Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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투명전극용 AZO 박막의 막 두께 의존성

  • 조범진 (경원대학교 전기전자공학과) ;
  • 금민종 (경원대학교 전기전자공학과) ;
  • 서화일 (한국기술교육대학교 정보기술 공학부) ;
  • 김광선 (한국기술교육대학교 메카트로닉스 공학부) ;
  • 김경환 (경원대학교 전기전자공학과)
  • Published : 2005.09.01
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Abstract

In this study, AZO(ZnO:Al) thin film were Prepared by FTS(Facing Target Sputtering) system. The electrical, optical properties and crystalline of AZO thin film with thickness have been investigated. The thickness, transmittance, crystalline and electrical Properties of AZO thin film were measured by $\alpha$-step, UV-VIS spectrometer, hall effect measurement system, XRD and four-point probe, respectively. As a result, AZO thin film deposited with the transmittance over $80\%$ and the resistivity about $10^{-4}{\Omega}-cm$.

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