Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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A Study on the Process Improvement in TFT LCD Cleaning

TFT LCD 세정 방법에 대한 프로세스 개선에 관한 연구

  • 홍민성 (아주대학교 기계공학부) ;
  • 김종민 (아주대학교 기계공학과 대학) ;
  • 강신재 (아주대학교 기계공학부)
  • Published : 2004.04.01
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Abstract

As next generation display, TFT LCD gets into the spotlight, and the bigger glass size is required. Currently, its display size is 1500 mm by 1870 mm at the six generation comparing with 300mm by 400 mm at the first one and the size is increasing continuously, which cause the difficulties to apply the cleaning operation including the general brush cleaning. In this study, water-jet cleaning operation has been introduced, which spent the less water them other cleaning methods. Throughout the experiment, is has been found the possible damage of the declined cell and the variation of the tilt bias angle depending upon the increasing time. In addition, the simulation predicts the glass bending of the display.

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