• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.218.2-218.2
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• 2014

그래핀은 높은 전기 전도도와 열전도도, 기계적 강도를 가지고 있고 동시에 높은 전자이동도($200,000cm^2{\cdot}V{\cdot}^1{\cdot}s{\cdot}^1$) 특성을 갖는 물질로써 차세대 소재로 각광받고 있다. 하지만 그래핀을 소자에 응용하기 위해서는 전사공정과 lithography 공정 과정에서 발생되는 PMMA(Poly methyl methacrylate) residue를 완벽하게 제거해야 하는 문제점이 있다. 특히, lithography 공정 중 완벽하게 PMMA residue 가 제거되지 않고 잔류해 있을 경우에 소자의 life time, performance에 악영향을 준다는 보고가 있다. 이와같은 문제를 해결하기 위해 화학적 cleaning, 열처리를 통한 cleaning, 전류 인가에 의한 cleaning과 같은 방법들을 이용하여 그래핀의 PMMA residue를 제거하는 공정들이 보고되고 있지만, 화학적 cleaning 방법의 경우 chloroform 이라는 독성물질 사용으로 인해 산업적으로 응용이 어렵고, 열처리 방법은 전극 등의 금속이 $200^{\circ}C$ 이상의 높은 온도에서 장시간 노출될 경우 쉽게 손상을 입으며, 전류 인가에 의한 cleaning 방법은 국부적으로만 효과를 볼 수 있기 때문에 lithography 공정 후 PMMA residue를 효과적으로 제거하기에는 한계를 보이고 있다. 본 연구에서는 Ar을 이용하는 Ion beam 시스템을 통해 beam energy를 제어함으로써 PMMA residue를 효과적으로 제거하는 연구를 진행하였다. 최적화된 플라즈마 발생 조건을 찾기 위해 QMS(Quadrupole Mass Spectrometer)를 이용하여 입사하는 ion energy와 flux 양을 컨트롤 하였고, 250 W에서 최적화된 ion energy distribution 영역이 존재한다는 것을 확인할 수 있었다. 또한, 25 Gauss 정도의 electro-magnetic field를 이용하여 Ar의 ion energy를 10 eV 이하로 낮추어 damage를 최소화함으로써 효과적으로 그래핀을 cleaning 할 수 있었다. Cleaning과정에서 ion bombardment에 의해 발생한 damage는 $250^{\circ}C$에서 6시간 동안 annealing 공정을 거치면서 회복되는 것을 Raman spectroscopy의 D peak ($1335cm{\cdot}^1$) / G peak ($1572cm{\cdot}^1$) ratio 로 확인할 수 있었고, PMMA residue의 cleaning 여부는 G peak ($1580cm{\cdot}^1$)의 blue shift와 2D peak ($2670cm{\cdot}^1$)의 red shift를 통해 확인하였다. 그리고 AFM (Atomic Force Microscopy)을 이용하여 cleaning 공정과정에서 RMS roughness가 4.99 nm에서 2.01 nm로 감소하는 것을 관찰하였다. 마지막으로, PMMA residue의 cleaning 정도를 정량적으로 분석하기 위해 XPS (X-ray Photoelectron Spectroscopy)를 이용하여 sp2 C-C bonding이 74.96%에서 87.66%로 증가함을 확인을 할 수 있었다.

• 한국표면공학회지
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• 제54권6호
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• pp.371-379
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• 2021

The use of anti-corrosive oil (AC) is inevitable for production of industrial steels to prevent corrosion. The AC is degreased before application of steels, which crucially effects on final products, such as automobile, electricity etc. However, qualitative/quantitative evaluation of degreasing performance are steal insufficient. In this study, degreasing performance of anti-corrosive oil on steel have been studied through X-ray photon spectroscopy (XPS) and electrochemical impedance spectroscopy (EIS). Commercial automotive steels (AMS) are coated with 4 different anti-corrosive oils (namely AC1-AC4). In XPS, intensity of C1s peak remained after degreasing indirectly indicates incomplete degreasing. Thus, higher C1s peak intensity means less effective degreasing by degreasing agent. peak intensity of C1s peak shows opposite tendency of peak intensity of O1s. We found that EIS analysis is not applicable to mild steel (such as AMS1) due to corrosion during measurement. However, alloy steel can be fully analyzed by EIS and XPS depth profile.

• 새물리
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• 제68권12호
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• pp.1281-1287
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• 2018

본 연구에서는 $Al_xGa_{1-x}N$ 박막을 유기금속 화학증착법(metal organic chemical vapor deposition, MOCVD) 을 이용하여 사파이어 (0001) 기판 위에 성장하였다. 성장된 박막의 결정구조를 조사하기 위하여 엑스선 회절 (X-ray diffraction, XRD) 패턴을 이용하였고, 박막의 표면 상태를 관찰하기 위하여 원자간력 현미경(atomic force microscopy, AFM)을 사용하였다. 또한 박막의 화학성분과 결합상태는 엑스선 광전자 분광분석기(X- ray photoelectron spectroscopy, XPS)를 이용하여 분석하였다. 박막의 광학적 특성인 유사유전함수는 분광학적 타원편광분석법(spectroscopic ellipsometry, SE)을 사용하여 실온에서 2.0 ~ 8.7 eV 포톤에너지 범위에서 측정되었다. 타원편광분석법으로 조사된 데이터들을 통해 얻은 유사유전함수 스펙트럼 $<{\varepsilon}(E)>=<{\varepsilon}_1(E)>+i<{\varepsilon}_2(E)>$에 나타난 $E_0$, $E_1$, 그리고 $E_2$ 와 같은 임계점 구조에 대하여 연구하였고, 각각의 임계점 피크들은 획득된 유사유전함수의 데이터를 이차 미분한 이계도함수 $d^2<{\varepsilon}(E)>/dE^2$ 를 이용하여 구하였다. 특히, x = 0.18과 x = 0.29 사이에 위치한 샘플(x = 0.18, 0.21, 0.25, 0.29)들은 Al의 조성이 증가함에 따라 임계점 피크들이 변화(blue-shift)한다는 것을 관측하였고, 이를 다른 문헌들과 비교 분석하였다.

• Bulletin of the Korean Chemical Society
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• 제30권1호
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• pp.107-113
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• 2009

This study investigated the decomposition activities of toluene on 10 mol% Al-W-incorporated mesoporous titano (15 mol %) silicates. The mesopore sizes observed in the transmission electron microscopy images ranged from 2.0 to 5.0 nm, and the pores were irregular on the addition of 10 mol% Al or W ions, but changed to regular hexagonal forms with the simultaneous additions of Al and W. The X-ray photon spectroscopy results showed a shift of the special peak for Ti2p in Al-incorporated mesoporous titanosilicates to a stronger binding energy compared to those of mesoporous titanosilicates and Al-incorporated mesoporous titanosilicates. Three O1s peaks in the spectra of the Al and W coexisted samples were observed at 530.5 and 531.7, 533, and 533.7eV, which were assigned to $Ti-Os\;in\;TiO_2\;and\;Ti_2O_3,\;Si-O\;in\;SiO_2\;and\;Al-O\;in\;Al_2O_3$, respectively. The toluene molecules desorbed at lower temperatures over W-incorporated mesoporous titanosilicates, and the amounts of toluene desorbed were also small; however, Al-incorporated mesoporous titanosilicates adsorbed much more toluene, particular over $Al_7.5-W_2.5-Ti_15-Si_75$. The photocatalytic decomposition of toluene was more enhanced over $Al_7.5-W_2.5-Ti_15-Si_75$ than over Al- or W-incorporated mesoporous titanosilicates only.

• Korean Chemical Engineering Research
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• 제57권3호
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• pp.392-399
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• 2019

A highly transparent interfacial layer (HTIL) to enhance the performance of dye-sensitized solar cells (DSSCs) was prepared via a polymer-assisted (PA) approach. Poly(vinyl chloride)-graft-poly(oxyethylene methacrylate) (PVC-g-POEM) was synthesized via atom-transfer radical polymerization (ATRP) and was used as a sacrificial template. The PVC-g-POEM graft copolymer induced partial coordination of a hydrophilic titanium isopropoxide (TTIP) sol-gel solution with the POEM domain, resulting in microphase separation, and in turn, the generation of mesopores upon calcination. These phenomena were confirmed using Fourier-transform infrared (FT-IR) spectroscopy, UV-visible light transmittance spectroscopy, scanning electron microscopy (SEM), and X-ray diffraction (XRD) analysis. The DSSCs incorporating HTIL60/20 (consisting of a top layer with a pore size of 60 nm and a bottom layer with a pore size of 20 nm) exhibited the best overall conversion efficiency (6.36%) among the tested samples, which was 25.9% higher than that of a conventional blocking layer (BL). DSSC was further characterized using the Nyquist plot and incident-photon to electron conversion efficiency (IPCE) spectra.

• Bulletin of the Korean Chemical Society
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• 제31권7호
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• pp.1997-2002
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• 2010

ZnSe and ZnS:Mn nanocrystals were synthesized via the thermal decomposition of their corresponding organometallic precursors in a hot coordinating solvent (TOP/TOPO) mixture. The organic surface capping agents were substituted with EDTA molecules to impart hydrophilic surface properties to the resulting nanocrystals. The optical properties of the water-dispersible nanocrystals were analyzed by UV-visible and room temperature solution photoluminescence (PL) spectroscopy. The powders were characterized by X-ray diffraction (XRD), high resolution transmission electron microscopy (HR-TEM), and confocal laser scanning microscopy (CLSM). The solution PL spectra revealed emission peaks at 390 (ZnSe-EDTA) and 597 (ZnS:Mn-EDTA) nm with PL efficiencies of 4.0 (former) and 2.4% (latter), respectively. Two-photon spectra were obtained by fixing the excitation light source wavelengths at 616 nm (ZnSe-EDTA) and 560 nm (ZnS:Mn-EDTA). The emission peaks appeared at the same positions to that of the PL spectra but with lower peak intensity. In addition, the morphology and sizes of the nanocrystals were estimated from the corresponding HR-TEM images. The measured average particle sizes were 5.4 nm (ZnSe-EDTA) with a standard deviation of 1.2 nm, and 4.7 nm (ZnS:Mn-EDTA) with a standard deviation of 0.8 nm, respectively.

• Transactions on Electrical and Electronic Materials
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• 제15권5호
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• pp.262-264
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• 2014

Pristine ZnO, 3 wt.% Ga-doped (3GZO) and 3 wt.% Ag-doped (3SZO) ZnO nanowires (NWs) were grown using the hot-walled pulse laser deposition (HW-PLD) technique. The doping of Ga and Ag in ZnO NWs was observed by analyzing the optical and chemical properties. We optimized the synthesis conditions, including processing temperature, time, gas flow, and distance between target and substrate for the growth of pristine and doped ZnO NWs. The diameter and length of pristine and doped ZnO NWs were controlled under 200 nm and several ${\mu}m$, respectively. Low temperature photoluminescence (PL) was performed to observe the optical property of doped NWs. We clearly observed the shift of the near band edge (NBE) emission by using low temperature PL. In the case of 3GZO and 3SZO NWs, the center photon energy of the NBE emissions shifted to low energy direction using the Burstein Moss effect. A strong donor-bound exciton peak was found in 3 GZO NWs, while an acceptor-bound exciton peak was found in 3SZO NWs. X-ray photoelectron spectroscopy (XPS) also indicated that the shift of binding energy was mainly attributed to the interaction between the metal ion and ZnO NWs.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.115-115
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• 2015

Many efforts have been devoted on chemical modification of graphene layer to modulate its electrical properties. In the previous report, laser irradiation on the CYTOP (Amorphous Fluoropolymer) covered graphene layer induces chemical modification wherein carbon fluoride is formed on the graphene surface. This results in the insulating I-V characteristics, which have been attracting much research interests on it. However, the direct analytical evidence of the fluoride formation on graphene surface is not yet studied. In this work we investigated what happened on the CYTOP/graphene interface during photon irradiation using spatially resolved photoemission spectroscopy method. It is found that the soft x-ray (614 eV) induces desorption of fluoride atoms from the CYTOP and change di-fluoride form to mono-fluoride. As the photo-induced fluorine desorption is continue strong dipole field generated by initial di-fluoride forms is gradually decreased, resulting in the overall binding energy shift of the C 1s core levels. Both photo-modified CYTOP and CYTOP starts to desorb above $286^{\circ}C$ (~ 0.047 eV), which means that no strong chemical interaction between CYTOP and graphene is established.

• Bulletin of the Korean Chemical Society
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• 제35권11호
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• pp.3319-3325
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• 2014

Eu(III)-doped $CeO_2$ nanorods were prepared by a co-precipitation method at room temperature, and their photoluminescence profiles were examined with different Eu(III)-doping concentrations and thermal annealing temperatures. Scanning electron microscopy, X-ray diffraction crystallography and UV-Vis absorption spectroscopy were employed to examine the morphology, crystal structure and photon absorption profiles of the nanorods, respectively. Additionally, their 2D and 3D-photoluminescence profile maps were obtained to fully understand the photoluminescence mechanism. We found that the magnetic dipole $^5D_0{\rightarrow}^7F_1$ and the electric dipole $^5D_0{\rightarrow}^7F_2$ transitions of Eu(III) were highly dependent on the doping concentration, annealing temperature and excitation wavelength, which was explained by the presence of different Eu(III)-doping sites (with and without an inversion center) in the $CeO_2$ host with a cubic crystal structure.

• 청정기술
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• 제23권4호
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• pp.408-412
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• 2017

Pigment red 53:1 is a dye used in various products as a component of the inks, suspected of being carcinogenic. Thus, the environmental and occupational issues related to it are important. The enzyme-based approach with reusability has advantages to consume less energy and generate less harsh side- products compared to the conventional strategies including separations, microbe, and electrochemical treatment. The degradation of Pigment red 53:1 by the lignin peroxidase immobilized on the surface of magnetic particles has been studied. The immobilization of the peroxidase was conducted on magnetic particle surface with the treatment of polyethyleneimine, glutaraldehyde, and the peroxidase, in sequence. The immobilization was confirmed using X-ray photon spectroscopy. The absorbance peak of the pigment was monitored at 495 nm of UV/Vis spectrum with respect to time to calculate the catalytic activities of the pigment for the immobilized lignin peroxidase. For the comparison, the absorbance of the lignin peroxidase free in solution was also monitored. The catalytic rate constant values for the free lignin peroxidases and the immobilized those were 0.51 and $0.34min^{-1}$, respectively. The reusable activity for the immobilized lignin peroxidase was kept to 92% after 10 cycles. The stabilities for heat and storage were also investigated for both cases.