• Title/Summary/Keyword: Xps

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The study of Grain boundary diffusion effect in Tin/Cu by Xps (XPS를 이용한 TiN/Cu의 Grain boundary diffusion 연구)

  • 임관용;이연승;정용덕;이경민;황정남;최범식;원정연;강희재
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.112-117
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    • 1998
  • TiN has been investigated as a good candidate for a diffusion barrier of Cu. Therefore, in this study, the grain boundary diffusion of Cu in TiN film was investigated by X-ray photoelectron spectroscopy(XPS). In general, TiN has a columnar grain structure. In the relatively lower temperature, less than 1/3 of the melting point, it was observed that Cu diffused into TiN mainly along the grain boundaries of TiN. The grain size of TiN was measured by atomic force microscope (AFM). In order to estimate the grain boundary diffusion constants, we used the modified surface accumulation method. The activation energy, $Q_b$ was 0.23 eV, and the diffusivity, $D_{bo}$ was $5.5\times10^{-12{\textrm{cm}^2$/sec.

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Study on Evaluation of Degrease Performance on the Interface between Oil and Alloy (탈지 정도에 대한 방청유-금속 계면의 영향성 평가)

  • Choi, Wonyoung;Kim, Moonsu;Yoo, Hyeonseok;Song, Yeongyun;Jeong, Yong-Gyun;Choi, Jinsub
    • Journal of Surface Science and Engineering
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    • v.54 no.6
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    • pp.371-379
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    • 2021
  • The use of anti-corrosive oil (AC) is inevitable for production of industrial steels to prevent corrosion. The AC is degreased before application of steels, which crucially effects on final products, such as automobile, electricity etc. However, qualitative/quantitative evaluation of degreasing performance are steal insufficient. In this study, degreasing performance of anti-corrosive oil on steel have been studied through X-ray photon spectroscopy (XPS) and electrochemical impedance spectroscopy (EIS). Commercial automotive steels (AMS) are coated with 4 different anti-corrosive oils (namely AC1-AC4). In XPS, intensity of C1s peak remained after degreasing indirectly indicates incomplete degreasing. Thus, higher C1s peak intensity means less effective degreasing by degreasing agent. peak intensity of C1s peak shows opposite tendency of peak intensity of O1s. We found that EIS analysis is not applicable to mild steel (such as AMS1) due to corrosion during measurement. However, alloy steel can be fully analyzed by EIS and XPS depth profile.

Effect of Oxygen Incorporation in the Fabrication of TiN Thin Film for Frame by UBM Sputtering System (UBM Sputtering System에 의한 안경테용 TiN막 제작에 있어 Oxygen 영향 연구)

  • Park, Moon Chan;Lee, Jong Geun;Joo, Kyung Bok;Lee, Wha Ja;Kim, Eung Soon;Choi, Kwang Ho
    • Journal of Korean Ophthalmic Optics Society
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    • v.14 no.1
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    • pp.63-68
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    • 2009
  • Purpose: TiN films were deposited on sus304 by unbalanced magnetron sputtering system which was designed and developed as unbalancing the strength of the magnets in the magnetron electrode. The effect of oxygen incorporation in the fabrication of deposited films was investigated. Methods: The cross sections of deposited films on Silicon wafer were observed by SEM to measure the thickness of the films, the components of the surface of the films were identified by XPS survey spectra, the compositional depth-profile of deposited films was examined by an XPS apparatus. Results: From the data of XPS depth profile of films, it could be seen that the element O as well as the elements Ti and N present in the surface of the film and the relative percentage of the element O was constant at 65 at.% with respect to the depth of film. Conclusions: The color change with thickness of the films had something to do with the change of Ti $ 2p_{3/2}$ peak intensity and shape mixed of $ TiO_2$, TiN, $ TiO_{x}N_{y}$ compound.

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The Study of Color and Hardness of TiN Thin Film by UBM Sputtering System (UBM Sputtering System에 의한 TiN막의 색상과 경도에 관한 연구)

  • Park, Moon Chan;Lee, Jong Geun;Joo, Kyung Bok
    • Journal of Korean Ophthalmic Optics Society
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    • v.14 no.1
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    • pp.57-62
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    • 2009
  • Purpose: TiN films were deposited on sus304 by unbalanced magnetron sputtering system which was designed and developed as unbalancing the strength of the magnets in the magnetron electrode. The color and hardness of deposited TiN films was investigated. Methods: The cross sections of deposited films on silicon wafer were observed by SEM to measure the thickness of the films, the components of the surface of the films were identified by XPS, the components of the inner parts of the films were observed by XPS depth profiling. XPS high resolution scans and curve fittings of deposited films were performed for quantitative chemical analysis, Vickers micro hardness measurements of deposited films were performed with a nano indenter equipment. Results: The colors of deposited films gradually changed from light gold to dark gold, light violet, and indigo color with increasing of the thickness. It could be seen that the color change come from the composite change of three compound,$TiO_{x}N_{y}$, $TiO_2$, TiN. Especially, the composite change of$TiO_{x}N_{y}$ compound was thought to affect the color change with respect to thickness. Conclusions: Deposited films had lower than the value of general TiN film in Vickers hardness, which was caused by mixing three TiN, $TiO_2$,$TiO_{x}N_{y}$ compound in the deposited films. The increasing and decreasing of micro hardness with respect to thickness was thought to have something to do with the composite of TiN in the films.

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Photoelectron Spectroscopy Study of the Semiconductor Electrode Nanomaterials for the Dye Synthesized Solar Cell (염료감응 태양전지 전극용 반도체 나노 물질의 광전자분광 연구)

  • Kim, Hyun Woo;Lee, Eunsook;Kim, D.H.;Seong, Seungho;Kang, J.-S.;Moon, S.Y.;Shin, Yuju
    • Journal of the Korean Magnetics Society
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    • v.25 no.5
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    • pp.156-161
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    • 2015
  • The electronic structures of the potential candidate semiconductor nanoparticles for dye-sensitized solar cell (DSSC), such as $ZnSnO_3$ and $Zn_2SnO_4$, have been investigated by employing X-ray photoemission spectroscopy (XPS). The measured X-ray diffraction patterns show that $ZnSnO_3$ and $Zn_2SnO_4$ samples have the single-phase ilmenite-type structure and the inverse spinel structure, respectively. The measured Zn 2p and Sn 3d core-level XPS spectra reveal that the valence states of Zn and Sn ions are divalent (Zn 2+) and tetravalent (Sn 4+), respectively, in both $ZnSnO_3$ and $Zn_2SnO_4$. On the other hand, the shallow core-level measurements show that the binding energies of Sn 4d and Zn 3d core levels in $ZnSnO_3$ are lower than those in $Zn_2SnO_4$. This work provides the information on the valence states of Zn and Sn ions and their chemical bonding in $ZnSnO_3$ and $Zn_2SnO_4$.

Low Temperature CO Oxidation over Cu-Mn Mixed Oxides (Cu-Mn 혼합산화물 상에서 일산화탄소의 저온산화반응)

  • Cho, Kyong-Ho;Park, Jung-Hyun;Shin, Chae-Ho
    • Clean Technology
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    • v.16 no.2
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    • pp.132-139
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    • 2010
  • The Cu-Mn mixed oxide catalysts with different molar ratios of Cu/(Cu+Mn) prepared by co-precipitation method have been investigated in CO oxidation at $30^{\circ}C$. The catalysts used in this study were characterized by X-ray Diffraction (XRD), $N_2$ sorption, X-ray photoelectron spectroscopy (XPS), and $H_2$-temperature programmed reduction $(H_2-TPR)$ to correlate with catalytic activities in CO oxidation. The $N_2$ adsorption-desorption isotherms of Cu-Mn mixed oxide catalysts showed a type 4 having pore range of 7-20 nm and BET surface area was increased from 17 to $205\;m^2{\cdot}g^{-1}$ with increasing of Mn content. The XPS analysis showed the surface oxidation state of Cu and Mn represented $Cu^{2+}$and the mixture of $Mn^{3+}$ and $Mn^{4+}$, respectively. Among the catalysts studied here, Cu/(Cu+Mn) = 0.5 catalyst showed the highest activity at $30^{\circ}C$ in CO oxidation and the catalytic activity showed a typical volcano-shape curve with respect to Cu/(Cu+Mn) molar ratios. The water vapor showed a prohibiting effect on the efficiency of the catalyst which is due to the competitive adsorption of carbon monoxide on the active sites of catalyst surface and finally the formation of hydroxyl group with active metals.

A Preliminary X-ray Photoelectron Spectroscopic Study on the Manganese Oxidation State of in Polymetallic Nodules of the East Siberian Sea (동시베리아해 망가니즈 단괴의 망가니즈 산화상태 변화 규명을 위한 X선 광전자 분광분석 예비연구)

  • Hyo-Im Kim;Sangmi Lee;Hyo-Jin Koo;Yoon Ji;Hyen-Goo Cho
    • Korean Journal of Mineralogy and Petrology
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    • v.36 no.4
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    • pp.303-312
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    • 2023
  • The determination of the oxidation states of metal elements in manganese nodules sheds light on the understanding of the formation mechanism of nodules, providing insights into the paleo-environmental conditions such as the redox potential of the aqueous system. This study aims to reveal the oxidation states and chemical bonding of manganese in the natural polymetallic nodules, utilizing conventional X-ray photoelectron spectroscopy (XPS). Specifically, shallow manganese nodules from the Siberian Arctic Sea, effectively recording mineralogical variations, were used in this study. Detailed analysis of XPS Mn 2p spectra showed changes in the manganese oxidation state from the center to the outer parts of the nodules. The central part of the nodules showed a higher Mn4+ content, approximately 67.9%, while the outermost part showed about 63% of Mn4+ due to an increase in the Mn3++Mn2+. The decrease in the Mn oxidation state with the growth is consistent with the previously reported mineralogical variations from todorokite to birnessite with growth. Additionally, the O 1s spectra presented a predominance of Mn-O-H bonds in the outer layers compared to the center, suggesting hydration by water in the layered manganates of outer layers. The results of this study demonstrate that XPS can be directly applied to understand changes in paleo-environmental conditions such as the redox states during the growth of manganese nodules. Finally, future studies using high-resolution synchrotron-based XPS experiments could achieve details in oxidation states of manganese and trace metal elements.