• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.748-751
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• 1997

The White Beamline of the Pohang Accelerator Laboratory(PAL) consists of main and second slits, a microprobe system, two ion chambers, a video-microscope, and a Si(Li) detector. These machine components must be controlled remotely through computer system to make user experiments precise and speedy. A real-time computer control system was developed to control and monitor these machine components. A VNIEbus computer with OS-9 real-time operating system was used for low-level data acquisition and control. VME I/O modules were used for step motor control and scaler control. The software has modular structure for maximum performance and easy maintenance. We developed database, I/O driver, and control software. We used PC/Window95 for data logging and operator interface. Visual C++ was used graphical user interface programming. RS232C was used for communication between VME and PC.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• Asian Journal of Atmospheric Environment
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• v.5 no.1
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• pp.56-63
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• 2011

Quantifying the solute composition of a cloud droplet (or a whole droplet) is an important task for understanding formation processes and heating/cooling rates. In this study, a combination of droplet fixation and SR-XRF microprobe analysis was used to visualize and quantify elements in a micro-scale droplet. In this study, we report the preliminary outcome of this experiment. A spherical micro-scale droplet was successfully solidified through exposure to ${\alpha}$-cyano-acrylate vapor without affecting its size or shape. An X-ray microprobe system equipped at the beam line 37XU of Super Photon ring 8 GeV (SPring-8) was applied to visualize and quantify the elemental composition in an individual micro-scale droplet. It was possible to reconstruct 2D elemental maps for the K and Cl contained in a microdroplet that was dispensed from the 10-ppm KCl standard solution. Multi-elemental peaks corresponding to X-ray energy were also successfully resolved. Further experiments to determine quantitative measures of elemental mass in individual droplets and high-resolution X-ray microtomography (i.e., 3D elemental distribution) are planned for the future.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.380-386
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• 2001

A nuclear microprobe system with adjustable precision object slits and a magnetic quadrupole doublet was designed by the beam optics simulation using a first order matrix formalism, and installed in a $30^{\circ}$ beam line connected with KIGAM 1.7 MV Tandem VDG Accelerator. Demagnification factors for x and y axis are calculated to be 25 and 4.9, respectively, and a minimum beam spot side is expected to be about 5 $\mu\textrm{m}$ for 3 MeV proton beams with a current of about 1 nA. A multi-purpose octagonal target chamber has been built to facilitate MeV ion-beam analytical techniques of PIXE, RBS, ERDA, and ion beam micro-machining. It contains X-ray and particle detectors, a zoom microscope, a Faraday cup, a 4-axis sample manipulator and a high vacuum pumping system. The system performance of the nuclear microprobe is now being tested, and automatic manipulator control and data acquisition system will be installed for routine applications of micro ion-beam analytical techniques.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.1
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• pp.23-30
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• 2007

We observed the NaCl concentration of solutions using a near-field microwave microprobe(NFMM). Instead of the usual technique, we take advantage of the noncontact evaluation capabilities of a NFMM. A NFMM with a high Q dielectric resonator allows observation of small variations of the permittivity due to changes in the NaCl concentration. The changes of NaCl concentration due to a change of permittivity of the NaCl solution were investigated by measuring the microwave reflection coefficient $S_{11}$ of the resonator. The NaCl sensor consisted of a dielectric resonator coupled to a probe tip at an operating frequency of about f=4 GHz. The change of the NaCl concentration is directly related to the change of the reflection coefficient due to a near field electromagnetic interaction between the probe tip and the NaCl solution. In order to determine the probe selectivity, we measured a mixture solution of NaCl and glucose.

• Journal of the Mineralogical Society of Korea
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• v.8 no.1
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• pp.13-22
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• 1995

Phase relations of the Pd-Sb system were investigated using the sealed-capsule technique; the quenched run products were studied by reflected light microscopy, X-ray diffraction, and electron microprobe analysis. Eight binary phases were confirmed to exist in the system: Pd20Sb7, Pd31Sb12, Pd8Sb3 (mertieite II), Pd5Sb2, Pd2Sb, Pd5Sb3, PdSb (sudburyite), and PdSb2, (unnamed PdSb2), The X-ray powder diffraction data of all the phases, except for Pd5Sb3, however, may be indexable on an orthorhombic cell, space group Cmc2, with a=3.362(1), b=17.484(7), c=6.934(2)$\AA$. Some physical properties as well as re-determined cell parameters are newly established. A revised phase relations of the Pd-Sb system are presented.

• Mass Spectrometry Letters
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• v.7 no.3
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• pp.64-68
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• 2016

Scanning electron microscopy combined with thermal ionization mass spectrometry (SEM-TIMS) was used to determine the precise isotope ratios of ultra-trace levels of uranium contained in individual microparticles. An advanced multiple ion counter system consisting of three secondary ion multipliers and two compact discrete dynodes was used for complete simultaneous ion detection. For verification purposes, using TIMS with complete simultaneous measurement, isotopes were analyzed in 5 pg of uranium of a certified reference material. A microprobe in the SEM was used to transfer individual particles from a NUSIMEP-7 sample to TIMS filaments, which were then subjected to SEM-TIMS and complete simultaneous measurement. The excellent agreement in the resulting uranium isotope ratios with the certified NUSIMEP-7 values shows the validity of SEM-TIMS with complete simultaneous measurement for the analysis of uranium isotopes in individual particles. Further experimental study required for investigation of simultaneous measurement using the advanced multiple ion counter system is presented.

• Transactions of the Korean hydrogen and new energy society
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• v.7 no.1
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• pp.111-115
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• 1996

Metal atom rearrangement has been shown to take place under the influence of hydrogen-induced atomic diffusion (HIAD) in initially homogeneous fee palladiumalloys by electron microprobe analysis, optical microscopy, mechanical property tests and hydrogen isotherms. HIAD takes place in palladium alloys at moderate to elevated temperatures leading to phase segregation under conditions where segregation does not normally occur, i.e., in the absence of H over the time scale of the experiments. From these results, it is confirmed that dissolved hydrogen plays a dual role in some of these alloys, i.e. it catalyzes metal atom diffusion. This research demonstrates the potential utility of employing H-induced changes for phase diagram determination of Pd alloys and possibly for other alloy system.

• Journal of the Mineralogical Society of Korea
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• v.16 no.1
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• pp.1-17
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• 2003

The chemical composition of the arsenopyrite Ib adjoining“triple mutual contact”arsenopyrite + pyrite + hexagonal pyrrhotite may serve as a useful geothermometer in Stage II. In this study it corresponds to temperature T=33$0^{\circ}C$ and f( $S_2$)=10$^{-9.5}$ atm. And the pyrite-hexagonal pyrrhotite buffer curve indicates the probable range of the two variables; T= 315∼345$^{\circ}C$, and f( $S_2$)=10$^{-1}$0.5/∼10$^{-9}$ atm. The present antimony-bearing arsenopyrite (arsenopyrite Ic) is characterized by relatively high content of antimony, ranging from 4.95 to 8.91 percent Sb by weight and excess of iron and deficiency of anions are evident. Such a high antimonian arsenopyrite has never been known within single grain. But being the high content of antimony as in the arsenopyrite Ic, it does not serve as a geothermometer. The results of microprobe analyses for four pairs of asenopyrite and sphalerite in Stage III indicate the temperature range from 310 to 34$0^{\circ}C$, and sulphur fugacity range from 10$^{-10}$ ∼10$^{-9}$ atm. These values seem to correspond with those inferred from the Fe-As-S system.m..