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http://dx.doi.org/10.5757/JKVS.2010.19.5.319

The Study of Pressure Vacuum Measurement Techniques Using Ultrasonic Acoustic Impedance Transducers  

Hong, S.S. (Korea Research Institute of Standards and Science)
Shin, Y.H. (Korea Research Institute of Standards and Science)
Cho, S.H. (Korea Research Institute of Standards and Science)
Ahn, B.Y. (Korea Research Institute of Standards and Science)
Lim, J.Y. (Korea Research Institute of Standards and Science)
Choi, I.M. (Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.19, no.5, 2010 , pp. 319-325 More about this Journal
Abstract
Pressure vacuum measurement technique using acoustic impedance change of ultrasonic transducers was studied. The sensor has been setup using two air-coupled ultrasonic transducers, one as a transmitter and the other as a receiver, and put it into vacuum chamber and measured pressure versus ultrasonic amplitude. The result confirms that the standard deviations of four repeat measurements were from 0.0093 to 0.3325 at pressure 6.66 kPa to 202.65 kPa(about two atmosphere), and the relative percents were 0.018% and 0.164% at pressure 133.32 kPa and 202.65 kPa, respectively.
Keywords
Ultrasonic wave; Impedance transducer; Repeatability; Pressure vacuum sensor;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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