• Tribology and Lubricants
• /
• 제31권6호
• /
• pp.239-244
• /
• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Mycobiology
• /
• 제32권4호
• /
• pp.173-178
• /
• 2004

Fifteen Rhizobium spp. from nodules of 6 common pulses collected from 6 districts of Assam were studied for their infectivity, intrinsic antibiotic resistance, nitrogenase activity and effect of dual inoculation with two native Arbuscular Mycorrhizal Fungi viz. Glomus mosseae(GM) and Gigaspora gilmarie(GG). Out of the 15 isolates 9 were found nodulation positive and 6 of them(AR1, BR8, BR12, AR10, UR10 & GR21) were subjected to intrinsic antibiotic sensitivity test of which AR1 showed resistance against all the 9 test antibiotics. Isolates AR1 and GR21 showed the highest(4.25 mole, $gm^{-1}hour^{-1}$) and the lowest(1.05 mole, $gm^{-1}hour^{-1}$) nitrogenase activity respectively. In Most Probable Number count, the maximum Rhizobium population $5.8{\times}10^5$, was found in both Blackgram and Greengram variety of pulses. The maximum dry weight of nodules(3.14 g), dry weight of shoot(10.08 g), nitrogen content(7.68 mg, $plant^{-1}$), chlorophyll content(1.89 mg, $g^{-1}$), phosphorus content of shoot(6.17 mg, $g^{-1}$) and yield(535.67 kg, $Ha^{-1}$) were found when AR1 dually inoculated with GM in Blackgram.

• 신재생에너지
• /
• 제5권4호
• /
• pp.21-27
• /
• 2009

Potential yield of micro wind turbine on the roof of urban high rise buildings is estimated. Urban wind profile is modeled as logarithmic profile above the mean building height with roughness length 0.8, displacement 7.5 m. Mean wind velocity from the meteorological agency data at the hight of 50m is used. Wind velocity changes are simulated on the rectangular roof of 26, 45, 53 degree pitch and the circular roof by computational fluid dynamics and RNG k-$\varepsilon$ turbulence models. Wind velocity increased approximately by a factor of the order of 270 % on the 26 degree pitched roof. In the 100 m and 200 m high buildings, wind enhancement is greater at the front side than at the center of the building. In the building arrangement model wind velocity changes abruptly and it becomes wind gusts. When commercial wind turbines are installed on the building roof, average power and annual power generation enhanced by 3~4 times than normal wind velocity at 50m and 6 kw wind turbine can generate 1053 kwh per month on the 26 degree pitched roof at 50m height and sufficiently supply electrical power with 15 household for common electrical use and food waste disposer. However, power output will vary significantly by the wind conditions in the order of $\pm$ 20 %.

• 산업식품공학
• /
• 제15권4호
• /
• pp.355-361
• /
• 2011

고 함량 이소플라본 생산을 위한 대두의 침지, 발아조건 및 청국장 발효 최적조건을 찾기 위해 반응표면분석법을 사용하였다. 대두의 침지와 발아조건은 대두를 25.6$^{\circ}C$에서 7 hr 침지 후 29.1$^{\circ}C$에서 42.4 hr 발아 시 이소플라본 함량이 가장 높게 측정이 되었다. 또한 고함량 이소플라본을 얻기위한 청국장 발효 최적 조건은 온도 39.96$^{\circ}C$, 접종량 1.32%, 42.4 hr 이었다. 최적조건에서의 이소플라본 함량은 2,544 ppm으로 대조구(1,960 ppm)보다 약 1.3 배 향상되었다.

• Steel and Composite Structures
• /
• 제32권2호
• /
• pp.199-212
• /
• 2019

This paper presents an investigation on seismic behavior of out-of-code Q690 circular high-strength concrete-filled thin-walled steel tubular (HCFTST) columns made up of high-strength (HS) steel tubes (yield strength $f_y{\geq}690MPa$). Eight Q690 circular HCFTST columns with various diameter-to-thickness (D/t) ratios, concrete cylinder compressive strengths ($f_c$) and axial compression ratios (n) were tested under the constant axial loading and reversed cyclic lateral loading. The obtained lateral load-displacement hysteretic curves, energy dissipation, skeleton curves and ductility, and stiffness degradation were analyzed in detail to reflect the influences of tested parameters. Subsequently, a simplified shear strength model was derived and validated by the test results. Finally, a finite element analysis (FEA) model incorporating a stress triaxiality dependent fracture criterion was established to simulate the seismic behavior. The systematic investigation indicates the following: compared to the D/t ratio and axial compression ratio, improving the concrete compressive strength (e.g., the HS thin-walled steel tube filled with HS concrete) had a slight influence on the ductility but an obvious enhancement of energy dissipation and peak load; the simplified shear strength model based on truss mechanism accurately predicted the shear-resisting capacity; and the established FEA model incorporating steel fracture criterion simulated well the seismic behavior (e.g., hysteretic curve, local buckling and fracture), which can be applied to the seismic analysis and design of Q690 circular HCFTST columns.

• Structural Engineering and Mechanics
• /
• 제76권6호
• /
• pp.737-749
• /
• 2020

A hybrid bridge deck is proposed, which includes steel bars, concrete and glass-fiber-reinforced-polymer (GFRP) plates with channel sections. The steel bar in the negative moment region can increase the flexural stiffness, improve the ductility, and reduce the GFRP ratio. Three continuous decks with different steel bar ratios and a simply supported deck were fabricated and tested to study the mechanical performance. The failure mode, deflection, strain distribution, cracks and support reaction were tested and discussed. The steel bar improves the mechanical performance of continuous decks, and a theoretical method is proposed to predict the deformation and the shear capacity. The experimental results show that all specimens failed with shear failure in the positive moment region. The increase of steel bar ratio in the negative moment region can achieve an enhancement in the flexural stiffness and reduce the deflection without increasing GFRP. Moreover, the continuous deck can achieve a yield load, and the negative moment can be carried by GFRP plates after the steel bar yields. Finally, a nonlinear analytical method for the deflection calculation was proposed and verified, with considering the moment redistribution, non-cracked sections and nonlinearity of material. In addition, a simplified calculation method was proposed to predict the shear capacity of GFRP-concrete decks.

• Advances in concrete construction
• /
• 제11권2호
• /
• pp.111-126
• /
• 2021

Concrete cracking due to brittle tension strength significantly prevents fully utilization of the materials for "flexural-shear failure" type shear walls. Theoretical and experimental studies applying fiber reinforced concrete (FRC) have achieved fruitful results in improving the seismic performance of "flexural-shear failure" reinforced concrete shear walls. To come to an understanding of an optimal design strategy and find common performance prediction method for design methodology in terms to FRC shear walls, seismic performance on shear walls with PVA and steel FRC at edge columns and plastic region are compared in this study. The seismic behavior including damage mode, lateral bearing capacity, deformation capacity, and energy dissipation capacity are analyzed on different fiber reinforcing strategies. The experimental comparison realized that the lateral strength and deformation capacity are significantly improved for the shear walls with PVA and steel FRC in the plastic region and PVA FRC in the edge columns; PVA FRC improves both in tensile crack prevention and shear tolerance while steel FRC shows enhancement mainly in shear resistance. Moreover, the tensile strength of the FRC are suggested to be considered, and the steel bars in the tension edge reaches the ultimate strength for the confinement of the FRC in the yield and maximum lateral bearing capacity prediction comparing with the model specified in provisions.

• Smart Structures and Systems
• /
• 제32권2호
• /
• pp.123-133
• /
• 2023

This paper proposes a thermography-based coating thickness estimation method for steel structures using model-agnostic meta-learning. In the proposed method, a halogen lamp generates heat energy on the coating surface of a steel structure, and the resulting heat responses are measured using an infrared (IR) camera. The measured heat responses are then analyzed using model-agnostic meta-learning to estimate the coating thickness, which is visualized throughout the inspection surface of the steel structure. Current coating thickness estimation methods rely on point measurement and their inspection area is limited to a single point, whereas the proposed method can inspect a larger area with higher accuracy. In contrast to previous ANN-based methods, which require a large amount of data for training and validation, the proposed method can estimate the coating thickness using only 10- pixel points for each material. In addition, the proposed model has broader applicability than previous methods, allowing it to be applied to various materials after meta-training. The performance of the proposed method was validated using laboratory-scale and field tests with different coating materials; the results demonstrated that the error of the proposed method was less than 5% when estimating coating thicknesses ranging from 40 to 500 ㎛.

• 한국전기전자재료학회논문지
• /
• 제37권2호
• /
• pp.148-153
• /
• 2024

As complementary metal-oxide semiconductor (CMOS) is scaled down to achieve higher chip density, thin-film layers have been deposited iteratively. The poor film uniformity resulting from deposition or chemical mechanical planarization (CMP) significantly affects chip yield. Therefore, the development of novel fabrication processes to enhance film uniformity is required. In this context, high-pressure deuterium annealing (HPDA) is proposed to reduce the surface roughness resulting from the CMP. The HPDA is carried out in a diluted deuterium atmosphere to achieve cost-effectiveness while maintaining high pressure. To confirm the effectiveness of HPDA, time-of-flight secondary-ion mass spectrometry (ToF-SIMS) and atomic force microscopy (AFM) are employed. It is confirmed that the absorbed deuterium gas facilitates the diffusion of silicon atoms, thereby reducing surface roughness.

• Clinical Endoscopy
• /
• 제56권6호
• /
• pp.681-692
• /
• 2023

In general, gastroesophageal reflux disease (GERD) is diagnosed clinically based on typical symptoms and/or response to proton pump inhibitor treatment. Upper gastrointestinal endoscopy is reserved for patients presenting with alarm symptoms, such as dysphagia, odynophagia, significant weight loss, gastrointestinal bleeding, or anorexia; those who meet the criteria for Barrett's esophagus screening; those who report a lack or partial response to proton pump inhibitor treatment; and those with prior endoscopic or surgical anti-reflux interventions. Newer endoscopic techniques are primarily used to increase diagnostic yield and provide an alternative to medical or surgical treatment for GERD. The available endoscopic modalities for the diagnosis of GERD include conventional endoscopy with white-light imaging, high-resolution and high-magnification endoscopy, chromoendoscopy, image-enhanced endoscopy (narrow-band imaging, I- SCAN, flexible spectral imaging color enhancement, blue laser imaging, and linked color imaging), and confocal laser endomicroscopy. Endoscopic techniques for treating GERD include esophageal radiofrequency energy delivery/Stretta procedure, transoral incisionless fundoplication, and endoscopic full-thickness plication. Other novel techniques include anti-reflux mucosectomy, peroral endoscopic cardiac constriction, endoscopic submucosal dissection, and endoscopic band ligation. Currently, many of the new endoscopic techniques are not widely available, and their use is limited to centers of excellence.