• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.5
• /
• pp.475-480
• /
• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.505-506
• /
• 2012

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.23 no.5
• /
• pp.478-484
• /
• 2014

Ultrasonic atomic force microscopy(Ultrasonic-AFM) can be used to obtain images of the elastic properties of a subsurface and to evaluate the elastic properties by measuring the contact resonance frequency. When a tip is in contact with the sample, it is necessary to understand the cantilever behavior and the tip-sample interaction for the quantitative and reliable analysis. Therefore, precise analysis models that can accurately simulate the tip-sample contact are required; these can serve as good references for predicting the contact resonance frequency. In this study, modal analyses of the first four modes were performed to calculate the contact resonance frequency by using a spring model, and the deformed shapes of the cantilever were visualized at each mode. We presented the contact characteristics of the cantilever with a variety of contact conditions by applying the contact area, contact material thickness, and material properties as the parameters for the FEM analysis.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.31 no.2
• /
• pp.174-180
• /
• 2011

Nondestructive surface imaging of elastic characteristic and mechanical property has been studied on nanoscale surface with ultrasonic AFM. Resonance frequency variation of cantilever is theoretically analyzed with respect to contact mechanics as well as experimentally measured. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian model in accordance with the resonance frequency of UAFM cantilever measured experimentally. Consequently, the topography and amplitude images could be obtained successfully and the elastic characteristic at the nanoscale surface was evaluated qualitatively by amplitude signals.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.10a
• /
• pp.949-950
• /
• 2012

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.22 no.5
• /
• pp.795-799
• /
• 2013

This paper describes a novel hybrid surface polishing process combining non-traditional electrochemical polishing (ECP) with external artificial ultrasonic vibration. The purpose of this study is to develop an easier method for improving stainless steel surfaces. To this end, vibration electrochemical polishing (VECP), a novel ultrasonic manufacturing process, for enhancing electrochemical reaction and surface quality compared with that achieved using conventional ECP is suggested. In addition, for finding the optimized experimental conditions, the two methods are compared under various current densities. Localized roughness of the work material is measured with atomic force microscopy (AFM) and scanning electron microscopy (SEM) for obtaining detailed surface information.

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.2
• /
• pp.148-153
• /
• 2013

This study demonstrates a novel hybrid surface polishing process combining non-traditional electrochemical polishing(ECP) with external artificial ultrasonic vibration. ECP, typical noncontact surface polishing process, has been used to improve surface quality without leaving any mechanical scratch marks formed by previous mechanical processes, which can polish work material by electrochemical dissolution between two electrodes surfaces. This research suggests vibration electrochemical polishing(VECP) assisted by ultrasonic vibration for enhancing electrochemical reaction and surface quality compared to the conventional ECP. The localized roughness of work material is measured by atomic force microscopy(AFM) for detailed information on surface. Besides roughness, overall surface quality, material removal rate(MRR), and productivity etc. are compared with conventional ECP.

• Journal of Sensor Science and Technology
• /
• v.13 no.1
• /
• pp.66-71
• /
• 2004

Pt-doped zinc oxide (ZnO:Pt) films were deposited by ultrasonic spray pyrolysis. Resistivity variation with Pt concentration was measured. The Pt distribution in ZnO:Pt films was studied through Auger Electron Spectroscopy (AES). The ZnO:Pt films were annealed in the ambient of air, water vapor and ozone, respectively. The variation in crystallographic properties and surface morphologies with respect to the annealing condition was observed by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The resistivity variation of the films with the annealing condition was measured. Finally, Atomic Force Microscopy (AFM) measurements were carried out to study the effects of the annealing on the roughness of ZnO:Pt films.

• Journal of the Korean institute of surface engineering
• /
• v.54 no.6
• /
• pp.315-323
• /
• 2021

In general, surface treatments of electroless Ni-P coating are extensively applied in the industry due to their excellent properties for considerable wear resistance, hardness, corrosion resistance. This study aims to determine the effect of ultrasonic conditions on the morphology, alumina content, roughness, hardness, and corrosion resistance of electroless Ni-P-Al₂O₃ composite coatings. The characteristics were analyzed by Energy-dispersive X-ray spectroscopy (EDX), x-ray diffractions (XRD), and atomic force microscopy (AFM), etc. In this study, the effect of ultrasonic condition uniformly distributed alumina within Ni-P solution resulting in a smoother surface, lower surface roughness. Furthermore, the corrosion resistance behavior of the coating was analyzed using tafel polarization curves in a 3.5 wt.% NaCl solution at 25 ℃. Under ultrasonic, Al₂O₃ content in Ni-P composite solution increased from 0.5 to 5.0 g/L, Al₂O₃ content at 3.0 g/L was showed a significantly enhanced corrosion resistance. These results suggested that ultrasonic condition was an effective method to improve the properties of the composite coating.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.12 no.4
• /
• pp.75-80
• /
• 2013

Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.