• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.605-611
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• 2006

We have developed in-situ vacuum gauge calibration system in the range 1 Pa to 100 kPa by using constant volume method. The system is capable of gauge calibration by comparison method without demount the reference gauges. The system will be useful for dissemination of national vacuum standards to foreign developing countries and domestic industries.

• International journal of advanced smart convergence
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• v.10 no.1
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.95-97
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• 1999

A 3.12" FED panel was packaged successfully using the anode plate on which phosphors and black matrix were coated and cathode plate containing emitter arrays. The vacuum level of the panel was investigated during panel evacuation, tip-off and getter activation process. The packaged panel exhibited vacuum level below 2${\times}$10-6 Torr. Similar experiments were carried out for 10" panel made of bare plates. In addition, the vacuum level of two panels was compared continuously after tip off process; one with the getter and the other without it.

• International journal of advanced smart convergence
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• v.7 no.4
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• pp.84-91
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• 2018

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.32-32
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• 2002

• Journal of Korean Vacuum Science & Technology
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• v.6 no.4
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• pp.158-161
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• 2002

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.93-93
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• 1997

• Progress in Medical Physics
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• v.13 no.2
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• pp.74-78
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• 2002

The individual (customized) immobilization has been used to reproduce the patients' set-up on daily base. There are many various devices available commercially. To evaluate dosimetric characteristics of vacuum cushion, we analysed the surface dose and transmission factor for d$_{max}$ when patient is immobilized with vacuum cushion. Experiments were performed with 4 MV (Varian 4/100, USA), 6 MV, 15 MV (Varian CL2100C/D, USA) photon beams and five field sizes (5$\times$5, 10$\times$10, 20$\times$20, 30$\times$30, 40$\times$40 $\textrm{cm}^2$) on each occasion. Outputs were measured from surface of polysterene phantom to d$_{max}$ with four different thicknesses of cushion, which is 12, 32, 48 mm and only vinyl without styroforms. As results, the transmission factor for thicknesses of vacuum cushion was ranged from 0.9953 to 1.0043. The more the thickness of vacuum cushion is thick, the more surface dose delivered to patient is increased. The surface dose vary with the thickness of vacuum cushion for energy and field size. The skin reactions may result. But the variation is not serious in the clinic.

• Journal of Advanced Marine Engineering and Technology
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• v.19 no.4
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• pp.7-16
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• 1995

This article describes the working prnciple, structure and main characteristics of vacuum coolers for vegetables, and gives concrete examples of vacuum coolers that srebeing put to practical use. In particular, newly-developed cavuum coolers with cold storage, utilizing night-time electricity, are focused upon. Processing plants for vegetables, cold-storage rooms and vacuum cooling devices were investigated as possible application of vacuum cooling technology.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.325-330
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• 2001

One of the principal components of the KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak structure is the vacuum vessel, which acts as the high vacuum boundary for the plasma and also provides the structural support for internal components. Hyundai Heavy Industries Inc. has performed the engineering design of the vacuum vessel. Here the overall configuration of the KSTAR vacuum vessel was briefly described and then the design methodology and the analysis results were presented. The vacuum vessel consists of double walls, several ports, leaf spring style supports. Double walls are separated by reinforcing ribs and filled with baking/shielding water. The overall external dimensions of the main body are 3.39 m high, 1.11 m inner radius, 2.99 m outer radius, and made of SA240-316LN. The vacuum vessel was designed to be capable of achieving the base pressure of $1\times10^{-8}$ Torr, and also to be structurally capable of sustaining the vacuum pressure, the electromagnetic and thermal loads during plasma disruption and bakeout, respectively. The vacuum vessel will be baked out maximum $150^{\circ}C$ by hot pressurized water through the channels formed between double walls and the reinforcing ribs. A 3-D temperature distribution and the resulting thermal loads in the vessel were calculated during bakeout. It was found that the vacuum vessel and its supports were structurally rigid based on the thermal stress analysis. The maximum electromagnetic loads on the vacuum vessel induced by eddy and halo currents resulting from the engineering plasma radial and vertical disruption scenarios have been estimated. The stress analyses have been performed based on these electromagnetic loads and the resulting stresses at he critical locations of the vacuum vessel were within the allowable stresses.