Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Measurement of a Six-degree-of-freedom Dynamic Characteristics using Angle Sensor-Implemented Grating Interferometry

회절격자 간섭계를 이용한 초정밀 스테이지의 6 자유도 운동 특성 측정

  • Lee, Cha-Bum (School of Mechatronics, Gwangju Institute of Science & Technology) ;
  • Kim, Gyu-Ha (School of Mechatronics, Gwangju Institute of Science & Technology) ;
  • Lee, Sun-Kyu (School of Mechatronics, Gwangju Institute of Science & Technology)
  • 이차범 (광주과학기술원 기전공학부) ;
  • 김규하 (광주과학기술원 기전공학부) ;
  • 이선규 (광주과학기술원 기전공학부)
  • Received : 2012.01.04
  • Accepted : 2012.05.22
  • Published : 2012.08.01
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Abstract

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

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References

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