• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.102-104
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• 2006

Auto-Correlated time series (ATS) model was constructed by using the backpropagation neural network. The performance of ATS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 4%. By integrating ATS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• Journal of Mechanical Science and Technology
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• v.17 no.5
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• pp.758-765
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• 2003

An experimental investigation on the flow pattern and pressure drop was carried out for both an adiabatic and a diabatic two-phase flow in a horizontal tube with pure refrigerants R134a and R123 and their mixtures as test fluids. The observed flow patterns were compared to the flow pattern map of Kattan et al., which predicted well the present data over the entire regions of mass velocity in this study. The measured frictional pressure drop in the adiabatic experiments increased with an increase in vapor quality and mass velocity These data were compared to various correlations proposed in the past for the frictional pressure drop. The Chisholm correlation underpredicted the present data both for pure fluids and their mixtures in the entire mass velocity range of 150 to 600 kg/m$^2$s covered in the measurements, white the Friedel correlation was found to overpredict the present data in the stratified and stratified-wavy flow region, and to underpredict in the annular flow region.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.347-352
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• 2000

The pressure drop characteristics of R-22 and R-410A(a mixture of 50wt% R-32 and 50wt% R-125) flowing in a small diameter tube with 1.77[mm] inner diameter and 3.14[mm] outer diameter was investigated experimentally. the mass fluxes of refrigerants are ranged from 450 to $1050[kg/(m^2{\cdot}s)]$ and the qualites are varied from 0.05 to 0.95. The main experimental results were summarized as follows; The single-phase liquid friction factors for small diameter tubes are higher than those predicted by the Blasius equation. In case of two-phase flow, the pressure gradient of the small diameter tube increases with increasing mass velocity and vapor quality. The experimental data are not well correlated by predictions which were proposed for the large diameter tube.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.188.2-188.2
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• 2014

Chemical vapor deposition (CVD) method is usually used to grow high-quality large area graphene. In the CVD process, copper is an especially important catalytic-substrate due to the fact that graphene films grown on Cu foils are predominantly one monolayer thick. In this study, we has grown graphene on several types of copper substrates: Cu foils and copper single crystal surfaces such as Cu(100) and Cu(111) are chosen. To investigate the differences between graphene grown on foils and single crystals, we use Raman spectroscopy, X-ray diffraction and atomic force microscopy. Details of the experimental results will be presented.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.39 no.10
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• pp.1037-1043
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• 1990

Diamond thin films were synthesized from the mixed gases of methane and hydrogen on silicon substrates by RF plasma chemical vapor deposition and deposited films were investigated by SEM, X-ray diffractometry and Raman spectroscopy. It is found that high quality diamond-like carbon films were successfully synthesized by PECVD under the deposition condition of 1-10 vol% of methane concentration, 0.15-0.4torr of reactor pressure, 500W of RF power, and 5-20hr of reaction time. Especially, cubo-octahedral diamond-like carbon particles were synthesized by employing 1.0 vol % of methane concentration and 0.4torr of the reactor pressure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.59-60
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• 2005

The characteristics of GaN epitaxial layers grown on silicon (111) substrates by metalorganic vapor phase epitaxy have been investigated. The only control of AIN thickness was found to decrease the stress sufficiently for avoiding crack formation in an overgrown thick ($2.6{\mu}m$) CaN layer. X-ray diffraction measurementsare used to determine the effect of AIN thickness on the strain in the subsequent GaN layers. The 437arcsec linewidth on the (002) x-ray rocking curve also attest the high crystalline quality of GaN on Si (111).

• Journal of Surface Science and Engineering
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• v.38 no.4
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• pp.174-178
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• 2005

Chemical vapor deposition technique has been used to grow epitaxial SiC thin films on Si wafers using tetramethylsilane(TMS) precursor. The films were observed to grow along (110) direction of 3C-SiC at $800^{\circ}C$. The quality of the films was significantly influenced by the TMS flow rate and growth temperature. Nanocrystal SiC films were grown at flow rates of TMS 10 sccm with $H_2$ carrier gas of 100 sccm. The temperature and gas pressure in the reactor have a great influence on the crystallinity and morphology of the SiC film grown. The growth mechanism of the SiC film on the Si substrate without the carbonization process was discussed based on the experimental results.

• 한국연소학회:학술대회논문집
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• 2012.04a
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• pp.235-237
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• 2012

Geodae-Uksae 1 is a variety of Miscanthus sacchariflorus recently discovered in Korea. It is being mass-cultivated for use as energy crop due to its superior productivity, as high as 30 ton/ha/yr for the dry mass. This study investigates the method of producing biochar and bio-oil from the crop using slow pyrolysis. Especially, the study focused on assessing the biochar properties for its application to soil to improve soil quality and sequestrate carbon. Using an electrically heated packed bed reactor, the products of slow pyrolysis from Geodae-Uksae 1 were produced over a temperature range of $300-700^{\circ}C$ with a heating rate of $10^{\circ}C/min$. The biochar, condensable vapor (bio-oil) and residual gases were characterized for the physical and chemical properties. It was concluded that the ideal temperature for pyrolysis to produce biochar is $500^{\circ}C$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.371-376
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• 1996

The damping force of shock absorber in an automobile is determined by the components which construct the S/A. In this study we investigate the individual effect of these components on damping force. In addition, opening of important valve doling compression and tension cycle due to up-down reciprocation movement is also researched. Thus we are to strictly control the properties and tolerance of components having important effects on tile damping force and to produce S/A of better quality.

• Journal of the Korean Ceramic Society
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• v.50 no.5
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• pp.309-318
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• 2013

Graphene has attracted considerable attention since its first production from graphite in 2004, due to its outstanding physical and chemical properties. The development of production methodsfor large scale, high quality graphene films is an essentialstep toward realizing graphene applications such as transparent, conductive film. Chemical deposition methods, using metal catalystsand gaseous carbon sources, have been extensively developed for large area synthesis. In this paper, wereview recent progress ingraphene production, and survey the role of graphene electrodes in various electronic devices such as touch panels, solar cells, solid statelighting and microelectronic devices.