• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.91-96
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• 2001

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_{2}$ particles are synthesized by the injection of TEOS vapor, ions and reaction gas in furnace. Ions were generated by Corona discharge electrode and these ions charge $SiO_{2}$ particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions, it's morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 kV to 5.0 kV, it is observed that the mean diameter of $SiO_{2}$ particle decreases from 94 nm to 42 nm.

• 대한기계학회논문집B
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• 제25권5호
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• pp.660-665
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• 2001

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiO$_2$particles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiO$_2$particle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.174-179
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• 2000

Ultrafine particles have been used widely in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_2$ particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spray ins method. Electro-hydrodynamic spray can generate in the range of submicron-size TEOS particles with high electric charge by applying a high electric field between the liquid injection nozzle and the reaction tube. This TEOS particles are thermally decomposed or oxidized to produce nanometresized $SiO_2$ particles in the reaction tube. Spherical, nonagglomerated and ultrafine particle generated and examined at furnaced temperature, $800^{\circ}C$ and TEOS flowrate of 0.49 or $1.00cm^3/hr$ using SEM and SMPS. As the total gas flowrate changes from 1.51pm to 5.01pm, the mean diameter of $SiO_2$ particle decreases from 120 nm to 68nm.

• 한국세라믹학회지
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• 제32권11호
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• pp.1246-1254
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• 1995

A numerical model for fabrication and deposition of ultrafine SiO2 particles were proposed in the simplified horizontal MCVD apparatus using tube furnace reactor. The model equations such as energy and mass balance equations and the 0th, 1st and 2nd moment balance equations of aerosols were considered in the reactor. The phenomena of SiCl4 chemical reaction, SiO2 particle formation and coagulation, diffusion and thermophoresis of SiO2 particles were included in the aerosol dynamic equation. The profiles of gas temperature, SiCl4 concentration and SiO2 particle volume were calculated for standard conditions. The concentrations, sizes and deposition efficiencies of SiO2 particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate and inlet SiCl4 concentration.

• 산업기술연구
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• 제17권
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• pp.233-239
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• 1997

The effects of preheating the gas stream on deposition characteristics of ultrafine $SiO_2$ particles were investigated theoretically. The model equations such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, $SiCl_4$ concentrations, $SiO_2$ particle volumes, $SiO_2$ particle sizes and deposition efficiencies of $SiO_2$ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the $SiO_2$ particle size distribution becomes more uniform, because the effect of $SiCl_4$ diffusion decreases.

• 대한기계학회논문집B
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• 제26권5호
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• pp.710-715
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• 2002

The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the injection of TEOS vapor, irons and reaction gas in a furnace. Ions are generated by corona discharge and these ions charge SiO$_2$particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions. Their morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 to 5.0 kV, it is observed that the melon diameter of SiO$_2$particle decreases from 94 nm to 42 nm.

• 산업기술연구
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• 제16권
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• pp.157-168
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• 1996

The deposition characteristics of ultrafine $SiO_2$ particles were investigated in a tube furnace reactor theoretically and experimentally controlling tube wall temperature in deposition zone. The model equations such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of $SiO_2$ particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate inlet $SiCl_4$ concentration and were compared with the experimental results.

• 한국세라믹학회지
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• 제24권1호
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• pp.23-32
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• 1987

Synthesis of high purity ultrafine Si3N4 and ${\beta}$-Sialon powders was investigated via the simultaneous reduction and nitriding of amorphous SiO2, SiO2-Al2O3 system prepaerd by hydrolysis of alkoxides, using carbonablack as a reducing agent. In Si(OC2H5)4-C2H5 OH-H2 O-NH4OH system, hydrolysis rate increased with increasing reaction temperature and pH. Pure ${\alpha}$-Si3N4 was formed at 1350$^{\circ}C$ for 5 hrs in N2 atmosphere. In Si(OC2H5)4-Al(OC3H7)3-C6H6-H2 O-NH4OH system, weight loss increased as Si/Al ratio decreased. Single phase ${\beta}$-Sialon consisted of Si/Al=2 was formed at 1350$^{\circ}C$ in N2 and minor phases of ${\alpha}$-Si3N4, AIN, and X-phase were existed besides theSialon phase at other Si/Al ratios. The Si3N4 and Sialon powders synthesized from alkoxides consisted of uniform find particles of 0.05-0.2$\mu\textrm{m}$ in diameter, respectively.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2000년도 추계학술대회 및 발표대회 강연 및 발표논문 초록집
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• pp.26-26
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• 2000

• 한국재료학회지
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• 제12권11호
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• pp.850-855
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• 2002

Silica powders were prepared from $SiCl_4$-$H_2$O system by chemical vapor deposition process, and investigated on size control of the products with reaction conditions. The products were amorphous and nearly spherical particles with 130nm~50nm in size. The size distribution became narrow with the increase of [$H_2$O]/[SiCl$_4$] concentration ratio. The particle size decreased with the increase of reaction temperature, [$H_2$O]/[SiCl$_4$] concentration ratio and total flow rate. The specific surface area measured by BET method was about three times larger than that of electron microscope method.