Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Characteristics of Ultrafine SiO$_2$Particle Synthesized by Electro-Hydrodynamic Spray Injection in a Furnace

반응로내 전기-수력학적 분사에 의한 비응집 초미세 SiO$_2$ 입자 합성과 특성

  • Published : 2001.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiO$_2$particles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiO$_2$particle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.

Keywords

References

  1. Wooldridge, M. S., 1998, 'Gas-Phase Combustion Synthesis of Particles,' Progress in Energy and Combustion Science, Vol. 24, pp. 63-87 https://doi.org/10.1016/S0360-1285(97)00024-5
  2. Adachi, M., Okuyama, K. and Tohge, N., 1995, 'Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapour Deposition Processing Using Tetraethylorthosilicate,' Journal of Material Science, Vol. 30, pp.932-937 https://doi.org/10.1007/BF01178427
  3. Gurav, A., Kodas, T., Pluym, T. and Xiong, Y., 1993, 'Aerosol Processing of Materials,' Aerosol Science and Technology, Vol. 19, pp. 411-452 https://doi.org/10.1080/02786829308959650
  4. 안강호, 김남효, 이종호, 배귀남, 1996, 'Differential Mobility Analyzer(DMA)내의 입자운동 및 특성분석,' 대한기계학회논문집(B), 제 20 권, 제 6 호, pp, 005-2013
  5. 이규운, 안강호, 1998, '전기수력학적 방법에 의한 초미세입자 발생에 관한 연구,' 대한기계학회논문집 A권, 제 22권, 제 11 호, pp. 1983-1988
  6. 안진홍, 윤진욱, 안강호, 김광영, 2001, '전기수력학적 방법을 이용한 미세입자의 하전 특성에 관한 연구,' 설비공학논문집, Vol. 13, No. 4, 게재예정
  7. Chen, D., Pui, D.Y.H., and Kaufman, S.L, 1995, 'Electrospraying of Conducting Liquids for Monodisperse Aerosol Generation in the 4nm to 1.81μm Diameter Range,' J. of Aerosol Sci., Vol. 26, No.6, pp. 963-977 https://doi.org/10.1016/0021-8502(95)00027-A