Journal of Industrial Technology (산업기술연구)
- Volume 16
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- Pages.157-168
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- 1996
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- 1229-9588(pISSN)
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- 1598-1371(eISSN)
A Study on the Deposition Characteristics of Ultrafine SiO2 Particles by Temperature Control in Deposition Zone
증착 구간에서의 온도 제어에 따른 SiO2 초미립자의 증착 특성 고찰
Abstract
The deposition characteristics of ultrafine
Keywords