• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• Korean Journal of Computational Design and Engineering
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• v.20 no.3
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• pp.291-297
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• 2015

A water jet cleaning robot system for micro drill bits is to refurbish micro drill bits used for the PCB manufacturing process. It can refurbish drill bits with the minimum diameter of ${\phi}0.15{\sim}0.075mm$ of which the total quantity have been discarded before. Micro drill bits with the minimum diameter of ${\phi}0.075mm$ can be cleaned by applying the water jet cleaning robot system out of the manual ultrasonic cleaning in the past for the cleaning equipment as the initial process in refurbishing. This study analyzed problems, while applying the apparatus mechanism for the workability such as the robot traces of Transfer Robot I and II, drill bit loading and unloading, and cleaning tasks in the water jet cleaning robot system in an effort to carry out simulations. In addition, the cleaning work process was optimized as the work process was verified in advance and the production quantity was analyzed through simulations.

• Journal of Advanced Marine Engineering and Technology
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• v.36 no.7
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• pp.894-901
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• 2012

For more efficient use of the high pressure water-jet in rehabilitation of the water pipes, we have studied the water-jet cleaning motion of the in-pipe robot with screw drive. The mathematical models of the water-jet in the straight and the curved pipe (90 degrees elbow), representative features of the water mains, were designed to understand the water-jet motion and simulations have been performed. Furthermore the experiments has been conducted to validate the simulations by using the prototype in-pipe robot in the 3-D pipeline. The simulation results show that the water-jet motion in the straight pipe has a constant water-jet interval, whereas the motion in the curved pipe is changed by its position. By the comparison of the simulation and the experimental results, we have demonstrated that the simulations successfully estimate the water-jet motion inside the water pipes. Therefore in-pipe robot operators can predict a water-jet motion for a target water pipe through the simulation and flexibly make a proper water-jet motion by changing the robot configurations before a cleaning work.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.9
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• pp.977-982
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• 2013

Blades of wind energy plants are exposed to external shocks or internal cracks during operation. Furthermore, the blade surfaces can be contaminated by substances such as dust, blood of birds, salt or insects which can decrease the electricity generation efficiency significantly. For this reason, many blade cleaning companies started to appear and a variety of methods for cleaning were suggested. Despite these diverse methods, there has been no study to investigate how effectively to clean the substances in quantitative manner. In this paper, the cleaning efficiency of two rotor blade cleaning methods, brush and water-jet, is examined through experiments by changing operating parameters. Then, the optimal operating conditions for both methods are derived.

• The Journal of Korea Robotics Society
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• v.7 no.4
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• pp.243-251
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• 2012

In this paper, developing of a pool cleaning robot is addressed. First, we analyze commercial pool cleaning robot mechanisms, and the merits and demerits of wireless version of a pool cleaning robot is introduced. And then the water-jet moving mechanism for a pool cleaning robot is proposed to improve energy efficiency and mechanical design advantage, which is one of the strong candidates for wireless pool cleaning robots. Next, the method of cleaning performance evaluation of pool cleaning robots is firstly defined with five key factors, and it was verified by experimental results. If the cleaning performance can be quantitatively defined, we can design optimally a pool cleaning robot, which results in the cost down.

• Journal of computational fluids engineering
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• v.12 no.3
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• pp.8-12
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• 2007

An optimized bidet nozzle design to form the required swirl water jet is proposed with the help of numerical analysis. The bidet can do the cleaning process of human body by water injection and the speed/pressure/injection angle/magnitude of swirl intensity of water jet determine the cleaning capability and personal subjective feeling. The objective of this research is to design optimal water injection nozzle to make stable swirl intensity. The effect of individual design variables are analyzed from the basic design and the final design is deduced to make high performance water jet within the pre-determined operation conditions.

• 한국전산유체공학회:학술대회논문집
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• 2007.04a
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• pp.68-71
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• 2007

An optimized bidet nozzle design to form the required swirl water jet is proposed with the help of numerical analysis. The bidet can do the cleaning process of human body by water injection and the speed/pressure/injection angle/magnitude of swirl intensity of water jet determine the cleaning capability and personal subjective feeling. The objective of this research is to design optimal water injection nozzle to make stable swirl intensity. The effect of individual design variables are analyzed from the basic design and the final design is deduced to make high performance water jet within the pre-determined operation conditions.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.269-274
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• 2004

As next generation display, TFT LCD gets into the spotlight, and the bigger glass size is required. Currently, its display size is 1500 mm by 1870 mm at the six generation comparing with 300mm by 400 mm at the first one and the size is increasing continuously, which cause the difficulties to apply the cleaning operation including the general brush cleaning. In this study, water-jet cleaning operation has been introduced, which spent the less water them other cleaning methods. Throughout the experiment, is has been found the possible damage of the declined cell and the variation of the tilt bias angle depending upon the increasing time. In addition, the simulation predicts the glass bending of the display.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1240-1247
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• 2003

Water jet nozzle for LCD has been used as a wet cleaning process in many industries. It is necessary for the nozzle to consider cleaning effect and flux. In this paper, we applied the bubble dynamic theory(Rayleight-Plesset equation) to improve the cleaning efficiency. Generally, Rayleigh-Plesset equations for cavitation bubbles are used in analyzing computer simulation for caviting flows. Burst of bubbles causes potential energies and we can use these energies to remove organic and inorganic compounds on the LCD. Therefore, it is necessary to analyze the bubble generations and axiomatic design by computational fluid dynamics(CFD). By comparing the weight matrix of neural networks to the design matrix of axiomatic design, we propose methods to verify designs objectively. The optimal solution could be deduced by the regression analysis using the design parameters.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2013.11a
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• pp.224-225
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• 2013

Most of the building exterior wall cleaning robots use a water jet device for spraying water. However this method is sprayed excessive water usage than water quantity required for cleaning. And setting weight of the water pump cleaning device increase the weight of the building exterior wall cleaning robot. Therefor, this paper suggest that the mechanisms scatter minimal cleaning water using a spinning device of the building exterior wall cleaning robot.