• Corrosion Science and Technology
• /
• 제2권3호
• /
• pp.135-140
• /
• 2003

The effect of temperature on stress corrosion cracking o f Al-brass used in vessel heat exchanger tube was studied in 3.5% NaCI + 0.1% $NH_4OH$ solution. The SCC test using a CDT(constant displacement test) and the specimens using a SEN(single edge notched) specimens. For setting the environment similar to working environment of a heat exchanger, the specimens was immersed in solution and solution flow onto the specimens were performed. The results are as follows : The latent time of stress corrosion crack occurrence gets shorter, as the temperature gets higher. Dezincification phase showed around the crack occupy wider range, as the temperature gets higher. Zn composition falls under 4% at the dezincifiction area.

• 반도체디스플레이기술학회지
• /
• 제15권4호
• /
• pp.36-40
• /
• 2016

The 2 wt.% Al-doped ZnO(AZO) thin films were fabricated on PET substrates with various RF power 20, 35, 50, 65, and 80W by using RF magnetron sputtering in order to investigate the structure, electrical and optical properties of AZO thin films in this study. The XRD measurements showed that AZO films exhibit c-axis orientation. At a RF power of 80W, the AZO films showed the highest (002) diffraction peak with a FWHM of 0.42. At a RF power of 65W, the lowest electrical resistivity was about $1.64{\times}[10]$ ^(-4) ${\Omega}-cm$ and the average transmittance of all films including substrates was over 80% in visible range. Good transparence and conducting properties were obtained due to RF power control. The obtained results indicate that it is acceptable for applications as transparent conductive electrodes.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
• /
• pp.61-61
• /
• 2008

이동 통신의 급격한 발전에 따라 이동통신 기기의 부품들이 소형화되고 다양한 기능이 요구되어지고 있다. 이동 통신용 부품은 패턴의 미세화와 비아 수의 증가 등 고집적화로 인한 강도 요구로 LTCC 소재의 사용이 증가되고 있다. 또한 glass의 조성이 결정상 생성 및 복합체의 미세 구조에 영향을 미칠 것으로 기대되지만 유리의 조성에 관한 연구는 아직 미비하다. 본 연구에서는, anorthite를 생성시키는 LTCC composite용 glass에서 융점 및 Tg에 영향을 주는 것으로 알려진 B와 Zn의 양을 변화시키고 2가 금속(Mg, Sr, Ba)원소를 첨가함에 따라 compostite에서 아노사이트 상을 비롯한 결정상의 생성과 이에 따른 미세구조의 변화를 살펴 보았다. 조성변화에 따라 제조된 glass는 Tg를 측정하고, 제조된 glass를 $Al_2O_3$ filler와 혼합하여 tape casting 공정으로 시트를 제작하였다. 제조된 시트를 소결한 후에, 강도, 유전 특성, 밀도를 측정하였다. 소결체는 미세구조와 상분석을 통해 LTCC 소재와 글래스 조성과의 상관관계를 확인하고자 하였다.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.1535-1537
• /
• 2009

High performance resistive type touch panel was fabricated on flexible polyethylene terephthalate (PET) substrates coated with Al- and Ga-codoped ZnO (AGZO) films. The AGZO films were deposited by roll-to-roll direct current magnetron sputter at room temperature. The AGZO thin films on PET substrates showed high transparency (> 85 % at 550 nm) and low sheet resistance (450 ${\Omega}$/sq.). These values were similar to those of commercial ITO films used for resistive type touch panel.

• 반도체디스플레이기술학회지
• /
• 제15권3호
• /
• pp.30-34
• /
• 2016

We investigated magnetic field, discharged voltage, and as-deposited film uniformity at facing targets sputtering (FTS) system with magnetic field type: i) concentrated and ii) distributed magnetic field type. And Al doped ZnO (AZO) films were prepared at two magnetic field type such as concentrated magnetic field type and distributed magnetic field type, respectively. Discharge voltage at the distribution type is lower than concentration type due to low magnetic flux (middle magnetic flux: Concentration 1200 G and Distribution 600 G). The films deposited at the distributed magnetic field were more uniform than concentration type. All of prepared AZO films had a resistivity of under $10^{-4}[{\Omega}{\cdot}cm]$ and a transmittance of more than 85 % in the visible range.

• 한국자기학회:학술대회 개요집
• /
• 한국자기학회 2002년도 동계연구발표회 논문개요집
• /
• pp.11-11
• /
• 2002

Huge applications of soft magnetic films can be expected as integrated passives in the infest IT devices, including CMOS compatible RF integrated inductors and transformers, transmission line devices, electromagnetic noise countermeasure, sensors, etc. A new 1MHz-9GHz permeameter has been completed and clarified the possibility of modern magnetic films for applications in integrated passives. The films evaluated include CoNbZr, CoZro, CoAlPdO, electroplated NiZn(Co) ferrite, etc. (omitted)

• 한국재료학회지
• /
• 제16권6호
• /
• pp.346-350
• /
• 2006

Al-doped ZnO (AZO) thin films were grown on type of glass#1737 substrates by DC magnetron sputtering. The structural, electrical and optical properties of the films were investigated as a function of various plasma discharge power. The obtained films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity was $6.0{\times}10^{-4}{\Omega}cm$ with the carrier concentration of $2.69{\times}10^{20}cm^{-3}$ and Hall mobility of 20.43 $cm^2/Vs$. The average transmittance in the visible range was above 90%.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
• /
• pp.1859-1861
• /
• 2005

The ZnO:Al thin films were prepared on glass by Facing Target Sputtering (FTS) system. We investigated electrical, optical, and structural properties of AZO thin film with sputtering current $0.1[A]{\sim}0.6[A]$. We obtained the lowest resistivity $2.3{\times}10^{-4}[{\Omega}-cm]$ at sputtering current 0.6[A] from the 4-point probe and the strong (002) peak at sputtering current 0.3[A] from the X-ray Diffractometer (XRD ). The optical transmittance of AZO thin films show a very high transmittance of $80{\sim}95%$ in the visible range and exhibit the absorption edge of about 350nm.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.223-223
• /
• 2010

본 연구에서는 Al-doped ZnO (AZO) 박막을 linear facing target sputter (LFTS) 시스템을 이용하여 성막 하였고 박막의 특성을 분석하였다. LFTS 시스템은 마주보는 두 AZO 타겟 사이에 고밀도의 플라즈마를 구속시켜 플라즈마 데미지 없이 산화물 박막을 성막 시킬 수 있는 장치이다. LFTS로 성막된 AZO 박막의 인가된 DC 파워에 따른 전기적 특성을 분석하기 위해 four-point probe와 Hall measurement 장비를 이용하여 분석을 진행 하였으며, 광학적 특성 분석을 위해 UV/Vis spectrometer 장비를 이용하여 분석하였다. AZO 박막의 구조적, 표면적 특성을 분석하기 위해 X-ray diffraction(XRD) 및 scanning electron microscope(SEM)을 사용하여 상온에서 성막된 AZO 박막의 특성을 관찰 하였다. 또한 AZO 박막의 PET 기판과의 접합성 및 구부림 시의 안정성을 평가하기 위해 bending test를 진행 하였다. 최적화된 AZO 박막으로부터 기판에 성막 중 열처리공정이나 후 열처리 공정의 진행 없이 35 ohm/square의 낮은 면저항과 약 80 % 이상의 투과율을 얻을 수 있었다. LFTS 시스템을 이용하여 낮은 공정온도에서 AZO 박막을 성막 하였음에도 불구하고 낮은 저항과 높은 투과도 특성을 나타내고 있어 기존의 투명 박막을 대체 할 수 있는 가능성을 제시하였다

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
• /
• pp.93-96
• /
• 2005

In this study, AZO(ZnO:Al) thin film were Prepared by FTS(Facing Target Sputtering) system. The electrical, optical properties and crystalline of AZO thin film with thickness have been investigated. The thickness, transmittance, crystalline and electrical Properties of AZO thin film were measured by $\alpha$-step, UV-VIS spectrometer, hall effect measurement system, XRD and four-point probe, respectively. As a result, AZO thin film deposited with the transmittance over $80\%$ and the resistivity about $10^{-4}{\Omega}-cm$.