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http://dx.doi.org/10.7736/KSPE.2012.29.8.845

Development of Diaphragm-type Stylus Probe for Ultra-precision On-machine Measurement Application  

Lee, Jung-Hoon (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering)
Lee, Chan-Hee (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering)
Choi, Joon-Myeong (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering)
Kim, Ho-Sang (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering)
Publication Information
Journal of the Korean Society for Precision Engineering / v.29, no.8, 2012 , pp. 845-852 More about this Journal
Abstract
The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.
Keywords
On-machine Measurement; Diaphragm; Ruby Tip Stylus; Capacitive Sensor; Axial Stiffness; Least Square Circle Fitting;
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