References
- 월간반도체 no.5 반도체 패키징 기술 월간반도체 편집부
- 월간반도체 no.1 μBGA(월간 반도체 1월) 간반도체 편집부
- ICPE '97 Taipei Blade Wear and Wafer Chipping in Dicing Process T. Miwa;I. Insaki
- EUSPEN;Proceeding v.1 Dicing of Silicon Wafer I. Inasaki
Recently, the miniature of electric products such as notebook, cellular-phone etc. is apparently appeared, due to the smaller size of the semiconductor chips. As the size of chip gets smaller, the circuit could be easily damaged by the slightest influence, therefore it is important to investigate the machining quality of