• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.245-248
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• 1991

Recently, oxide semiconductor gas sensors consisted of n-type semiconductor materials such as $SnO_2$, ZnO and $Fe_2O_3$ have been widely used to detect reducing gases. In this paper, we made the thick-film ZnO gas sensors with $PdCl_2$ as a catalyst and investigated the sensitivity to CO gas. In the thick-film Zno sensor, the highest sensitivity was shown in the sensor with 1wt.% of $PdCl_2$ which was sintered for 1 hour at $700^{\circ}C$ and operated at $300^{\circ}C$.

• 한국전기전자재료학회논문지
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• 제30권4호
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• pp.229-234
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• 2017

In this study, we fabricated a TFT gas sensor with ZnO nanorods grown by hydrothermal synthesis. The suggested devices were compared with the conventional ZnO film-type TFTs in terms of the gas-response properties and the electrical transfer characteristics. The ZnO seed layer is formed by atomic-layer deposition (ALD), and the precursors for the nanorods are zinc nitrate hexahydrate ($Zn(NO_3)_2{\cdot}6H_2O$) and hexamethylenetetramine ($(CH_2)6N_4$). When 15 ppm of NO gas was supplied in a gas chamber at $150^{\circ}C$ to analyze the sensing capability of the suggested devices, the sensitivity (S) was 4.5, showing that the nanorod-type devices respond sensitively to the external environment. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which showed that the oxygen deficiency of ZnO nanorods is higher than that of ZnO film, and confirms that the ZnO nanorod-type TFTs are advantageous for the fabrication of high-performance gas sensors.

• 대한금속재료학회지
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• 제48권2호
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• pp.169-174
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• 2010

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

• 한국표면공학회지
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• 제50권3호
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• pp.225-229
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• 2017

ZnO nanotubes were synthesized to investigate the effect of wall thickness on the ethanol gas sensing performance. The wall thickness of the nanotubes was varied from approximately 20 to 60 nm. Transmission electron microscopy, X-ray diffraction and SAED (Selected Area Electron Beam Diffraction) analyses showed that the synthesized nanotubes were polycrystalline structured ZnO with the diameter of approximately 200-300nm. The ZnO nanotubes sensor with an optimum wall thickness of 51.8nm showed approximately 8 times higher response, compared to that with 21.14nm wall thick nanotubes, to the ethanol concentration of 500 ppm at the temperature of $300^{\circ}C$. The wall thickness of 51.8nm was found to be a little larger than 46nm, which was theoretically derived Debye length. Along with the study of the wall thickness effect on the performance of the sensors, the mechanisms of gas sensing of the polycrystalline ZnO nanotubes are also discussed.

• 센서학회지
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• 제21권3호
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• pp.180-185
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• 2012

${\gamma}$-ray radiolysis was used to functionalize networked ZnO nanowires with Au nanoparticles. The networked ZnO nanowires were prepared through a vapor phase selective growth method. The sensing performances of the Au-functionalized ZnO nanowires were investigated in terms of $NO_2$, CO and benzene gases. The Au-funtionalized ZnO nanowire sensors showed an applicable, reliable capability to detect the gases, indicating their potential in chemical gas sensors.

• Bulletin of the Korean Chemical Society
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• 제32권10호
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• pp.3735-3737
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• 2011

We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their $H_2$ gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to $H_2$ and a detection limit of 70 ppm at $250^{\circ}C$. Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing $H_2$ gas on the surface of ZnO nanorods is proposed.

• 센서학회지
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• 제21권6호
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• pp.446-450
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• 2012

The important factors in sensors are sensitivity, selectivity, and response time. Oxide semiconductors are high sensitivity, fast response and the advantage of miniaturization. Zn-doped $SnO_2$ materials have been synthesized in order to improve the selectivity of the sensor. ZnO/$SnO_2$ crystals were prepared by a simple hydrothermal process and ultrasound pretreated hydrothermal process. ZnO/$SnO_2$ urchins were fabricated in the precursor solution with [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 and rod structures were fabricated ratio of 1:1 and 1:3. Surface area ratio was increased by increasing the ratio of [$Sn^{4+}$]. The sensitivity of sensors were highest at the [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 in ethanol, acetaldehyde, toluene, and nitric oxide.

• 한국진공학회지
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• 제15권5호
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• pp.506-511
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• 2006

$Zn(NO_3)_2{\cdot}6H_2O$, 수산화나트륨, cyclohexylamine, 에탄올, 물이 혼합된 용액을 수열합성하여 ZnO 나노로드를 합성하고, 합성한 물질의 이산화 질소$(NO_2)$와 일산화 탄소(CO)에 대한 감응특성을 조사하였다. 혼합 용액에 첨가되는 물의 양을 변화시켜 ZnO 나노로드의 형상과 응집현상을 조절할 수 있었다. 이는 물과 cyclohexylamine의 반응에 의해 발생되는 $OH^-$ 이온의 농도변화에 의한 것으로 해석된다. 물의 함량이 낮을 때에는 뭉쳐진 성게모양의 ZnO 나노로드를, 물의 함량이 많을 때에는 잘 분산된 ZnO 나노로드를 각각 합성할 수 있었다. 잘 분산된ZnO 나노로드는 공기 중에서 50 ppm 의 CO에 노출되었을 때 주목할 만한 반응을 보이지 않는 반면, 1 ppm 의 $NO_2$에 노출되었을 때에는 저항이 1.8배 증가하였다. 이러한 선택적 반응을 보이는 ZnO 나노로드는 자동차용 자동환기 시스템의 핵심부품인 매연센서의 감응물질로 사용될 수 있다.

• Nuclear Engineering and Technology
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• 제55권7호
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• pp.2373-2379
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• 2023

In sodium systems, leakage is one of the safety concerns; it can cause chemical reactions, which may result in fires. There are contact and non-contact types of leak detectors, and the conventional method of non-contact type detection is by gas sampling. Because of the complexity of this method, there has always been a need for a simple gas sensor, and the resistive-type nanostructure ZnO sensor is a promising option with various advantages. In this study, a ZnO sensor was fabricated, and the concept was tested as a leak detector using a dedicated experiment facility. The experiment results showed distinctive changes in resistance with the presence of sodium aerosol under various conditions. Replacing the conventional gas sampling with the ZnO sensors is expected to enable identification of the leakage location if used as a point-wise instrumentation and to greatly reduce the total cost, making the system simple, light, and effective. For further study, more tests will be performed to evaluate the sensitivity of key parameters under various conditions.

• 한국재료학회지
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• 제25권12호
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• pp.655-658
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• 2015

The development of glucose biosensors has been attracting much attention because of their importance in monitoring glucose in the human body; such sensors are used to diagnose diabetes and related human diseases. Thanks to the high selectivity, sensitivity to glucose detection, and relatively low-cost fabrication of enzyme-immobilized electrochemical glucose sensors, these devices are recognized as one of the most intensively investigated glucose sensor types. In this work, ZnO nanofibers were synthesized using an electrospinning method with polyvinyl alcohol zinc acetate as precursor material. Using the synthesized ZnO nanofibers, we fabricated glucose biosensors in which glucose oxidase was immobilized on the ZnO nanofibers. The sensors were used to detect a wide range of glucose from 10 to 700 M with a sensitivity of $10.01nA/cm^2-{\mu}M$, indicating that the ZnO nanofiber-based glucose sensor can be used for the detection of glucose in the human body. The control of nanograins in terms of the size and crystalline quality of the individual nanofibers is required for improving the glucose-sensing abilities of the nanofibers.