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A Study on Characteristics of Angular Rate Sensor using Real Vehicle  

Kim, Byeong-Woo (울산대학 전기전자정보시스템공학부)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.7, 2007 , pp. 1218-1223 More about this Journal
Abstract
A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.
Keywords
electronic stability program; angular rate sensor; gyro; MEMS; vacuum packaging;
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