• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.12
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• pp.2010-2015
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• 1989

A SOI was fabricated by the FIPOS technique using n/p+/p silicon structure. Fabricated silicon island which has 3\ulcorner thickness and 100\ulcorner width was investigated by measuring van der Pauw resistivity, Hall mobility, dielectric breakdown voltage and leakage current. Hall mobility of the SOI was measured to be 300-500cm\ulcornerV.sec and its breakdown field was 1-2 MV/cm. The cross-sectional geometries of the SOI island were examined by SEM and optical microscope.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.227-227
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• 2012

본 연구에서는 RF스퍼터링법에 의하여 glass substrate에 In-Zn-Sn-O (IZTO)를 Zn 성분에 변화를 주면서 $350{\AA}$ 만큼 증착시키고, 1시간 동안 $350^{\circ}C$로 열처리 하였다. In:Zn:Sn의 성분 비율은 20:48:32 (IZTO1), 13:60:27 (IZTO2)이다. 박막의 전자적, 광학적 특성은 XPS (X-ray Photoelectron Spectroscopy), REELS(Reflection Electron Energy Loss Spectroscopy), UV-Spectrometer를 이용하여 연구하였고, 박막의 전기적 특성은 van der Pauw 법을 이용하여 측정하였다. XPS측정결과, IZTO박막은 In-O, Sn-O and Zn-O의 결합을 가진다. REELS를 이용해 Ep=1,500 eV에서의 밴드갭을 얻어보면, $350^{\circ}C$로 열처리 한 박막은 열처리를 하지 않은 것에 비해 밴드갭이 IZTO1는 3.36 eV에서 3.54 eV로, IZTO2는 3.15 eV에서 3.31 eV로 증가하였다. 반면에 Zn 함량이 증가할수록 밴드갭이 감소하는 것을 확인할 수 있었다. 이 값은 UV-Spectrometer를 이용한 광학적 밴드갭과 일치하였다. 또한 van der Pauw method를 이용한 전기적 특성 분석 결과, 열처리를 하기 전에 비하여 carrier concentration이 IZTO1는 $-4.4822{\times}10^{18}cm^{-3}$에서 $-2.714{\times}10^{19}cm^{-3}$로, IZTO2는 $-3.6931{\times}10^{17}cm^{-3}$에서 $-1.7679{\times}10^{19}cm^{-3}$로 증가하였다. 반면에 Resistivity는 IZTO1의 경우 $1.7122{\times}10^{-1}{\Omega}{\cdot}cm$에서 $5.5496{\times}10^{-3}{\Omega}{\cdot}cm$로, IZTO2는 $1.3290 {\Omega}{\cdot}cm$에서 $1.3395{\times}10^{-2}{\Omega}{\cdot}cm$로 감소하였다. 그리고 UV-Spectrometer를 이용한 광학적 특성을 측정해본 결과, 가시광선영역인 380~780 nm에서의 투과율이 83%이상으로 투명전자소자로의 응용이 가능하다는 것을 보여주었다.

• Electrical & Electronic Materials
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• v.9 no.9
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• pp.885-890
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• 1996

Undoped p-type and Te doped n-type GaSb crystals were grown by the vertical Bridgman method. The lattice constant of the GaSb crystals was 6.096.+-.000373.angs.. The carrier concentration, the resistivity, and the carrier mobility measured by the van der Pauw method were p.iden.8*10$^{16}$ c $m^{-3}$ , .rho..iden.0.20 .ohm.-cm, .mu.$_{p}$ .iden.400c $m^{2}$ $V^{-1}$ se $c^{-1}$ for p-type, n.iden.1*10$^{17}$ c $m^{-3}$ , .rho..iden.0.15 .ohm.-cm, .mu.$_{n}$ .iden.500c $m^{2}$ $V^{-1}$ se $c^{-1}$ for n-type at 300K. In case of treatment with metal ion of R $u^{+3}$, P $t^{+4}$, the carrier concentration, resistivity and carrier mobility of the GaSb crystals were p.iden.2*10$^{17}$ c $m^{-3}$ , .rho..iden.0.08.ohm.-cm, .mu.$_{p}$ .iden.420c $m^{2}$ $V^{-1}$ se $c^{-1}$ for p-type, n.iden.2.5*10$^{17}$ c $m^{-3}$ , .rho..iden.0.07.ohm.-cm, .mu.$_{n}$ .iden.520c $m^{2}$ $V^{-1}$ se $c^{-1}$ for n-type respectively. GaSb crystals had a tendency to lower resistivity and higher mobility, for surface treatment with metal ion effectively diminished surface recombination centers.s.

• Korean Journal of Crystallography
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• v.1 no.1
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• pp.19-28
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• 1990

6H-SiC is a promising material (Eg=3.0eV) for blue light-emitting doide and high-temperature semiconducting device. In the experiment, single crystals of a-SiC have been grown by the sublimation method to fabricate blue light~emitting diode. During the growth of a-SiC single crystals, a temperature Vadient, yonh temperature and pressure ranges were kept 44℃/cm , 1800-1990℃ and 50-1000 mTorr, respectively. Single crystals obtained in Acheson furnace were used as seed crystals. Polarizing microscopy and back-reflection X-ray Laue diffraction showed that the a-SiC crystal was epitaxially and on the seed crytal. It was found by XRD analysis that when other growth conditions were the same, a-SiC was grown at the temperature above 1840℃ and 3C-SiC was gown at lower temperature or under low supersaturation of vapor. The carrier type. concentration and mobility were measured be hole(p-type), 7.6x1014cm-3 and 19cm2V-1sec-1, respectively, by van der Pauw method.

• Journal of the Korean Magnetics Society
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• v.9 no.5
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• pp.239-244
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• 1999

Bi-doped lanthanum magnetics $(La_{0.67-x}Bi_xCa_{0.33}MnO_3(x\;=\;0,\; 0.04,\; 0.1,\; 0.2))$ samples have been prepared by standard ceramic process. The crystallinity and microstructures of the samples have been investigated by x-ray diffractometry and optical microscopy, respectively. The magnetic and magnetoresistive properties of the samples have been measured by vibrating sample magnetometery and van der Pauw method, respectively, at the temperatures ranging of 100 K~300 K with applied magnetic field of 0.4~0.5 T. Good crystallinity and high Curie temperature (275 K) have been obtained for the Bi-doped samples with small dosage (x = 0.04, 0.1) even they were sintered at 120$0^{\circ}C$, which is about 20$0^{\circ}C$ lower than normal sintering temperature of 140$0^{\circ}C$. The Bi-doped samples with the small dosage showed lower relative electrical resistivity and higher magneto-resistive ratio compared to the undoped sample in the most temperatures measured. The Bi-doped samples also exhibited large magnetoresisitve ratio (maximum of 15% for x = 0.1) at room temperature even under a weak magnetic field of 0.4 T.

• Korean Journal of Crystallography
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• v.9 no.1
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• pp.53-63
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• 1998

The Cd1-xZnxS thin films were grown on the Si(100) wafers by a hot wall epitaxy method (HWE). the source and substrate temperature are 600℃ and 440℃, respectively. The crystalline structure of epilayers was investigated by double crystal X-ray diffraction (DCXD). Hall effect on the sample was measured by the van der Pauw method and the carrier density and mobility dependence of Hall characteristics on temperature was also studied. In order to explore the applicability as a photoconductive cell, we measured the sensitivity (γ), the ratio of photocurrent to darkcurrent (pc/dc), maximum allowable power dissipation (MAPD), spectral response and response time. The results indicated that the best photoconductive characteristic were observed in the Cd0.53Zn0.47S samples annealed in Cu vapor comparing with in Cd, Se, air and vacuum vapour. Then we obtained the sensitivity of 0.99, the value of pc/dc of 1.65 × 107, the MAPD of 338mW, and the rise and decay time of 9.7 ms and 9.3 ms, respectively.

• Proceedings of the Materials Research Society of Korea Conference
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• 1994.11a
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• pp.86-86
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• 1994

박막 EL소자의 투명전극으로 제작된 ITO막의 전기적, 광학적 특성을 조사하였다. Plama CVD방법으로 제작된 ITO막은 증착시 산소결핍으로 인한 비 다량결합(non-stochiometry) 에 의해 In이 석출되어 흑화현상이 일어나 전기전도도와 광투과율을 향상을 위해 산소분위기에서 30$0^{\circ}C$로 4분간 열처리를 행하였다. 한편 ITO막의 비저항 $\rho$와 광투과율 T를 Van der pauw법과 단색 분광계로 각각 측정하였다. 그 결과 상온에서 10-15$\Omega$/$\square$의 면저항과 400-1000nm의 파장영역에서 85-95%의 광투과율을 가져 박막 EL소자의 투명전극 조건을 만족하였다. 열처리에 대학 ITO막의 구조적 특성을 알아보기 위해 X-선회절장치(JEOL.JDX-8030)로 조사하였다. Fig.1은 X-선 회절 패턴을 나타낸다. 열처리후 ITO막은 상대적으로 최대 강도(peak intensity) 가 증가함으로써 열처리에 의해 결정성 향상이되었음을 알수 있다. Fig.2는 파장에 따른 ITO막의 광투과도를 나타낸다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.106-106
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• 2009

Al-doped ZnO (AZO) thin films were grown on glass substrates by co-sputtering at room temperature. We made ZnO and Al target and ZnO:Al film is deposited with sputter which has two RF gun source. The Al content was controlled by varying Al RF power and effect of Al contents on the properties of ZnO:Al film was investigated. Crystallinity and orientation of the ZnO:Al films were investigated by X-ray diffraction (XRD), surface morphology of the ZnO:Al films was observed by atomic force microscope. Electrical properties of the ZnO:Al films were measured at room temperature by van der Pauw method and hall measurement. Optrical properties of ZnO:Al films were measured by UV-vis-NIR spectrometer.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.339.2-339.2
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• 2016

본 연구에서는 Ti/Al/Ti 금속 배선의 Electro-Migration(EM) 현상을 분석했다. Van der Pauw, Greek Cross bridge, Straight line linear line bridge를 결합한 패턴을 제작하여, 온도 변화에 따른 EM의 발생 시간(Failure Time)을 측정했다. 측정 조건은 W/L=3.5/300 um 소자에 전류 밀도(current density)를 $J=10^4A/cm^2$로 고정하고, 온도를 300 K, 350 K, 400 K로 가변 시켰다. 측정된 Cumulative Failure의 50 % 되는 지점(Median Time To Failure; MTTF)은 각각 22.3시간, 18.46시간, 15.4시간으로 온도가 300 K에서 400 K로 증가함에 따라 MTTF가 6.9시간 감소했다. 이 결과를 통해 Black방정식에서 온도 변수가 $t_{50}$에 영향을 주는 것을 확인했다. 온도가 증가함에 따라 더 많은 전자들이 원자에 충돌하면서 운동량을 전달하고, 더 많은 원자들이 이주되면서 EM 발생 시간이 감소했다.

• Korean Journal of Materials Research
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• v.13 no.11
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• pp.717-720
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• 2003

Heavily $p^{ ＋}$-typed ($10^{20}$ $cm^{-3}$ ) GaAs epilayers have been grown on high-index GaAs substrates with various crystallographic orientations from (100) to (111)A by a low-pressure metalorganic chemical vapor deposition. Carbon (C) tetrabromide (CBr$_4$) was used as a C source. At moderate growth temperatures and high V/III ratios, the hole concentration of C-doped GaAs epilayers shows the crystallographic orientation dependence. The bonding strength of As sites on a growing surface plays an important role in the C incorporation into the high-index GaAs substrates.