• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.27-32
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• 2010

The OMM(On-Machine-Measurement) system has many advantages compare to conventional measurement in the way the time and cost. But, the sensor suitable to OMM system is restrictive use. Touch trigger probe sensor has long time for measurement and non-contact sensor has directional demerit. Because the long mechanical parts such as gear and lead screw for pump, injector and machine tools has big and heavy, unclamp and transferring for measurement in machining process is very difficult. This paper presents a development of ultra miniature eddy current displacement sensor with 3 axes for On-Machine-Measurement system. The accuracy of the sensor is experimentally proved in the grinding machine. In experimental results, the accuracy has under ${\pm}5\;{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.4
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• pp.297-301
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• 2014

The biggest factors, which lower the machining accuracy of machine, are thermal deformation and chatter vibration. In this article, we introduce the development case of a device and technology that can automatically compensate thermal deformation errors of machine during long-time processing on the machine tool's CNC (Computerized Numerical Controller) in real time. In machine processing, the data acquisition of temperature signal in real time and auto-compensation of the machine origin of machine tools depending on thermal deformation have significant influence on improving the machining accuracy and the rate of operation. Thus, we attempts to introduce the related contents of the development we have made in this article : The development of a device that embedded the acquisition part of temperature data, linear regression to get compensation value, compensation model of neural network and a system that compensates the machine origin of machine tool automatically during manufacturing process on the CNC.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.315-322
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• 2011

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.423-429
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• 2015

Linear motion (LM) ball guides have good accuracy and high efficiency. They are widely applied for precision machinery such as machine tools, semiconductor fabrication machines and robots. However, friction force incurs heat between the balls and grooves. Thermal expansion due to the heat deteriorates stiffness and accuracy of the LM ball guides. For accurate estimation of stiffness and accuracy during the linear motion, friction models of LM ball guides are required. To formulate accurate frictional models of LM ball guides according to load and preload conditions, rolling and viscous frictional analyses have been performed in this paper. Contact loads between balls and grooves are derived from Hertzian contact analysis. Contact angle variation is incorporated for the precision modeling. Viscous friction model is formulated from the shear stress of lubricant and the contact area between balls and grooves. Experiments confirm validity of the developed friction model for various external load and feedrate conditions.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.1
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• pp.82-88
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• 2009

Ultra-precision turning is highly needed to manufacture molds for precision lens. In this study, micro-turning combined with elliptical vibration cutting (EVC), which is known to enhance micro- machining quality, was investigated by installing a rotary stage into the micro-grooving machine. From machining experiments involving materials of copper, brass, and aluminum and single and poly crystalline diamond tools, it was found that EVC produced thinner and curlier chips and that better surface finish could be achieved, compared with conventional turning, owing to prohibition of formation of burrs and built-up edges. Therefore, we found EVC micro turning could be readily utilized to manufacture precision mold.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.2
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• pp.143-148
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• 2016

A micro end mill is one of the precise tools used in machining ultra-precision products such as microchannel and micropatterned mold. To achieve the required precision of these products, several studies investigated the cutting force, burr formation, and burr generation mechanism of micro end mills; however, there are few studies on the alignment of micro tools, which is the foundation of machining. Hence, in this investigation, relation expressions were derived to determine the relation between the misalignment parameters and the machining accuracy. At the same time, the effect of the machining parameters was analyzed using a multiple linear regression analysis and the analysis of variance. The results indicate that the tilting angle of a micro tool has more influence on the machining accuracy than other parameters.