• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.12
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• pp.1084-1090
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• 1998

As device sizes are scaled down to submicron dimensions, planarization technology becomes increasingly important for both device fabrication and formation of multilevel interconnects. Chemical mechanical polishing (CMP) has emerged recently as a new processing technique for achieving a high degree of planarization for submicron VLSI applications. The polishing process has many variables, and most of which are not well understood. The factors determine the planarization performance are slurry and pad type, insert material, conditioning technique, and choice of polishing tool. Circuit density, pattern size, and wiring layout also affect the performance of a CMP planarization process. This paper presents the results of studies on CMP process window characterization for 0.35 micron process with 5 metal layers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.173-176
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• 1999

Continuing improvement of microprocessor performance involves in the devece size. This allow greater device speed, an increase in device packing density, and an increase in the number of functions that can reside on a single chip. However this has led to propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance(RC) coupling become significant due to increased wiring capacitance, especially interline capacitance between the metal lines on the same metal level. Becase of pattering MSSQ (Methylsilsequioxane), we use RIE(Reactive ton Etching) which is a good anisotrgpy. In this study, according as we control a flow rate of CF$_4$/O$_2$ gas, RF power, we analysis by using ${\alpha}$ -step, SEM and AFM,

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.5
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• pp.22-33
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• 2021

In the case of open phase faults caused by the disconnection of distribution feeders interconnected to a PV system, many problems can occur depending on the core type and wiring method of the grid-connected transformers. Moreover, open phase faults are difficult to detect because the open phase voltage of the existing protection relay (Open Phase Relay (47)) can be maintained, even though a disconnection fault occurred, depending on the wiring method and the iron core type of the grid-connected transformer for a PV system. Therefore, this paper proposes a novel algorithm to detect open phase faults by comparing the currents and phases between the primary and secondary sides of a grid-connected transformer. In addition, this paper presents the modeling of a distribution system and protection devices for detecting open phase faults using PSCAD/EMTDC S/W, and implements a test protection device for detecting open phase faults based on the above-mentioned modeling. The simulation and test results confirmed that the proposed algorithm is useful for detecting open phase faults according to the wiring method and iron core type of grid-connected transformer for a PV system because operation slope and unbalance rate of the primary current exceed the setting value (30[%]) of the protection device.

• Journal of the Korea Society of Computer and Information
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• v.22 no.8
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• pp.1-7
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• 2017

In this paper, we proposed the test equipment that can perform separate performance tests to mass-produce the Automatic Test Equipment. Until now, the performance test of the ATE has been performed after it has been assembled perfectly. It is possible to perform the performance test only when the external device manufacturing and setting of measurement resources and the internal wiring work have been completed. So we have been studying test equipment that separately tested the switching devices that played a key role in the performance of the ATE. To build the test equipment, we reviewed the circuit card assemblies that make up the switching devices. We designed a test equipment that satisfies the performance test and apply the completed test equipment to the actual production process to analyze whether it was effective in improving the time and workability of the performance test. The test equipment has the advantage that it can be used universally in the mass production process of ATE with the same type of switching device.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.2102-2103
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• 2008

The major causes of electrical fire are classified to short circuit fault, overload fault, electric leakage and electric contact failure. The occurrence factor of the fire is electric arc or spark accompanied with electrical faults. Residual Current Protective Device(RCD) of high sensitivity type used at low voltage wiring cuts off earth leakage and overload, but the RCD can't cut off electric arc or spark to be a major factor of electrical fire. As the RCDs which are applied low voltage distribution panel are prescribed to rated breaking time about 30[ms](KS C 4613), the RCDs can't perceive to the periodic electric arc or spark of more short wavelength level. To be improved on such problem, this paper is proposed to a electrical fire disaster prevention device(EFDPD) for a RCD trip or a self circuit-breaking function on electric arc or spark due to electrical fire. Some experimental results of the proposed apparatus is confirmed to the validity of the analytical results.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.11
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• pp.1925-1929
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• 2007

This paper is studied on a novel Electric Safety Protection Device (ESPD) of high speed for incapable operation of Earth Leakage Circuit Breaker (ELB) and Molded_case Circuit Breaker (MCCB) using the low voltage distribution line. The major causes of electrical fire are classified to short circuit fault, overload fault, electric leakage and electric contact failure. The occurrence factor of the fire is electric arc or spark accompanied with electrical faults. Residual Current Protective Device (RCD), that is ELB and MCCB, of high sensitivity type used at low voltage wiring cuts off earth leakage and overload, but the RCD can't cut off electric arc or spark to be a major factor of electrical fire. As the RCDs which are applied low voltage distribution panel are prescribed to rated breaking time about 30[ms] (KS C 4613), the RCDs can't perceive to the periodic electric arc or spark of more short wavelength level. To be improved on such problem, this research development is proposed to a novel ESPD of high speed to trip of distribution line on electric arc or spark due to electrical fire. Some experimental results of the proposed ESPD are confirmed to the validity of the analytical results.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.2
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• pp.90-99
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• 2004

High speed info-communications equipment are required with development of highly information-oriented society, the intelligent industrial facilities and social systems such as administrative, financial and traffic systems, are gradually becoming to automation, which are composed of the integrated circuits and micro-semiconductors, remote control and operation. Thus modern micro-electronic circuits can frequently be damaged by lightning surge. The protection of electronic circuits from lightning overvoltages is concentrated very interesting. In this paper, for the purpose of providing the effective protection method of electronic devices such micro-computers from lightning surges in a residential building, the protection effect of surge protective devices according to types of system groundings were experimentally analyzed. Also the effective installation method of surge protective devices was examined and proposed. The installation of SPDs in retrofits was a high remnant voltage across the protected device owing to the inductance in the long wires to the SPDs. Finally the method of installing the SPD by twisted pain wires is remarkably effective for fast rising transient overvoltages.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.21 no.1
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• pp.35-41
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• 2007

Recently, there are increasing social needs for stable supply of electric power and securing high quality of information and communication services. In this work, to propose the effective protection countermeasures of information-oriented equipments against lightning surges, the protection effects of surge protective devices(SPDs) were experimentally investigated using actual-sized test circuits in various installation conditions. As a result, it was found that the protection effect of SPDs is quite different depending on the factors, such as the grounding system of power source, numbers of branch circuits, wiring method of grounding leads, and etc. In case of installing SPDs for information-oriented equipments, including all electric power lines and communication lines, the common grounding should be the most effective. Wiring method containing grounding leads with power lines in metal conduit is suitable to improve the surge cutoff performance of SPDs.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.753-757
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• 2004

This paper describes a PC-based distributed multi-rate realtime control system using USB protocol, which is developed as a general motion controller. The control system consists of two control programs: one running at 1 kHz sampling rate on a PC with Linux and another running at 10 kHz sampling rate on a remotely located motion control card called RASID (remote axis serial interface device). Two programs communicates through USB at every 1 msec. A USB communication driver is developed to ensured the 1 msec desired communication time. The main program running on the PC generates reference trajectory at 1 kHz and send it to the RASID through USB and RASIDs located near the motors gather the sensor information and execute the low-level control at 10 kHz. The USB-based connectivity reduces the wiring harness and eventually the manufacturing cost of the machine. The multi-rate nature of the developed system improves the control capability. The effect of sampling rate is analyzed and simulated.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.8
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• pp.1143-1148
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• 2013

This paper deals a watt-hour meter monitor system with applying a Power Line Communication (PLC) modem and a Data Concentrator Unit (DCU). PLC modem uses the power line, so there is no need to install dedicated wiring. This system makes it possible to monitor the amount of electricity of previous current month metering data, so it can easily apply a PC-management for the electric charges and maintenance with gathering the metering data.