• Journal of the Korean Vacuum Society
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• v.19 no.5
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• pp.319-325
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• 2010

Pressure vacuum measurement technique using acoustic impedance change of ultrasonic transducers was studied. The sensor has been setup using two air-coupled ultrasonic transducers, one as a transmitter and the other as a receiver, and put it into vacuum chamber and measured pressure versus ultrasonic amplitude. The result confirms that the standard deviations of four repeat measurements were from 0.0093 to 0.3325 at pressure 6.66 kPa to 202.65 kPa(about two atmosphere), and the relative percents were 0.018% and 0.164% at pressure 133.32 kPa and 202.65 kPa, respectively.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.632-639
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• 2014

Mechanical stress and the vacuum level are the two main factors dominating the quality factor of a resonator operated in the vacuum range 1 mTorr to 10 Torr. This means that if the quality factor of a resonator is very insensitive to the mechanical stress in the vacuum range, it is sensitive to mainly the ambient vacuum level. In this paper, a wafer-level packaged MEMS resonator with a highly vacuum-sensitive quality factor is presented. The proposed device is characterized by a package with out-of-plane symmetry and a suspending structure with only a single anchor. Out-of-plane symmetry helps prevent deformation of the packaged device due to thermal mismatch, and a single-clamped structure facilitates constraint-free displacement. As a result, the proposed device is very insensitive to mechanical stress and is sensitive to mainly the ambient vacuum level. The average quality factors of the devices packaged under pressures of 50, 100, and 200 mTorr were 4987, 3415, and 2127, respectively. The results demonstrated the high controllability of the quality factor by vacuum adjustment. The mechanical robustness of the quality factor was confirmed by comparing the quality factors before and after high-temperature storage. Furthermore, through more than 50 days of monitoring, the stability of the quality factor was also certified.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.4
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• pp.172-174
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• 2011

This paper is presented for robot vacuum cleaners using BLDC motors. Recently, BLDC motors which require smaller size, lower sound noise and higher efficiency have been placed in high value-added products including robot vacuum cleaners, vehicle cars and other industry applications. The DC motors have higher sound noise, higher height of the size and lower efficiency due to electro-magnetic structure using the brushes and the commutators. The proposed BLDC motors are appropriate for the motors adequate in regards to higher efficiency, longer life cycle time, and smaller height of the size when robot vacuum cleaners go to some lower height of the space like under sleeping beds and because it's power source is batteries. The paper shows the performance of the BLDC motors designed by the Finite Element Analysis(FEA) of the electro-magnetic field. This paper shows the mechanical structure and the prototype of the motor with the impeller. The performance characteristics of the BLDC motors with the hall sensor controller are verified by the experimental results.

• Korean Journal of Materials Research
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• v.4 no.1
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• pp.113-116
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• 1994

InSb thin film magnetic sensor, which have been prepared on glass substrate by vacuum evaporation, is investigated in this paper. The dependance of Hall voltage on magnetic field and temperature is examined by Hall effect. The variation of Hall voltage with magnetic field is almost linear at constant current drive but it is deviated from the linearity at constant voltage drive. Hall voltage decreases as the ambient temperature increases, so it is necessary to take into account the temperature effect when the InSb thin film is used as magnetic sensor.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.7
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• pp.1218-1223
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• 2007

A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• Journal of the Korean Ceramic Society
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• v.32 no.12
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• pp.1369-1376
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• 1995

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.3
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• pp.232-239
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• 2008

The position sensors used in a magnetic bearing system are desirable to provide some degree of fault-tolerance as the rotor position is necessary for the feedback control to overcome the open-loop instability. In this paper, we propose an inductive position sensor that can cope with a partial fault in the sensor. The sensor has multiple poles which can be combined to sense the in-plane motion of the rotor. When a high-frequency voltage signal drives each pole of the sensor, the resulting current in the sensor coil contains information regarding the rotor position. The signal processing circuit of the sensor extracts this position information. In this paper, we used the magnetic circuit model of the sensor that shows the analytical relationship between the sensor output and the rotor motion. The multi-polar structure of the sensor makes it possible to introduce redundancy which can be exploited for fault-tolerant operation. The proposed sensor is applied to a magnetically levitated turbo-molecular vacuum pump. Experimental results validate the fault-tolerance algorithm.

• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.179-183
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• 2009

Toluene($C_6H_5CH_3$) gas sensors were fabricated using $PtO_x$ loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs-$PtO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : $PtO_x\;=\;99:1$ in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times of the sensors were as short as less than 1 min., respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.378-379
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• 2012

ITO 만큼 높은 전도성과 광학적 투과성을 갖는 Al-doped ZnO (AZO) 박막을 DC-Pulse magnetron sputtering을 이용하여 40 nm 두께로 증착 후 리소그라피 공정을 통해 $30{\mu}m$ 간격으로 패터닝 하였다. 간격 30 ${\mu}m$로 배열된 AZO를 촉매층으로 하는 수열합성법을 리사이클 공정을 반복하여 수행하여 ZnO 나노선을 성장시켰다. 이와 같이 AZO 전극 사이에 길이 $30{\mu}m$의 ZnO 나노선이 래터럴 구조로 연결된 소자의 $NH_3$ 가스감지 특성을 조사하였다. 합성된 나노선의 전기적, 광학적, 구조적인 특성을 분석하여 높은 가스 감지도를 예상할 수 있는 특성을 확인하였다. 제작된 가스센서를 진공 챔버에 설치 후 양 전극간에 동작전압(Operating voltage)을 1 V로 인가하여 고정한 후에 $NH_3$를 주입(Injection)과 퍼지(Purge)를 반복하며 그 주입량(10 ppm, 20 ppm, 40 ppm, 60 ppm)에 변화를 주었고, 그에 따른 전류변화를 관찰하여 $NH_3$ 가스감지특성을 평가하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.99-99
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• 2012

본 개발에서는 초고속복합분자펌프 구동을 위한 디지털 구동장치를 설계하였다. BLDC구동을 위한 디지털 제어 시스템의 핵심제어 보드 설계 및 모듈 설계를 하여 보드제작 및 기본성능평가를 하고 고속 회전 실험을 하였다. AMB제어기는 넓은 제어대역폭을 확보하기 위하여 FPGA 1개와 마이크로 콘트롤러 2개를 사용하여 구성하였으며 FPGA로 AMB구동을 위한 PWM기능과 CPU 2개의 원활한 Data 통신을 위하여 Dual Memory을 구현하였으며 PWM의 디지털노이즈 회피를 위하여 AMB구동용 PWM과 동기화하여 Gap Sensor 및 전류센서신호 샘플링할 수 있도록 ADC를 구동 및 샘플링한다. 그리고 Gap Sensor 구동 회로와 제어기회로를 하나의 보드로 구연하였다.