• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
• /
• pp.748-751
• /
• 1997

The White Beamline of the Pohang Accelerator Laboratory(PAL) consists of main and second slits, a microprobe system, two ion chambers, a video-microscope, and a Si(Li) detector. These machine components must be controlled remotely through computer system to make user experiments precise and speedy. A real-time computer control system was developed to control and monitor these machine components. A VNIEbus computer with OS-9 real-time operating system was used for low-level data acquisition and control. VME I/O modules were used for step motor control and scaler control. The software has modular structure for maximum performance and easy maintenance. We developed database, I/O driver, and control software. We used PC/Window95 for data logging and operator interface. Visual C++ was used graphical user interface programming. RS232C was used for communication between VME and PC.

• Transactions on Electrical and Electronic Materials
• /
• 제14권2호
• /
• pp.63-66
• /
• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• Asian Journal of Atmospheric Environment
• /
• 제5권1호
• /
• pp.56-63
• /
• 2011

Quantifying the solute composition of a cloud droplet (or a whole droplet) is an important task for understanding formation processes and heating/cooling rates. In this study, a combination of droplet fixation and SR-XRF microprobe analysis was used to visualize and quantify elements in a micro-scale droplet. In this study, we report the preliminary outcome of this experiment. A spherical micro-scale droplet was successfully solidified through exposure to ${\alpha}$-cyano-acrylate vapor without affecting its size or shape. An X-ray microprobe system equipped at the beam line 37XU of Super Photon ring 8 GeV (SPring-8) was applied to visualize and quantify the elemental composition in an individual micro-scale droplet. It was possible to reconstruct 2D elemental maps for the K and Cl contained in a microdroplet that was dispensed from the 10-ppm KCl standard solution. Multi-elemental peaks corresponding to X-ray energy were also successfully resolved. Further experiments to determine quantitative measures of elemental mass in individual droplets and high-resolution X-ray microtomography (i.e., 3D elemental distribution) are planned for the future.

• 한국진공학회지
• /
• 제10권3호
• /
• pp.380-386
• /
• 2001

정밀가변슬릿과 자기사중극렌즈로 구성된 핵 마이크로프로브 (nuclear microprobe) 시스템을 일차행렬법을 이용한 빔광학 전산모사를 통해 설계하였으며, 제작된 시스템을 KIGAM 1.7 MV 탄뎀 반데그라프 가속기의 $30^{\circ}$ 빔라인에 설치하였다. X 및 Y축에 대한 역배율은 각각 25와 4.9로 계산되며, 3 MeV 양성자빔의 경우 최소 빔크기는 약 5 미크론, 빔전류는 약 1 nA 정도로 추산된다. PIXE, RBS, ERDA등 MeV 이온빔분석법과 이온빔 미세가공을 위해 다목적 8각형 표적함을 제작하였으며, 표적함은 X-선 및 하전입자검출기, 줌현미경, 파라데이컵, 4축 시료이송계 및 고진공계로 구성되어 있다. 현재 핵 마이크로프로브 시스템 성능 조사가 이루어지고 있으며, 자동화된 시료 이송 및 자료 처리 시스템이 설치되면 일상적인 마이크로 이온빔 분석이 가능해 질 것으로 예상된다.

• International Journal of Precision Engineering and Manufacturing
• /
• 제8권2호
• /
• pp.26-31
• /
• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.

• 비파괴검사학회지
• /
• 제27권1호
• /
• pp.23-30
• /
• 2007

본 연구에서는 근접장 마이크로파 현미경을 이용하여 NaCl 용액의 농도검출센서로의 응용 가능성에 대해 알아보았다. 근접장 마이크로파 현미경은 높은 Q 인자를 갖는 유전체 공진기를 이용하여 고감도 특성을 갖는다. 측정과정에저 탐침이 액체 시료표면에 근접했을 때 발생할 수 있는 표면장력의 영향을 피하기 위해 튜닝폭 피드백시스템을 이용하여 탐침과 시료 사이의 거리를 $1{\mu}m$로 유지하였다. 측정은 4GHz에서 이루어졌으며 NaCl 용액의 농도 변화, 농도 및 온도 변화, 부피 변화에 따른 마이크로파 반사계수($S_{11}$)을 관측하여 농도를 측정하였다. 또한 선택적 반응 감도 특성을 알아보기 위하여 NaCl과 글루코스의 혼합용액에서 글루코스의 농도 및 NaCl 용액의 농도를 관측하였다.

• 한국광물학회지
• /
• 제8권1호
• /
• pp.13-22
• /
• 1995

Phase relations of the Pd-Sb system were investigated using the sealed-capsule technique; the quenched run products were studied by reflected light microscopy, X-ray diffraction, and electron microprobe analysis. Eight binary phases were confirmed to exist in the system: Pd20Sb7, Pd31Sb12, Pd8Sb3 (mertieite II), Pd5Sb2, Pd2Sb, Pd5Sb3, PdSb (sudburyite), and PdSb2, (unnamed PdSb2), The X-ray powder diffraction data of all the phases, except for Pd5Sb3, however, may be indexable on an orthorhombic cell, space group Cmc2, with a=3.362(1), b=17.484(7), c=6.934(2)$\AA$. Some physical properties as well as re-determined cell parameters are newly established. A revised phase relations of the Pd-Sb system are presented.

• Mass Spectrometry Letters
• /
• 제7권3호
• /
• pp.64-68
• /
• 2016

Scanning electron microscopy combined with thermal ionization mass spectrometry (SEM-TIMS) was used to determine the precise isotope ratios of ultra-trace levels of uranium contained in individual microparticles. An advanced multiple ion counter system consisting of three secondary ion multipliers and two compact discrete dynodes was used for complete simultaneous ion detection. For verification purposes, using TIMS with complete simultaneous measurement, isotopes were analyzed in 5 pg of uranium of a certified reference material. A microprobe in the SEM was used to transfer individual particles from a NUSIMEP-7 sample to TIMS filaments, which were then subjected to SEM-TIMS and complete simultaneous measurement. The excellent agreement in the resulting uranium isotope ratios with the certified NUSIMEP-7 values shows the validity of SEM-TIMS with complete simultaneous measurement for the analysis of uranium isotopes in individual particles. Further experimental study required for investigation of simultaneous measurement using the advanced multiple ion counter system is presented.

• 한국수소및신에너지학회논문집
• /
• 제7권1호
• /
• pp.111-115
• /
• 1996

Metal atom rearrangement has been shown to take place under the influence of hydrogen-induced atomic diffusion (HIAD) in initially homogeneous fee palladiumalloys by electron microprobe analysis, optical microscopy, mechanical property tests and hydrogen isotherms. HIAD takes place in palladium alloys at moderate to elevated temperatures leading to phase segregation under conditions where segregation does not normally occur, i.e., in the absence of H over the time scale of the experiments. From these results, it is confirmed that dissolved hydrogen plays a dual role in some of these alloys, i.e. it catalyzes metal atom diffusion. This research demonstrates the potential utility of employing H-induced changes for phase diagram determination of Pd alloys and possibly for other alloy system.

• 한국광물학회지
• /
• 제16권1호
• /
• pp.1-17
• /
• 2003

유비철석 + 황철석 + 육방정계 자류철석으로 구성되는“삼종동시접촉”을 수반하는 유비철석의 화학조성은 광화작용의 II단계에서 유용한 지온계를 제공한다. 연구에 따르면 이 지온계는 황분압 f($S_2$)=$10^{-9.5}$ 기압하에서, 지온 T = $330^{\circ}C$에서 형성된 것으로 밝혀졌다. 황철석 -육방정계 자류철석 완충곡선에서는 이 두 변수가 T= $315∼345^{\circ}C$와 f( $S_2$)=$10^{-1}$0.5/∼$10^{-9}$ 기압에 해당됨을 보여 준다. 이지역에서 산출되는 안티모니를 포함하는 자류철석(Ic)는 무게 퍼센트가 4.95∼8.91에 달하는 상대적인 높은 간을 보이며, 철은 과다한 반면 양이온은 결핍되는 현상을 보인다. 자류철석에서 이러한 높은 안티모니 함량은 단일 입자내에서는 처음 알려진 것이다. 이러한 높은 안티모니 함량이 자류철석 Ic를 지온계로서 작용할 수 없게 만들었다. 광화작용 III단계에서의 4쌍의 자류철석과 섬아연석의 전자현미분석 결과는 T : $310∼340^{\circ}C$와 f(S2)=$10^{ }$$∼10^{-9}$ / atm을 보이며, 이 값은 Fe-As-S 계에서 추정된 값과 일치한다...