• 한국공작기계학회논문집
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• 제11권3호
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• pp.28-32
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• 2002

Recently, the miniature of electric products such as notebook, cellular-phone etc. is apparently appeared, due to the smaller size of the semiconductor chips. As the size of chip gets smaller, the circuit could be easily damaged by the slightest influence, therefore it is important to investigate the machining quality of $\mu$ BGA. This paper deals with machining characteristics of the $\mu$ BGA singulation. The relationships between the singulation face and machining quality of the $\mu$ BGA singulation are investigated. It is confirmed that machining quality improves as the singulation force decreases.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• 한국레이저가공학회지
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• 제3권3호
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• pp.21-29
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• 2000

For the direct metal shape processing the powder feed device which is different from the widely used in rapid prototyping. is developed, The three dimensional object is shaped with the melting metal powder. The developed research has applied to rapid prototyping in ultraprecision for MEMS and medical science fields required of rapid manufacture of complex shape. The goal of this study make 3D model which has precision accuracy. Powder spreading apparatus has been more improved because that the control of powder spread is very important in layer manufacturing. It consists of the vibration motor, nozzle and tube which supplies various metal powder. This apparatus could control the spreading velocity that could control powder spreading thickness. Laser on/off switch was adapted because laser scanning velocity must be preserved constantly to prevent heat transformation of laser overheating. The error between sintered thickness md experimental one occurred by shrinkage in sintering melting process. The problem of heat transformation was solved by On/Off switching system.

• 한국기계가공학회지
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• 제11권6호
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• pp.69-74
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• 2012

Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystalline Diamond) have been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of Al5083 aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

• 한국정밀공학회지
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• 제14권11호
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.

• 한국정밀공학회지
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• 제14권11호
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• pp.118-125
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• 1997

Non-contacting optical microscopes are increasingly used in recent industrial applications of probes for coordinate measuring machines. They have been found more efficient than conventional touch trigger porbes with ball tips especially in inspecting small-sized objects. There are two major factors affecting measuring accuracy: (1) geometric relations between coordinate systems, (2) magnification ratios of a microscope. In order to determine the magnification ratios exactly, optical imaging of edge was theroretically analyzed and practically adopted to image processing for edge detection. In addition, this paper proposes a geometric calibration method to obtain exact coordinates of measured points from the relations between the machine coordinate system and the image. In the method, the error according to the squareness between the machine axises was also removed. The method was practically adopted to a real coordinate measuring machine. An ultraprecision measurement of 0.2 um uncertainty can be practically achieved.

• 한국정밀공학회지
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• 제12권12호
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• pp.72-80
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• 1995

Ultraprecision machining technology has been playing a rapidly increasing and important role in manufacturing. However, the physics of the micromachining process at very small depth of cut, which is typically 1 .mu. m or less is not well understool. Shear along the shear plane and friction at the rake face dominate in conventional machining range. But sliding along the flank face of the tool due to the elastic recovery of the workpiece material and the effects of plowing due to the large effective negative rake angle resultant from the tool edge radius may become important in micromachining range. This paper suggests an orthogonal cutting model considering the cutting edge radius and then quantifies the effect of plowing due to the large effective negative rake angle.

• Journal of the Optical Society of Korea
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• 제7권4호
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• pp.230-233
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• 2003

This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (${\leq}$50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was $Si_3N_4$ windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.

• 한국정밀공학회지
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• 제29권8호
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• pp.845-852
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• 2012

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

• 한국정밀공학회지
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• 제29권8호
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.