• 제목/요약/키워드: ZnO(Zinc Oxide)

검색결과 773건 처리시간 0.025초

The Dry Etching Properties of ZnO Thin Film in Cl2/BCl3/Ar Plasma

  • Woo, Jong-Chang;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
    • /
    • 제11권3호
    • /
    • pp.116-119
    • /
    • 2010
  • The etching characteristics of zinc oxide (ZnO) were investigated, including the etch rate and the selectivity of ZnO in a $Cl_2/BCl_3$/Ar plasma. It was found that the ZnO etch rate, the RF power, and the gas pressure showed non-monotonic behaviors with an increasing Cl2 fraction in the $Cl_2/BCl_3$/Ar plasma, a gas mixture of $Cl_2$(3 sccm)/$BCl_3$(16 sccm)/Ar (4 sccm) resulted in a maximum ZnO etch rate of 53 nm/min and a maximum etch selectivity of 0.89 for ZnO/$SiO_2$. We used atomic force microscopy to determine the roughness of the surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the plasmas. Due to the relatively low volatility of the by-products formed during etching with $Cl_2/BCl_3$/Ar plasma, ion bombardment and physical sputtering were required to obtain the high ZnO etch rate. The chemical states of the etched surfaces were investigated using X-ray photoelectron spectroscopy (XPS). This data suggested that the ZnO etch mechanism was due to ion enhanced chemical etching.

Zinc Oxide 합성에 의한 p-aramid 섬유의 내광성 증진 (Synthesis of Zinc Oxide by a light resistance enhancement of p-aramid fibers)

  • 이지민;김민지;김삼수
    • 한국염색가공학회:학술대회논문집
    • /
    • 한국염색가공학회 2012년도 제46차 학술발표회
    • /
    • pp.58-58
    • /
    • 2012
  • 산소와 아연의 화합물인 산화아연은 UVA, UVB 산란효과가 있는 논케미컬 자외선 차단 성분으로 물, 알코올에는 녹지 않지만 산, 알칼리, 암모니아수 등에는 녹는다. 자외선을 방지하며 입자경은 500nm전후이다. 굴절률은1.9~2.0으로 내광성, 내건성, 내열성이 커서 햇빛이나 다른 자극으로 보호막을 형성하며 수렴, 방부, 항균작용을 한다. 이러한 특징을 띄는 금속산화물 산화아연을 내광성이 약한 p-aramid섬유에 코팅해 내광성 증진을 나타내려한다. 이에 따라 본 실험에서는 암모니아수와 Zinc acetate로부터 sol-gel 합성법에 따른 ZnO 합성 실험을 수행하였다. 반응물 농도에 따른 ZnO 입자의 형상과 입자 분포를 통해 결정크기를 알아보았다. 결과 분석을 위하여 X-ray 회절분석(XRD)를 이용해 ZnO입자의 결정성을 분석하였고, 패턴의 형상과 결정크기를 전계방출형 투과전자현미경(FE-TEM)을 통해 관찰하였다.

  • PDF

Fabrication of ZnO Nanostructures with Various Growth Conditions by Vapor Phase Transport

  • Kim, So-A-Ram;Nam, Gi-Woong;Kim, Min-Su;Yim, Kwang-Gug;Kim, Do-Yeob; Leem, Jae-Youn
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
    • /
    • pp.250-250
    • /
    • 2011
  • Zinc oxide (ZnO) structures have great potential in many applications. Currently, the most commonly used method to grow ZnO nanostructres are the vapor transport method (VPT). The morphology of the ZnO structures largely related to the growth conditions, including growth temperature, distance between the substrate and source, and gas ambient. Previously ZnO nanosturecutres with high crystallinity were obtained at the growth temperature of 800$^{\circ}C$, in the argon and oxygen gas ambient. In this study, we report the properties of the ZnO nanostructures, which were synthesized on Au-catalyzed Si substrate by VPT, using a mixture of ZnO and graphite powders as source material under the different condition, including gas ratio of argon/oxygen and distance between substrate and source at the growth temperature of 800$^{\circ}C$. The structural and optical properties of the ZnO nanostructures were investigated by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and photoluminescence (PL).

  • PDF

Annealing effects on the characteristics of Sputtered ZnO films for ZnO-based thin-film transistors

  • Park, Yong-Seob;Kim, Han-Ki
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.112-112
    • /
    • 2010
  • Zinc Oxide (ZnO) thin-films were deposited according to the magnetron sputtering method. The deposited ZnO films were annealed with RTA equipment at various annealing temperatures in an vacuum ambient. The influence of the annealing temperature on the structural, electrical, and optical properties of the ZnO films was experimentally investigated, and the effect of conductivity of the ZnO active layer on the device performance of the oxide-TFT was tested. As a result, an increase of the annealing temperature was attributed to improvements of crystallinity in ZnO films. The grain size was found to lead to an increase of conductivity in the ZnO films. Fabricated ZnO TFTs with annealed ZnO active layer provided good performance in the TFT devices. Consequently, the performance of the TFT was determined by the conductivity of the ZnO film, which was related to the structural properties of the ZnO film.

  • PDF

Methane Gas Sensing Properties of the Zinc Oxide Nanowhisker-derived Gas Sensor

  • Moon, Hyung-Sin;Kim, Sung-Eun;Choi, Woo-Chang
    • Transactions on Electrical and Electronic Materials
    • /
    • 제13권2호
    • /
    • pp.106-109
    • /
    • 2012
  • A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.

Biological effects of zinc oxide nanoparticles on inflammation

  • Kim, Min-Ho
    • 셀메드
    • /
    • 제6권4호
    • /
    • pp.23.1-23.6
    • /
    • 2016
  • With the rapid developments in nanotechnology, an increasing number of nanomaterials have been applied in various aspects of our lives. Recently, pharmaceutical nanotechnology with numerous advantages has growingly attracted the attention of many researchers. Zinc oxide nanoparticles (ZnO-NPs) are nanomaterials that are widely used in many fields including diagnostics, therapeutics, drug-delivery systems, electronics, cosmetics, sunscreens, coatings, ceramic products, paints, and food additives, due to their magnetic, catalytic, semiconducting, anti-cancer, anti-bacterial, anti-inflammatory, ultraviolet-protective, and binding properties. The present review focused on the recent research works concerning role of ZnO-NP on inflammation. Several studies have reported that ZnO-NP induces inflammatory reaction through the generation of reactive oxygen species by oxidative stress and production of inflammatory cytokines by activation of nuclear factor-${\kappa}B$ ($NF-{\kappa}B$). Meanwhile, other researchers reported that ZnO-NP exhibits an anti-inflammatory effect by inhibiting the up-regulation of inflammatory cytokines and the activation of $NF-{\kappa}B$, caspase-1, $I{\kappa}B$ $kinase{\beta}$, receptor interacting protein2, and extracellular signal-regulated kinase. Previous studies reported that size and shape of nanoparticles, surfactants used for nanoparticles protection, medium, and experimental conditions can also affect cellular signal pathway. This review indicated that the anti-inflammatory effectiveness of ZnO-NP was determined by the nanoparticle size as well as various experimental conditions. Therefore, the author suggests that pharmaceutical therapy with the ZnO-NP is one of the possible strategies to overcome the inflammatory reactions. However, further studies should be performed to maximize the anti-inflammatory effect of ZnO-NP to apply as a potential agent in biomedical applications.

Experimental study for ZnO nanofibers effect on the smart and mechanical properties of concrete

  • Arbabi, Amir;Kolahchi, Reza;Bidgoli, Mahmood Rabani
    • Smart Structures and Systems
    • /
    • 제25권1호
    • /
    • pp.97-104
    • /
    • 2020
  • Due to the superior properties of nanoparticles, using them has been increased in concrete production technology. In this study, the effect of zinc oxide (ZnO) nanoparticles on the mechanical and smart properties of concrete was studied. At the first, the ZnO nanoparticles are dispersed in water using shaker, magnetic stirrer and ultrasonic devices. The nanoparticles with 3.5, 0.25, 0.75, and 1.0 volume percent are added to the concrete mixture and replaced by the appropriate amount of cement to compare with the control sample without any additives. In order to study the mechanical and smart properties of the concrete, the cubic samples for determining the compressive strength and cylindrical samples for determining tensile strength with different amounts of ZnO nanoparticles are produced and tested. The most important finding of this paper is about the smartness of the concrete due to the piezoelectric properties of the ZnO nanoparticles. In other words, the concrete in this study can produce the voltage when subjected to mechanical load and vice versa it can induce the mechanical displacement when subjected to external voltage. The experimental results show that the best volume percent for ZnO nanoparticles in 28-day samples is 0.5%. In other words, adding 0.5% ZnO nanoparticles to the concrete instead of cement leads to increases of 18.70% and 3.77% in the compressive and tensile strengths, respectively. In addition, it shows the best direct and reverse piezoelectric properties. It is also worth to mention that adding 3.5% zinc oxide nanoparticles, the setting of cement is stopped in the concrete mixture.

전착법에 의한 ZnO 박막의 결정구조 및 광흡수 특성 (Crystal Structure and Optical Absorption of ZnO Thin Films Grown by Electrodeposition)

  • 최춘태;서정남
    • 센서학회지
    • /
    • 제9권6호
    • /
    • pp.455-460
    • /
    • 2000
  • 질산 아연, $Zn(NO_3)_2$, 수용액 속에서 전착에 의해 ITO 유리기판에 ZnO 박막을 성장하였다. 성장 매개 변수로 용액농도, 성장온도, 및 전착 전위를 선택하였으며, 성장된 박막은 SEM사진과 XRD 및 광흡수 계수 측정을 통해 연구되었다. 성장된 ZnO 박막은 육방정계 wurtzite 구조를 가지며, 질산아연 수용액농도가 0.1mol/liter, 성장온도 $60^{\circ}C$ 및 Ag/AgCl 기준전극에 대한 전위 -0.7V인 조건에서 양질의 ZnO 박막이 성장되었다.

  • PDF

Enhanced alizarin removal from aqueous solutions using zinc Oxide/Nickel Oxide nano-composite

  • Basma E. Jasim;Ali J. A. Al-Sarray;Rasha M. Dadoosh
    • 분석과학
    • /
    • 제37권1호
    • /
    • pp.39-46
    • /
    • 2024
  • Alizarin dye, a persistent and hazardous contaminant in aquatic environments, presents a pressing environmental concern. In the quest for efficient removal methods, adsorption has emerged as a versatile and sustainable approach. This study focuses on the development and application of Zinc Oxide/Nickel Oxide (ZnO/NiO) nano-composites as adsorbents for alizarin dye removal. These semiconducting metal oxide nano-composites exhibit synergistic properties, offering enhanced adsorption capabilities. Key parameters affecting alizarin removal, such as contact time, adsorbent dosage, pH, and temperature, were systematically investigated. Notably, the ZnO/NiO nano-composite demonstrated superior performance, with a maximum alizarin removal percentage of 76.9 % at pH 6. The adsorption process followed a monolayer pattern, as suggested by the Langmuir model. The pseudo-second-order kinetics model provided a good fit to the experimental data. Thermodynamic analysis indicated that the process is endothermic and thermodynamically favorable. These findings underscore the potential of ZnO/NiO nano-composites as effective and sustainable adsorbents for alizarin dye removal, with promising applications in wastewater treatment and environmental remediation.

산화아연 현탁액에 의한 타르색소의 광분해 (Photodecomposition of Tar Colorant With Zinc Oxide Suspension)

  • 정갑섭
    • 한국환경과학회지
    • /
    • 제15권12호
    • /
    • pp.1155-1161
    • /
    • 2006
  • The characteristics of photocatalytic degradation of tar colorants such as brilliant blue FCF(BBF) and tartrazine(TTZ) with zinc oxide suspension was studied in a batch reactor under irradiation of ultra-violet ray. Photocatalytic degradation of TTZ with ZnO was more higher than that of BBF, and was Increased with dosage of ZnO below 5g, but was nearly affected with initial pH of two tar colorants aqueous solution. Ammonium persulfate was more effective oxidant than potassium bromate which slightly increased the degradation of BBF, but not increased the degradation of TTZ. The photocatalytic degradation rates of BBF and TTZ were pseudo-first order with rate constants of 0.0066, 0.0092 and $0.015min^{-1}$ for BBF, 0.042, 0.017 and $0.110min^{-1}$ for TTZ at the dosage of 1, 2 and 5g ZnO, respectively.