Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Ultra-precision Machining using a Femtosecond Laser

펨토초 레이저 응용 정밀 가공

  • Cho, Sung-Hak (Nano-Machining Lab., Korea Institute of Machinery and Material) ;
  • Park, Jung-Kyu (Nano-Machining Lab., Korea Institute of Machinery and Material) ;
  • Kim, Jae-Gu (Nano-Machining Lab., Korea Institute of Machinery and Material) ;
  • Chang, Won-Seok (Nano-Machining Lab., Korea Institute of Machinery and Material) ;
  • Choi, Doo-Sun (Nano-Machining Lab., Korea Institute of Machinery and Material) ;
  • Whang, Kyung-Hyun (Nano-Machining Lab., Korea Institute of Machinery and Material)
  • 조성학 (한국기계연구원 나노융합기계) ;
  • 박정규 (한국기계연구원 나노융합기계) ;
  • 김재구 (한국기계연구원 나노융합기계) ;
  • 장원석 (한국기계연구원 나노융합기계) ;
  • 최두선 (한국기계연구원 나노융합기계) ;
  • 황경현 (한국기계연구원 나노융합기계)
  • Received : 2010.04.15
  • Accepted : 2010.05.10
  • Published : 2010.06.01
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Abstract

Recent research topics of ultra-precision micro, nano machining using femtosecond lasers are described in the paper.

Keywords

References

  1. Oh, K.-D., "Micro material machining using a femtosecond laser," KISTI Reports, 2004.
  2. Cho, S.-H., Chang, W.-S., Kim, J.-G. and Whang, K.-H., "Self-fabricated single mode waveguide in fluoride glass excited by self-channeled plasma filaments," Appl. Phys. Lett., Vol. 91, No. 12, Paper No. 121907, 2007. https://doi.org/10.1063/1.2779247
  3. Shon, H.-G., Lee, J.-H., Kim, J.-G. and Shin, D.-S., "Ultra precision machining using ultrafast lasers," Machining and Material, Vol. 17, No. 2, pp. 13-21, 2005.
  4. Lee, J.-M., "State of femto science research" Laser Techniques, Vol. 116, No. 3, pp. 28-39, 2003.
  5. Cho, S.-H., Chang, W.-S., Kim, K.-R. and Hong, J. W., "Femtosecond laser embedded grating micromachining of flexible PDMS plate," Opt. Comm., Vol. 282, No. 7, pp. 1317-1321, 2009. https://doi.org/10.1016/j.optcom.2008.12.032