-annealed CoFeSiB Amorphous Ribbons (공기 중에서 자기장 열처리된 CoFeSiB 비정질 리본에서의 자기 바이어스 효과)

  • Cha, Yong-Jun;Jeong, Jong-Ryul;Kim, Cheol-Gi;Kim, Dong-Young;Yoon, Seok-Soo
    • Journal of the Korean Magnetics Society
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    • v.19 no.6
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    • pp.191-196
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    • 2009
  • Magnetic bias phenomena of field-annealed CoFeSiB amorphous ribbons showing asymmetric giant magnetoimpedance was investigated by MOKE method. The specimens removed the crystalline layer at one surface side by chemical etching were prepared and measured magnetization curves by MOKE to investigate the effect of the crystalline layer on magnetization of inner soft amorphous phase. We observed the shift of hysteresis loop, and concluded that the crystalline layer exerts bias field effect on inner soft amorphous phase and the direction of bias filed is opposite to the magnetization direction of surface crystalline layer.

Metal induced crystallization of amorphous silicon using metal solution

  • Yoon, Soo-Young;Oh, Jae-Young;Kim, Chae-Ok;Jang, Jin
    • Journal of the Korean Vacuum Society
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    • v.7 no.s1
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    • pp.123-133
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    • 1998
  • Amorphous silicon (a-Si) was crystallized by metal induced crystallization using metal solution. The a-Si films spin coated with a 50,000 ppm Ni solution were crystallized at as low as $500^{\circ}C$. Needlelike morphology, developed as a result of the migration of $NiSi_2$, precipitates, appears in the MIC poly-Si. The growth of the needlelike crystallites proceeds to a direction parallel to (111). The crystallization temperature can be lowered to $450^{\circ}C$ by Au addition. The enhancement of crystallization results from the decrease of interfacial energy at the NiSi2/Si interface by Au addition.

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The Growth of Low Temperature Polysilicon Thin Films and Application to Polysilicon TFTs (저온 다결정 실리콘 박막의 성장 및 다결정 실리콘 박막트랜지스터에의 응용)

  • 하승호;이진민;박승희;김영호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.11a
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    • pp.64-66
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    • 1993
  • The charateristics of low temperature poly-Si thin films with different growth condition were investigated and poly-Si TFTs were fabricated on solid phase crystallized (SPC) amorphous silicon films and as-deposited poly-Si films. The performance of devices fabricated on the SPC amorphous silicon films was shown to be superior to that of devices fabricated on as-deposited poly-Si films. It was found that the characteristics of low-temperature poly-Si thin films such as surface roughness, crystal texture and grain size strongly influenced the poly-Si TFT performance.

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Synthesis of Graphene Using 3C-SiC Thin Films with Thermal Annealing Conditions (열처리 조건에 따른 3C-SiC 박막을 이용한 그래핀 합성)

  • Kim, Kang-San;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.21 no.5
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    • pp.385-388
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    • 2012
  • This paper describes the synthesis and characterization of graphene by RTA process. Amorphous 3C-SiC were deposited using APCVD for carbon source and Ni layer were employed for transition layer. Various parameters of the ramping speed, the annealing time and the cooling speed are evaluated for the optimized combination allowed for the reproducible fabrication of graphene using 3C-SiC thin film. For analysis of crystalline Raman spectra was employed. Transferred graphene shows a high IG/ID ratio of 2.73. SEM and TEM images show the optical transparency and 6 carbon network, respectively. Au electrode deposited on the transferred graphene shows linear I-V curve and its resistance is 358 ${\Omega}$.

Laser Induced Crystallizatioo of Amorphous Si Films on Glass Substrates (유리 기판을 이용한 비정질 실라콘 박막의 결정화)

  • Kim, P.K.;Moon, S.J.;Jeong, S.H.
    • Laser Solutions
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    • v.13 no.1
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    • pp.6-10
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    • 2010
  • Crystallization of 100 nm thick amorphous silicon (a-Si) films on glass substrates was carried out by using a double laser irradiation method. Depending on a-Si deposition method or glass types, the quality of crystallized silicon film varies significantly. For a-Si films deposited with high concentration of impurities, large grains or high crystallinity can not be achieved. Crystallization with different a-Si deposition methods confirmed that for the polycrystallization of a-Si films on glass substrates, controlling the impurity density during substrate preparation is critical.

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