• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• 한국정밀공학회지
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• 제27권6호
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• pp.17-23
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• 2010

Recent research topics of ultra-precision micro, nano machining using femtosecond lasers are described in the paper.

• 한국정밀공학회지
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• 제20권12호
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• pp.11-18
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• 2003

• Design & Manufacturing
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• 제14권3호
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• pp.63-70
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• 2020

As the consumer market in the VR(virtual reality) and the head-up display industry grows, the demand for 5-axis machines and grooving machines using on a ultra-precision machining increasing. In this paper, ultra-precision diamond tools satisfying the cutting edge width of 500 nm were developed through the process research of a focused ion beam. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam. In order to reduce the influence of the Gaussian beam emitted from the focused ion beam, the lift-off process technology used in the semiconductor process was used. 2.9 ㎛ of Pt was coated on the surface of the diamond tool. The sub-micron tool with a cutting edge of 492.19 nm was manufactured through focused ion beam machining technology. Toshiba ULG-100C(H3) equipment was used to process fine-pattern using the manufactured ultra-precision diamond tool. The ultra-precision machining experiment was conducted according to the machining direction, and fine burrs were generated in the pattern in the forward direction. However, no burr occurred during reverse machining. The width of the processed pattern was 480 nm and the price of the pitch was confirmed to be 1 ㎛ As a result of machining.

• 한국정밀공학회지
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• 제27권12호
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• pp.9-14
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• 2010

Using an IR (infrared) optical system of observation and research were performed long before. Nowadays satellites equipped with IR optical system observe the earth and universe. In this paper, we developed the IR optical system for main payload of the STSAT-3 (Science and Technology Satellite -3). We studied the ultra precision machining technique to fabricate FPL-53 lenses which is the IR optical material for space observation camera of the STSAT-3. DOE (Design of Experiment) was used to find best machining characteristic for FPL-53. Finally we fabricated FPL-53 aspheric lens with the form accuracy of P-V $0.36\;{\mu}m$.

• 한국기계가공학회지
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• 제11권2호
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• pp.13-19
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• 2012

Ultra Precision Machining Techniques, such as manufacturing Micro Lens Array(MLA), off-axis mirror, $F-{\theta}$ lens for laser printer, are achieved, based on technologies in consequence of development of modern high-precision machining mechanism. Above all, FTS(Fast Tool Servo) and STS(Slow Tool Servo) are more innovative technologies for reducing time and development costs. In this paper, it is described that MLA machining technique by FTS, off-axis mirror machining technique by STS, optics for observing space, and development of infrared aspheric lens for a thermal imaging microscope.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.559-560
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• 2008

• 한국정밀공학회지
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• 제22권12호
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• 한국정밀공학회지
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• 제19권8호
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• pp.126-133
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• 2002

The cutting thickness of ultra-precision machining is generally very small, only a few micrometer or even down to the order of a few nanometer. In such case, a basic understanding of the mechanism on the micro-machining process is is necessary to produce a high quality surface. When machining at very small depths of cut, metal flow near a rounded tool edge become important. In this paper a finite element analysis is presented to calculate the stagnation point on the tool edge or critical depth of cut below which no cutting occurs. From the simulation, the effects of the cutting speed on the critical depths of cut were calculated and discussed. Also the transition of the stagnation point according to the increase of the depths of cut was observed.

• 한국정밀공학회지
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• 제32권11호
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• pp.983-988
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• 2015

This paper details a new ultra-precise turning method for increasing surface quality, "Multi Point B Axis Control Method." Machined surface error is minimized by the compensation machining process, but the process leaves residual chip marks and surface roughness. This phenomenon is unavoidable in the diamond turning process using existing machining methods. However, Multi Point B axis control uses a small angle (< $1^{\circ}$) for the unused diamond edge for generation of ultra-fine surfaces; no machining chipping occurs. It is achieved by compensated surface profiling via alignment of the tool radial center on the center of the B axis rotation table. Experimental results show that a diamond turned surface using the Multi Point B axis control method achieved P-V $0.1{\mu}m$ and Ra 1.1nm and these ultra-fine surface qualities are reproducible.