• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.471-472
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• 2010

• 조명전기설비학회논문지
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• 제19권8호
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• pp.1-7
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• 2005

본 논문에서는 편광소자를 이용하는 스펙클패턴 전단간섭법(shearography)에서 각각 90도의 위상천이를 가지는 4개의 스펙클 패턴을 얻고, 이로부터 스펙클패턴의 각 지점에서의 위상을 얻을 수 있는 방법을 설명하고, 제안된 방법에 사용되는 파장판의 방위각에 의한 위상오차를 Jones 행렬을 이용하여 분석하였다.

• Journal of the Optical Society of Korea
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• 제8권3호
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• pp.122-126
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• 2004

The method to obtain four speckle patterns with relative phase shift of ${\pi}/2$ by passive devices such as two waveplates and a linear polarizer, awl to calculate the phase at each point of the speckle pattern in shearography with a Wollaston prism is presented, and the feasibility of the proposed method is theoretically demonstrated by Jones vector.

• 조명전기설비학회논문지
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• 제18권6호
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• pp.8-13
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• 2004

본 논문에서는 Wollaston prism을 이용한 Shearography에서 수동소자인 두 개의 Waveplate와 편광판의 조합을 통해 각각 90도의 위상천이를 가지는 4개의 스펙클 패턴을 얻고, 이로부터 스펙클의 각 지점에서의 위상을 얻을 수 있는 방법을 제시하고, Jones 행렬을 이용하여 이론적으로 입증하였다.

• 조명전기설비학회논문지
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• 제19권1호
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• pp.34-39
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• 2005

본 논문에서는 Wollaston 프리즘을 이용한 스펙클패턴 전단간섭법(shearography)에서 수동소자인 두 개의 파장판과 편광판의 조합을 통해 각각 90도의 위상천이를 가지는 4개의 스펙클 패턴을 얻고, 이로부터 스펙클패턴의 각 지점에서의 위상을 얻을 수 있는 방법을 제시하였다. 제안된 방법에 사용되는 파장판에 의한 위상오차를 Jones 행렬을 이용하여 분석하였다.

• Journal of the Optical Society of Korea
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• 제9권4호
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• pp.145-150
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• 2005

The method to obtain four speckle patterns with relative phase shift of $\pi$/2 by passive devices such as two waveplates and a linear polarizer, and to calculate the phase at each point of the speckle pattern in shearography with a Wollaston prism is described. In this paper, we analyze its potential error sources caused by wave plates.

• 반도체디스플레이기술학회지
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• 제4권1호
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• pp.17-21
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• 2005

We presented a new method to obtain four speckle interferograms with relative phase shift of $\pi$/2 by passive devices such as waveplate and polarizer, calculate the phase at each point of the speckle interferogram in shearography using Wollaston prism, which can be applied to the deformation evaluation of semiconductor devices, and theoretically demonstrated the feasibility of the proposed method by Jones matrix.

• Journal of the Optical Society of Korea
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• 제16권4호
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• pp.457-461
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• 2012

A real-time method to measure full field retardation near quarter wavelength is proposed. The circularly polarized beam passes through a sample with a large aperture. The measuring beam then goes through a quarter-wave plate and is then split by a Wollaston prism. An image with two sub-images is then detected by a high-speed image sensor. The full field retardation near quarter wavelength can be obtained in real time by processing the image. The measured retardation is independent of the fast axis angle of the sample and the fluctuation of the initial intensity. In experiments, a wedge waveplate is measured with different fast axis angle and initial intensity, and the full field retardations are acquired. The maximum and standard deviation of the full field retardation is $1.5^{\circ}$ and $0.4^{\circ}$. The validity of the method is verified.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2005년도 학술대회 논문집
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• pp.185-188
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• 2005

We present the method to obtain four speckle patterns with relative phase shift of ${\pi}/2$ by passive devices such as wave plate and polarizer, and calculate the phase at each point of the speckle pattern in shearographic system using Wollaston prism. And, we analyzed the phase error caused using wave plates by Jones matrix.