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http://dx.doi.org/10.3365.KJMM.2010.48.02.169

Formaldehyde Gas-Sensing Characteristics of SnO2-ZnO Materials  

Yoon, Jin Ho (Department of Materials Science and Engineering, The University of Seoul)
Lee, Hoi Jung (Department of Materials Science and Engineering, The University of Seoul)
Kim, Jung Sik (Department of Materials Science and Engineering, The University of Seoul)
Publication Information
Korean Journal of Metals and Materials / v.48, no.2, 2010 , pp. 169-174 More about this Journal
Abstract
A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.
Keywords
formaldehyde sensor; nanostructured materials; sol-gel; electrical properties; electrical conductivity/resistivity;
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