A Study on Machining Characteristics of the Ultraprecision Singualtion of Chip Size Package(CSP)

CSP의 초정밀 싱귤레이션 가공특성에 관한 연구

  • 김성철 (부산대학교 정밀기계공학과 대학원) ;
  • 이은상 (인하대학교 기계공학부)
  • Published : 2002.06.01

Abstract

Recently, the miniature of electric products such as notebook, cellular-phone etc. is apparently appeared, due to the smaller size of the semiconductor chips. As the size of chip gets smaller, the circuit could be easily damaged by the slightest influence, therefore it is important to investigate the machining quality of $\mu$ BGA. This paper deals with machining characteristics of the $\mu$ BGA singulation. The relationships between the singulation face and machining quality of the $\mu$ BGA singulation are investigated. It is confirmed that machining quality improves as the singulation force decreases.

Keywords

References

  1. 월간반도체 no.5 반도체 패키징 기술 월간반도체 편집부
  2. 월간반도체 no.1 μBGA(월간 반도체 1월) 간반도체 편집부
  3. ICPE '97 Taipei Blade Wear and Wafer Chipping in Dicing Process T. Miwa;I. Insaki
  4. EUSPEN;Proceeding v.1 Dicing of Silicon Wafer I. Inasaki